• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.597-600
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• 2004

Fabrication technique and performance test of catalytic micro propulsion are treated based on MEMS technology. This propulsion is designed to use hydrogen peroxide as liquid mono-propellant for attitude control of pica-satellite. The propellant is fed into the micro reactor channel and decomposed into hot gas yielding controllable thrust by catalyst. In order to increase the efficiency of the reaction that depends on the contact area of propellant and catalyst, porous surface formation on the channel accompanied by platinum particle deposition has been performed using H$_2$PtCl$_{6}$ solution as a precursor. Several thrusters were fabricated in different concentration of H$_2$PtCl$_{6}$ solution to determine the best quantity of Pt particles. For the comparison of the performance of each thruster, the volume of oxygen generated by the decomposition of hydrogen peroxide and the thrust were measured.red.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3331-3333
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• 1999

A novel antistiction method using photo resist is proposed and verified to improve the yield of polysilicon micromachining process. $7.5{\mu}m-thick$ polysilicon is used as a structural layer. Residual stress and stress gradient originated from polysilicon deposition with LPCVD process is relaxed by doping and thermal treatment. The stress gradient of stress-free polysilicon layer is $-0.755MPa/{\mu}m$.

• Korean Journal of Materials Research
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• v.26 no.5
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• pp.229-234
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• 2016

In this study, the degree of particle melting in $Y_2O_3$ plasma spraying and its effects on coating characteristics have been investigated in terms of microstructural features, microhardness and scratch resistance. Plasma sprayed $Y_2O_3$ coatings were formed using two different powder feeding systems: a system in which the powder is fed inside the plasma gun and a system in which the powder is fed externally. The internal powder spraying method generated a well-defined lamellae structure that was characterized by a thin porous layer at the splat boundary and microcracks within individual splats. Such micro-defects were generated by the large thermal contraction of splats from fully-molten droplets. The external powder spraying method formed a relatively dense coating with a particulate deposition mode, and the deposition of a higher fraction of partially-melted droplets led to a much reduced number of inter-splat pores and intra-splat microcracks. The microhardness and scratch resistance of the $Y_2O_3$ coatings were improved by external powder spraying; this result was mainly attributed to the reduced number of micro-defects.

• Korean Journal of Materials Research
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• v.26 no.9
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• pp.472-477
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• 2016

Microstructure evolutions of thermosetting resin coating layers fabricated by electrostatic spray deposition (ESD) at various processing conditions were investigated. Two different typical polymer systems, a thermosetting phenol-formaldehyde resin and a thermoplastic polyvinylpyrrolidone (PVP), were employed for a comparative study. Precursor solutions of the phenol-formaldehyde resin and of the PVP were electro-sprayed on heated silicon substrates. Fundamental differences in the thermomechanical properties of the polymers resulted in distinct ways of microstructure evolution of the electro-sprayed polymer films. For the thermosetting polymer, phenol-formaldehyde resin, vertically aligned micro-rod structures developed when it was deposited by ESD under controlled processing conditions. Through extensive microstructure and thermal analyses, it was found that the vertically aligned micro-rod structures of phenol-formaldehyde resin were formed as a result of the rheological behavior of the thermosetting phenol-formaldehyde resin and the preferential landing phenomenon of the ESD method.

• Bulletin of the Korean Chemical Society
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• v.24 no.2
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• pp.183-188
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• 2003

The micro-patterning of multi-layered thin films containing CdS and $Ta_2O_5$ layers on ITO substrate with various structures was successfully obtained by combining three different techniques: chemical solution depositions, sol-gel, and microcontact printing (μCP) methods using octadecyltrichlorosilane (OTS) as the organic thin layer template. $Ta_2O_5$ layer was prepared by sol-gel casting and CdS one obtained by chemical solution deposition, respectively. Parallel and cross patterns of multi-layers with $Ta_2O_5$ and CdS films were fabricated additively by successive removal of OTS layer pre-formed. This study presents the designed architectures consisting of the two types of feature having horizontal dimensions of 170 ㎛ and 340 ㎛ with constant thickness ca. 150 nm of each deposited materials. The thin film lay-out of the cross-patterning is composed of four regions with chemically different layer compositions, which are confirmed by Auger electron microanalysis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.142-142
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• 2007

Micro thermoelectric generator has been attractive for the alternative power source to operate the wireless sensor node. In this paper, we designed the column-type micro thermoelectric device and their device characteristics were measured. n-type Bi2Te3 and p-type BiSbTe3 thermoelectric thin films were grown on (001) GaAs substrates by metal organic chemical vapour deposition (MOCVD) and they were pattemed. The height of thermoelectric film were controlled by the deposition time, temperature and MO-x gas pressure. Seebeck coefficient was measured at room temperature and hole concentration and electrical resistivity of thermoelectric film were also characterized.

