• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.146-147
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• 2007

We present full 3-D simulation of dielectrophoretic (DEP) deflection of particle trajectory in micro channel and compare the simulation results with experimental results. In simulation, the particle 3-D movements along x, y and z-axis are simulated precisely, and the streamlines of particles movements and the change of particle height are investigated experimentally. Therefore, the deflection performance is investigated on the designed and fabricated deflection microchip.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.43-44
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• 2015

Electrodeposited Ni and Ni-SiC composite coatings were prepared on Cu substrates by using the Ni-Sulfamate electrolytic bath. Thus prepared samples were subjected for the two different types of post surface modification techniques; i.e. Laser Surface Texturing (LST) and Ultrasonic Nano Surface Modification (UNSM), respectively in order to investigate their effects on surface and interface related properties of the coatings. Hemispherical dimples, with 80 to 200 um dimple spacing, were created and examined on the surfaces of the materials studied. The results revealed that micro-surface texturing with 150 um dimple spacing considerably improved the coefficient of friction. Dimple spacing accuracy and incorporated second phase ceramic particles both contributed significantly to reduction in coefficient of friction. On the other hand, application of UNSM considerably modified the surface topography, led to increase the Vickers microhardness, and reduced the wear and coefficient of friction as compared to non UNSM treated Ni and Ni-SiC samples.

• The Korean Journal of Applied Statistics
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• v.28 no.5
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• pp.895-906
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• 2015

Diffusion is a mathematical tool to explain the fluctuation of financial assets and the movement of particles in a micro time scale. There are ongoing statistical trials to develop an estimation method for diffusion models based on likelihood. When we estimate diffusion models by applying the maximum likelihood estimation method on data observed at discrete time points, we need to know the transition density of the diffusion. In order to approximate the transition densities of diffusion models, we suggests the method to approximate the path integral of the random process with normal random variables, and compare the numerical properties of the method with other approximation methods.

• Applied Science and Convergence Technology
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• v.26 no.4
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• pp.66-69
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• 2017

Physically implanted surface islands of Nano Carbon Tube (NCT) and ${\alpha}-F_2O_3$ particles have been produced on Al-doped ZnO (AZO)/glass surfaces by simple and direct ND:YAG laser beam irradiation. Sheet resistance of the reconstructed surface increased by about 3.6% of over AZO. Minimal surface damage can be repaired by ND:YAG laser beam irradiation in conjunction with proper impurities. Implanted islands of NCT, which are considered to be a good conductive impurity, on AZO increased the sheet resistance by about 1.8%, while implanted islands of ${\alpha}-F_2O_3$, an insulating impurity, on AZO increased sheet resistance by about 129% compared with a laser beam treated AZO. This study provides insight regarding surface implantations of nanowires and micro-circuits, doping effects for semiconductors and optical devices, surface area and impurity effects for catalysis.

• Geomechanics and Engineering
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• v.16 no.5
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• pp.495-501
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• 2018

Geogrid application that has proved to be an effective and economic method of reinforcing particles, is widely used in geotechnical engineering. The discrete element method (DEM) has been used to investigate the micro mechanics of the geogrid deformation and also the interlocking mechanism that cannot be easily studies in laboratory tests. Two types of realistically shaped geogrid models with square and triangle apertures were developed using parallel bonds in PFC3D. The calibration test simulations have demonstrated that the precisely shaped triangular geogrid model is also able to reproduce the deformation and strength characteristics of geogrids. Moreover, the square and triangular geogrid models were also used in DEM pull-out test simulations with idealized shape particle models for validation. The simulation results have been shown to provide good predictions of pullout force as a function of displacement especially for the initial 30 mm displacement. For the granular material of size 40 mm, both the experimental and DEM results demonstrate that the triangular geogrid of size 75 mm outperforms the square geogrid of size 65 mm. Besides, the simulations have given valuable insight into the interaction between particle and geogrid and also revealed similar deformation behavior of geogrids during pullout. Therefore, the DEM provides a tool which enable to model other possible prototype geogrid and investigate their performance before manufacture.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.76-83
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• 2021

