Browse > Article
http://dx.doi.org/10.5370/KIEE.2014.63.8.1075

A Study on the G-Sensitivity Error of MEMS Vibratory Gyroscopes  

Park, Byung-Su (The 3rd R&D Institute - 4 AGENCY FOR DEFENSE DEVELOPMENT)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.63, no.8, 2014 , pp. 1075-1079 More about this Journal
Abstract
In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.
Keywords
Micro electro-mechanical systems; Inertial measurement unit; Inertial navigation system; g-sensitivity; Vibratory gyroscope;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Sang Won Yoon, Sang Woo Lee, N.C.Perkins, and Khalil Najafi, Vibration Sensitivity of MEMS Tuning Fork Gyroscopes, IEEE Sensors Conference, pp.115-119, 2007.
2 Steven Nasiri, A Critical Review of MEMS Gyroscopes Technology and Commercialization Status, Inven Sense, California, pp.1-3, 2005.
3 Michael Perlmutter, Laurent Robin, High-Performance, Low Cost Inertial MEMS : a Market in Motion, Position Location and Navigation Symposium(PLANS), IEEE/ION, pp.225-229, April, 2012.
4 Marc S. Weinberg, Anthony Kourepenis, Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes, JMEMS, vol. 15, pp.479-491. 2006.
5 Arnaud Walther, Christophe Le Blanc, Nicolas Delorme, Yannick Deimerly, Romain Anciant, and Jerome Willemin, Bias Contributions in a MEMS Tuning Fork Gyroscope, JMEMS, vol. 22, pp.303-308, 2013.
6 Jared B. Bancroft and Gerard Lachapelle, Estimation MEMS Gyroscope G-Sensitivity Errors in Foot Mounted Navigation, IEEE UPINLBS Conference, pp.1-6.2012.
7 Oliver J. Woodman, An introduction to inertial navigation, Technical Report, University of Cambridge, pp.5-10, 2007.