• Korean Journal of Materials Research
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• v.20 no.11
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• pp.592-599
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• 2010

A porous nickel-tin nano-dendritic electrode, for use as the anode in a rechargeable lithium battery, has been prepared by using an electrochemical deposition process. The adjustment of the complexing agent content in the deposition bath enabled the nickel-tin alloys to have specific stoichiometries while the amount of acid, as a dynamic template for micro-porous structure, was limited to a certain amount to prevent its undesirable side reaction with the complexing agent. The ratios of nickel to tin in the electro-deposits were nearly identical to the ratios of nickel ion to tin ion in the deposition bath; the particle changed from spherical to dendritic shape according to the tin content in the deposits. The nickel to tin ratio and the dendritic structure were quite uniform throughout the thickness of the deposits. The resulting nickel-tin alloy was reversibly lithiated and delithiated as an anode in rechargeable lithium battery. Furthermore, the resulting anode showed much more stable cycling performance up to 50 cycles, as compared to that resulting from dense electro-deposit with the same atomic composition and from tin electrodeposit with a similar porous structure. From the results, it is expected that highly-porous nickel-tin alloys presented in this work could provide a promising option for the high performance anode materials for rechargeable lithium batteries.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.257-258
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• 2006

ZnO thin films were prepared by RF magnetron sputter deposition on p-Si(100) wafer with various cooling rates of substrate temperature such as the substrates were pre-heated to $400^{\circ}C$ before the deposition and then cooled down naturally or slowly to $300^{\circ}C$, $200^{\circ}C$, $100^{\circ}C$, and R.T., by the temperature controller during the deposition. The crystall me and micro-structural characteristics of the films were investigated by XRD and SEM ZnO films which cooled down naturally or slowly by temperature controller during deposition, especially the film were deposited with cooling down from $400^{\circ}C$ to $200^{\circ}C$ slowly, showed the most outstanding c-axis preferred orientation.

• Korean Journal of Materials Research
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• v.12 no.8
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• pp.661-668
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• 2002

A study was made to examine the electrical, compositional, structural and morphological properties of Ag thin films deposited by DC magnetron sputtering in $O_2$ atmosphere with deposition temperature from room temperature to 15$0^{\circ}C$ using in-line sputter system. The Ag films deposited at temperature above $100^{\circ}C$ in oxygen atmosphere gave a similar specific resistivity to and even lower oxygen content than those deposited using pure Ar sputter gas The Ag films deposited with pure Ar gas was mainly composed of crystallites with [111] preferred orientation, while, for those deposited in oxygen atmosphere, more than 50% of the volume was composed of crystallites with [100] orientation. The difference in the micro structure did not cause any difference in the specific resistivity of Ag films. The results showed that the transparent conducting oxide films and the Ag films could be processed sequentially in the same deposition chamber with careful control of deposition temperature, which might result in a cost reduction for constructing the large scale in-line deposition system.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.145-148
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• 2006

Cold gas dynamic spray is a relatively new coating process by which coatings can be produced without significant heating during the process. Cold gas dynamic spray is conducted by powder sprayed by supersonic gas jet, and generally called the kinetic spray or cold-spray. Cold-spray was developed in Russia in the early 1980s to overcome the defect of thermal spray method. Its low process temperature can minimize thermal stress and also reduce the deformation of the substrate. Most researches on cold-spray have focused on micro scale coating, but our research team tried to apply this method to macro scale deposition. The macro scale deposition causes deformation of a thin substrate which is usually convex to the deposited side. In this research, the main cause of the deformation was investigated using 6061-T6 aluminum alloy and properties of deposited aluminum layer such as coefficient of thermal expansion, Elastic modulus, hardness, electric conductivity were measured. From the result of the analysis, it was concluded that compressive residual stress was the main reason of substrate deformation while CTE had little effect.