• Title/Summary/Keyword: Micro element

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Two-Axis Rotational Micro-Mirror for High-Capacity Optical Cross-Connect Switch (대용량 광 스위치를 위한 2축 자유도 마이크로 미러)

  • 김태식;이상신
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.8
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    • pp.543-548
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    • 2003
  • In this paper, we have proposed and fabricated a two-axis rotational micro-mirror with large tilt angle. Such a micro-mirror is a key element for N$\times$N high capacity optical cross-connect switches. The micro-mirror is required to have large tilt angle to increase the capacity of the cross-connect switches. For larger micro-mirror tilt angle between the grounded mirror plate and the bottom electrode is to be large enough to provide space for the tilting of the mirror. For our proposed structure, the gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates by using the bulk micromachining technology, and combined later by employing self-align technique. As a result, a large tilt angle has been achieved without using additional actuators. The measured tilt angles were as large as $\pm$5.5$^{\circ}$ and $\pm$8.4$^{\circ}$ in the x and y direction respectively, and the pull-in voltages for the two directions were 380 V and 275 V respectively. Finally the fabricated mirror was successfully utilized to steer the optical beam. To our knowledge, our micro-mirror has the best performance among the micro-mirrors reported internationally so far.

Minimization of Initial Deflection of Multi-Layered Micro-Actuator with Step-Up Structure (Step-Up 구조를 갖는 다층박막 초소형 구동소자의 초기변형 최소화에 관한 연구)

  • Lee, Hee-Joong;Kang, Shin-Ill
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.11
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    • pp.2415-2420
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    • 2002
  • In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

Micro modelling of masonry walls by plane bar elements for detecting elastic behavior

  • Doven, Mahmud Sami;Kafkas, Ugur
    • Structural Engineering and Mechanics
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    • v.62 no.5
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    • pp.643-649
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    • 2017
  • Masonry walls are amongst the oldest building systems. A large portion of the research on these structures focuses on the load-bearing walls. Numerical methods have been generally used in modelling load-bearing walls during recent years. In this context, macro and micro modelling techniques emerge as widely accepted techniques. Micro modelling is used to investigate the local behaviour of load-bearing walls in detail whereas macro modelling is used to investigate the general behaviour of masonry buildings. The main objective of this study is to investigate the elastic behaviour of the load- bearing walls in masonry buildings by using micro modelling technique. In order to do this the brick and mortar units of the masonry walls are modelled by the combination of plane truss elements and plane frame elements with no shear deformations. The model used in this study has fewer unknowns then the models encountered in the references. In this study the vertical frame elements have equivalent elasticity modulus and moment of inertia which are calculated by the developed software. Under in-plane static loads the elastic displacements of the masonry walls, which are encountered in literature, are calculated by the developed software, where brick units are modelled by plane frame elements, horizontal joints are modelled by vertical frame elements and vertical joints are modelled by horizontal plane truss elements. The calculated results are compatible with those given in the references.

A Study on Forging Characteristic of Non-Heat Treated Micro-Alloyed Steel Using Finite Element Analysis (유한요소해석을 통한 비조질강 성형 특성 분석)

  • Kwon, Yong-Nam;Kim, S.W.;Lee, Y.S.;Lee, J.H.
    • Transactions of Materials Processing
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    • v.15 no.8 s.89
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    • pp.609-614
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    • 2006
  • Micro-alloyed steels(MA steels) for cold forging was developed to replace the usual quenched and tempered steel. MA steels have several advantages over the conventional quenched and tempered carbon steels. First of all, energy consumption could be lowered due to the elimination of spherodizing annealing and quenching/tempering heat treatment. Also, bending during quenching could be avoided when MA steels are applied for manufacturing of long fastener parts. However, larger amount of load is exerted on the dies compared than in the case of conventional mild steels, which might lead to the earlier fracture of dies, when MA forging steels are applied in forging practice. Therefore, die lift could be a critical factor to determine whether HA forging steels could be widely applied in cold forging practice. In the present study, authors have investigated the forging characteristics of non-heat treated micro-alloyed steel by using a series of experimental and numerical analyses. Firstly, microstructural features and its effect on the deformation behavior have been studied. Numerical analysis has been done on the forging of guide rod pin to investigate for the optimization of forging process and die stress prediction.

Design and Fabrication of PZT Disc Actuated Micro Pump for Bio-Applications (II): Optimal Design & Fabrication of Embedding-type PZT Module (바이오용 압전디스크방식 마이크로 펌프 설계 및 제작 (II) -임베드방식의 압전모듈의 최적설계 및 제작-)

  • Kim, Hyung-Jin;Chang, In-Bae;Seo, Young-Ho;Kim, Byeong-Hee
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.3
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    • pp.362-367
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    • 2012
  • Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, most of the conventional micro pumps still have some limitations to miniaturize their controller system and to obtain the sufficient back pressure which can rise over the inner pressure of human body or experimental animals. In this paper, to overcome these limitation, a new PZT disc and its controller were designed and fabricated to get the sufficient flowrate and the back pressure with guaranteeing embeddability of the controller into pumping body. The amplitudes of the disc deflections were as large as 40 ${\mu}m$ at 200 V - 100 Hz condition. As results of experiments, the flow rate and the back pressure increase when the frequency increases. The obtainable maximum flow rate and back pressure are 5.2 ml/min at 95 Hz and 13.14 kPa at 90 Hz respectively.

Multi-Stage Forming Analysis of a Milli-Component for Improvement of Forming Accuracy (밀리부품의 정밀도 향상을 위한 다단계 성형 및 금형 해석)

  • Yoon, J.H.;Huh, H.;Kim, S.S.;Na, G.H.;Park, H.J.;Choi, T.H.
    • Transactions of Materials Processing
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    • v.13 no.5
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    • pp.429-434
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    • 2004
  • Manufacturing process for milli components has recently gained researcher's focus with the increasing tendency toward highly integrated and micro-scaled parts for electronic devices. The milli-components need more precise manufacturing process than the conventional manufacturing process since the parts require higher dimensional accuracy than the conventional ones. In order to enhance the forming accuracy and productivity, various forming procedures proposed and studied by many researchers. In this paper, forming analysis of milli-components has been studied with a new micro-former. In modeling of progressive dies, multi-stage forming sequence has been analyzed with finite element analysis by LS-DYNA3D. The analysis proposes the sequential die and part shapes with the corresponding punch force and dimensional accuracy. The analysis also considers the effect of elastic dies on the dimensional accuracy of the formed parts. The analysis result demonstrates that the elastic analysis in the milli-forming process is indispensable for accurate forming analysis. The analysis procedure in the paper will provide good information in design of a new micro-former and milli-component