• Proceedings of the KIEE Conference
• /
• 1993.11a
• /
• pp.195-197
• /
• 1993

In this paper, a planar vibratory gyroscope is designed and fabricated in macro model. Elementary experiment and test are done for micro model. This gyroscope has a double gimbal structure with an active dimension $80{\times}120{\times}1\;mm^3$. Outer gimbal vibration is generated by electromagnetic force using ferrite E-core wounded by coil. Inner gimbal vibration is detected by inductive sensor. It is demonstrated' that mechanical and electrical symmetries are important for improvement of vibratory gyroscope.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.33 no.3
• /
• pp.47-56
• /
• 2005

This paper presents a performance improvement result with the aid of closed feedback controller loop to a micro gyroscope. The dynamic model of a micro gyroscope is derived and a conventional proportional and derivative controller is designed via frequency domain analysis. The proposed control loop is implemented using several analog devices and applied to the SNU-Bosch MEMS gyroscope to check its performance improvement in real environment. The experiments demonstrated the performance improvement with the proposed feedback control loop. The bandwidth, linearity, and bias stability are improved to 78 Hz, 0.504 %, and 0.043 deg/sec, respectively, from 35 Hz, 2.07 %, and 0.066 deg/sec of open loop system.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1547-1552
• /
• 2003

In this paper, we present a planar single-crystalline silicon x-axis micro-gyroscope fabricated with a perfectly aligned vertical actuation combs on one silicon wafer, using the extended SBM technology. The fabricated x-axis micro-gyroscope has the resolution of 0.1 deg/sec, the bandwidth of 100 Hz. These research results allow integrating 6 axes inertial measurement (3 accelerations and 3 angular rates) on the same silicon substrate using the same process for the first time.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1537-1541
• /
• 2003

In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

• Journal of Institute of Control, Robotics and Systems
• /
• v.15 no.3
• /
• pp.258-264
• /
• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• Proceedings of the KIEE Conference
• /
• 2004.07c
• /
• pp.2090-2092
• /
• 2004

In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.

• Smart Structures and Systems
• /
• v.6 no.7
• /
• pp.793-810
• /
• 2010

This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers. In order to measure the angular rate of the rotating frame, a driving force is applied to the inner mass and the Coriolis force is sensed along the y-direction associated with the outer mass. Due to micro-fabrication imperfections, including anisoelasticity and damping effects, both gyroscopes do not allow accurate measurements, and therefore, it becomes necessary to devise feedback controllers to reduce the effects of such imperfections. Given an ideal gyroscope that meets certain performance specifications, a feedback control strategy is synthesized to reduce the error dynamics between the actual and ideal gyroscopes. For a dual-mass gyroscope, it is demonstrated that the error dynamics are remarkably decreased with the application of four actuators applied to both masses in the x and y directions. It is also shown that it is possible to reduce the error dynamics with only two actuators applied to the outer mass only. Simulation results are presented to prove the efficiency of the proposed control design.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.63 no.8
• /
• pp.1075-1079
• /
• 2014

In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

• 제어로봇시스템학회:학술대회논문집
• /
• 2001.10a
• /
• pp.167.3-167
• /
• 2001

In this paper, a single degree-of freedom gimbal-structured micro gyroscope and signal processing part including capacitive sensing circuits and filters are designed, fabricated and experimented. We use capacitive sensing method with excitation signal, i.e. sensing excitation signal, to measure the displacement of the moving plate. So, Sensing Output Signal is modulated twice by the excitation signal and driving signal, which is profitable to decouple the driving and sensing mode, to reduce the effect of the acceleration, and to curtail the noises due to parasitic capacitance and driving signal. To reduce driving noises and to improve linearity, the excitation signals and driving signals are modified. Through frequency response analyses ...

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.165-172
• /
• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.