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Kim, Y. K., Bae, J. M., Son, S. Y., Choi, J. H. and Kim, S. G., 1999, 'High speed Atomic Force Microscope Cantilevers with Built-in Piezoelectric Actuator,' MOEMS
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Kim, C. J., 1993, 'Micromachining Technologies of MEMS,' Transactions of the KSME, pp. 499-514
과학기술학회마을
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Ju, S. B., Yong, Y. J. and Kim, S. G., 1999, 'Design and Fabrication of a High Fill-Factor Micro-Bolometer Using Double Sacrificial Layers,' SPIE
DOI
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Ju, S. B., Jung, S. H., Kim, D. K., 1997, 'Optimization of cantilever manufactured by a thin film process,' Transactions of the KSME, Vol. 37, No.9, pp. 38-42
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Cho, Y. H. and Kim, M. J., 1999, 'Design, Fabrication and Characterization of Piezoelectric Multi-Layer Cantilever Microactuators for the Minimum Initial Deflection,' Proc. 10th Int. Conf. Solid-State Sensors and Actuators, Sendai, Japan, pp. 1758-1761
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Ngo, L. V., Nelson, P. R. and Kim, C. J., 1996, 'Surface-Micromachined Beams Without Spring Effect of Anchor Step-Up,' IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Tech. Dig., June
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Hwang, K. H., Choi, Y. J., Min, Y. K., Hae, J. M. and Kim, S. G., 1997, 'Micromachined Thin-Film Mirror Array for Reflective Light Modulation,' Annals of the CIRP Vol. 46, No. 1, pp. 455 -458
DOI
ScienceOn
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Hwang, K. H., Choi, Y. J., Min, Y. K., Bae, J. M. and Kim, S. G., 1997, 'Effect of Anchor Design on the Deflection of Micromachined Cantilever Beams,' Proc. of International Conf. on Micromechatronics for Information and Precision Equipment, Tokyo, pp. 763-766
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Lober, T. A., Huang, J., Schmidt, M. A. and Senturia, S. D., 1988, 'Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements,' IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Tech. Dig., pp. 92 - 95
DOI
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Tabata, O. and Kawahata, K., 1989, 'Mechanical Property Measurements of Thin Films using Load-deflection of Composite Rectangular Membrane,' IEEE MEMS, Salt Lake City, pp. 152-156
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Cho, Y. H. and Kim, M. J., 1999, 'Residual Stress and Thickness Control of Piezoelectric Multi-Layer Cantilever Microactuators for Initial Deflection Minimization,' Proc. Symposium on Micromechanical Systems, Inter. Mechanical Engineering Congress and Exposition. ASME, Livermore, California, U.S.A., pp. 101 -103
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