Design of a Gimbal-Structured Micro Gyroscope and Signal Processing Part

In this paper, a single degree-of freedom gimbal-structured micro gyroscope and signal processing part including capacitive sensing circuits and filters are designed, fabricated and experimented. We use capacitive sensing method with excitation signal, i.e. sensing excitation signal, to measure the displacement of the moving plate. So, Sensing Output Signal is modulated twice by the excitation signal and driving signal, which is profitable to decouple the driving and sensing mode, to reduce the effect of the acceleration, and to curtail the noises due to parasitic capacitance and driving signal. To reduce driving noises and to improve linearity, the excitation signals and driving signals are modified. Through frequency response analyses ...