This study examines the characteristics of spraying conditions based on the change in standoff distance during fine particle spraying while measuring the surface roughness, maximum depth, and maximum width of the sprayed surface. The processing shape of the sprayed surface is analyzed to understand the effects of injection pressure, nozzle diameter, standoff distance, processing shape, processing cycle, processing speed, and injection particles, which are the main factors of fine particle injection processing. Based on the derived characteristics, we attempt to determine the interrelationships of these major factors. The standoff distance is set as a variable factor and a spray machining experiment using a hexagonal shape (from among polygons) instead of square and circular shapes is conducted. Results reveal that research on the characteristics of spraying conditions could be expanded based on changes in the shapes of workpieces.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.11
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• pp.64-69
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• 2020

To determine the effective factors for microparticle blasting with precise sequence position control in the x-axis and y-axis directions, we conducted a statistical experimental analysis of blasted square shapes by considering five condition factors. The control input and output were operated simultaneously by rotation-linear motion conversion and fine particles were blasted onto the aluminum specimen by precise position control driving using multiple execution codes. The micro-driving device used for processing was capable of microparticle blasting and of controlling the system through contact with a limit sensor at high speed and a two-degree-of-freedom driving mechanism. Our experiments were conducted on 1,050 specimens of pure aluminum (containing <1% of other elements). The effects of several factors (e.g., particle and nozzle diameters, blasting pressure, and federate and blasting cycle numbers) on the surface roughness and blasted surface's depth were verified through a statistical experimental analysis by applying the dispersion analysis method. This statistical analysis revealed that the nozzle diameter, the blasting pressure, and the blasting cycle number were the dominant factors.

• Journal of Electrochemical Science and Technology
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• v.12 no.4
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• pp.440-452
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• 2021

Enhancement of durability and reduction of maintenance cost of concrete, with the implementation of various approaches, has always been a matter of concern to researchers. The integration of pozzolans as a substitute for cement into the concrete is one of the most desirable technique. Silica fume (SF) and colloidal nanosilica (CS) have received a great deal of interest from researchers with their significant performance in improving the durability of concrete. The synergistic role of the micro and nano-silica particles in improving the main characteristics of cemented materials needs to be investigated. This work aims to examine the utility of partial substitution of cement by SF and CS in binary and ternary blends in the improvement of the durability characteristics linked to resistance for electrochemical corrosion using electrical resistivity and half-cell potential analysis and chloride penetration trough rapid chloride penetration test. Furthermore, the effects of this silica mixture on the compressive strength of concrete under normal and aggressive environment have also been investigated. Based on the maximum compression strength of the concrete, the optimal cement substituent ratios have been obtained as 12% SF and 1.5% CS for binary blends. The optimal CS and SF combination mixing ratios has been obtained as 1.0% and 12% respectively for ternary blends. The ternary blends with substitution of cement by optimal percentage of CS and SF exhibited decreased rate for electrochemical corrosion. The strength and durability studies were found in consistence with the microstructural analysis signifying the beneficiary role of CS and SF in upgrading the performance of concrete.

• Journal of the Korean Society of Visualization
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• v.19 no.3
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• pp.123-129
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• 2021

Many plants and animals in nature have superhydrophobic surfaces. This superhydrophobic surface has various properties such as self-cleaning, moisture collection, and anti-icing. In this study, the superhydrophobic properties of PTFE surface were treated by plasma etching. There were four important factors that changed the surface properties. Micro-sized protrusions were formed by plasma etching. The most influential parameter was RF Power. The contact angle of the pristine PTFE surface was about 113.8°. The maximum contact angle of the surface after plasma treatment with optimized parameters was about 168.1°. In this case, the sliding angle was quite small about 1°. These properties made it possible to remove droplets easily from the surface. To verify the self-cleaning effect of the surface, graphite was used to contaminate the surface and remove it with water droplets. Graphite particles were easily removed from the optimized surface compared to the pristine surface. As a result, a surface having water repellency and self-cleaning effects could be produced with optimized plasma etching parameters.