제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지

Extended Sacrificial Bulk Micromachining Process and Its Application to the Fabrication of X-axis Single-crystalline Silicon Micro-gyroscope

  • Kim, Jong-Pal (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Park, Sang-Jun (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kwak, Dong-Hun (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Ko, Hyoung-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Song, Tae-Yong (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Setiadi, Dadi (New Jersey Microsystem, Inc.) ;
  • Carr, William (New Jersey Microsystem, Inc.) ;
  • Buss, James (Office of Naval Research) ;
  • Dancho, Dong-Il (School of Electrical Engineering and Computer Science, Seoul National University)
  • Published : 2003.10.22
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, we present a planar single-crystalline silicon x-axis micro-gyroscope fabricated with a perfectly aligned vertical actuation combs on one silicon wafer, using the extended SBM technology. The fabricated x-axis micro-gyroscope has the resolution of 0.1 deg/sec, the bandwidth of 100 Hz. These research results allow integrating 6 axes inertial measurement (3 accelerations and 3 angular rates) on the same silicon substrate using the same process for the first time.

Keywords