Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Minimization of Initial Deflection of Multi-Layered Micro-Actuator with Step-Up Structure

Step-Up 구조를 갖는 다층박막 초소형 구동소자의 초기변형 최소화에 관한 연구

  • 이희중 (삼성전자(주)DM연구소) ;
  • 강신일 (연세대학교 공과대학 기계공학부)
  • Published : 2002.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

Keywords

References

  1. Kim, C. J., 1993, 'Micromachining Technologies of MEMS,' Transactions of the KSME, pp. 499-514
  2. Kim, Y. K., Bae, J. M., Son, S. Y., Choi, J. H. and Kim, S. G., 1999, 'High speed Atomic Force Microscope Cantilevers with Built-in Piezoelectric Actuator,' MOEMS
  3. Ju, S. B., Yong, Y. J. and Kim, S. G., 1999, 'Design and Fabrication of a High Fill-Factor Micro-Bolometer Using Double Sacrificial Layers,' SPIE https://doi.org/10.1117/12.354519
  4. Ju, S. B., Jung, S. H., Kim, D. K., 1997, 'Optimization of cantilever manufactured by a thin film process,' Transactions of the KSME, Vol. 37, No.9, pp. 38-42
  5. Cho, Y. H. and Kim, M. J., 1999, 'Residual Stress and Thickness Control of Piezoelectric Multi-Layer Cantilever Microactuators for Initial Deflection Minimization,' Proc. Symposium on Micromechanical Systems, Inter. Mechanical Engineering Congress and Exposition. ASME, Livermore, California, U.S.A., pp. 101 -103
  6. Cho, Y. H. and Kim, M. J., 1999, 'Design, Fabrication and Characterization of Piezoelectric Multi-Layer Cantilever Microactuators for the Minimum Initial Deflection,' Proc. 10th Int. Conf. Solid-State Sensors and Actuators, Sendai, Japan, pp. 1758-1761
  7. Ngo, L. V., Nelson, P. R. and Kim, C. J., 1996, 'Surface-Micromachined Beams Without Spring Effect of Anchor Step-Up,' IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Tech. Dig., June
  8. Hwang, K. H., Choi, Y. J., Min, Y. K., Hae, J. M. and Kim, S. G., 1997, 'Micromachined Thin-Film Mirror Array for Reflective Light Modulation,' Annals of the CIRP Vol. 46, No. 1, pp. 455 -458 https://doi.org/10.1016/S0007-8506(07)60864-6
  9. Hwang, K. H., Choi, Y. J., Min, Y. K., Bae, J. M. and Kim, S. G., 1997, 'Effect of Anchor Design on the Deflection of Micromachined Cantilever Beams,' Proc. of International Conf. on Micromechatronics for Information and Precision Equipment, Tokyo, pp. 763-766
  10. Lober, T. A., Huang, J., Schmidt, M. A. and Senturia, S. D., 1988, 'Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements,' IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Tech. Dig., pp. 92 - 95 https://doi.org/10.1109/SOLSEN.1988.26441
  11. Tabata, O. and Kawahata, K., 1989, 'Mechanical Property Measurements of Thin Films using Load-deflection of Composite Rectangular Membrane,' IEEE MEMS, Salt Lake City, pp. 152-156