• 대한전자공학회논문지SD
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• 제40권8호
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• pp.543-548
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• 2003

본 논문에서는 큰 회전각을 갖는 2축 자유도 마이크로 미러를 제안하고 제작하였다. 이러한 마이크로 미러는 N×N 대용량 광 크로스 커넥트 스위치(optical cross-connect switch)를 구현하는 데 필수적인 요소이다. 스위치의 용량을 증가시키기 위해서는 각각의 마이크로 미러의 회전각을 크게 해야 한다. 이 미러가 큰 각도로 회전하기 위해서는 상부 전극인 미러 판과 하부전극 사이에 충분한 공간이 확보 되어야 한다. 제안된 구조는 기판미세 가공법 (bulk micromachining)을 이용하여 상부전극인 미러와 하부전극을 각각 다른 기판에 제작한 후, 두 기판을 접합함으로써 쉽게 미러의 회전 공간을 확보하였다. 따라서 미러의 회전공간 확보를 위한 별도의 구동기(actuator)를 도입할 필요가 없었다. 제작된 마이크로 미러의 성능을 측정한 결과를 살펴보면, x축과 y축 방향으로의 회전각은 각각 ±5.5°와 ±8.4°였으며, 이 때의 풀인 (pull-in)전압은 각각 380 V와 275 V였다. 이러한 회전각의 성능은 전 세계적으로 지금까지 보고된 연구결과 중에서 가장 우수한 결과이다.

• Journal of Electrical Engineering and Technology
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• 제2권2호
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• pp.263-266
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• 2007

We report a nickel optical MEMS switch, being able to rotate through a large angle and to accommodate multiple channels. The proposed optical switch consists of a thin nickel mirror and two torsion springs supporting the mirror. The torsion springs are designed using a finite element method (FEM) such that plastic deformation of the thin nickel is avoided during the large torsion actuation. For switching speed improvement, transient vibration of the released mirror is suppressed by optimizing the mirror design and a fast switching response of $200\;{\mu}s\;(pull-down)/300\;{\mu}s\;(pull-up)$ is demonstrated.

• Transactions on Control, Automation and Systems Engineering
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• 제3권4호
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• pp.236-241
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• 2001

Teach pendant is the most widely used means of robot teaching at present. Despite the difficulties of using the motion command buttons on the teach pendant, it is an economical, robust, and effective device for robot teaching task. This paper presents the development of a force/moment direction sensor named COSMO that can improve the teach pendant based robot teaching. Robot teaching experiment of a six axis commercial robot using the sensor is described where operator holds the sensor with a hand, and move the robot by pushing, pulling, and twisting the sensor in the direction of the desired motion. No prior knowledge of the coordinate system is required. The function of the COSMO sensor is to detect the presence f force and moment along the principal axes of the sensor coordinate system. The transducer used in the sensor is micro-switch, and this intuitive robot teaching can be implemented at a very low cost.

• 한국전자파학회지:전자파기술
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• 제13권2호
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• pp.22-32
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• 2002

MEMS(Micro-Electro-Mechanical Systems)는 전기적인 구성요소와 기계적인 구성요소를 작게 조합하여 구성한 소자나 시스템을 말한다. RF(Radio Frequency) MEMS는 MEMS를 이용한 RF 소자나 시스템을 의미하며, 본 고에서는 RF 소자에 대하여 논의하고자 한다. MEMS는 RF 소자의 성능, 기능, 집적화 등을 높여 주고, 크기, 가격, 부피, 전력 소모 등을 낮추어 주므로 소자 개발에 대한 연구는 매우 다양하지만, 본 고에서는 움직이는 소자 중에서 가장 많이 연구되고 있는 mechanical RF switch에 대하여 중점적으로 다루고자 한다. 이에 대한 연구 동향, 특성, 응용 분야 등을 살펴보고, 상품으로서의 가치를 인정 받기 위하여 고려해야 할 점들을 논의 하겠다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2010년도 제35회 추계학술대회논문집
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• pp.126-129
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• 2010

추진기관용 점화안전장치인 SAU에 적용 가능한 MEMS 관성 스위치를 고안하였다. 본 MEMS 관성 스위치는 일반적인 기계요소 설계 방식을 따라 설계하였으나 일반적인 MEMS 가속계와 다르게 목넘김 관성 스위칭 방식을 채택하여 일정 가속도 이상에서만 스위칭이 일어난다. 제작된 시료에 대한 검사 결과와 설계 데이터를 비교해 본 결과 관성 스위치의 구성 요소인 판 스프링 및 연성 힌지의 비선형요소에 의한 영향으로 인하여 설계된 스위칭 가속도 값과 근사한 차이가 유발됨을 확인하였다.

• 한국전기전자재료학회논문지
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• 제29권12호
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• pp.796-802
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• 2016

In order to develop an electrical insulation material for gas GIS (insulation switch gear) spacer, 4 types of epoxy/micro-alumina (40, 50, 60, 70 wt%) composites and 9 types of epoxy/nano-alumina (1, 3, 5 g)/micro-alumina (40, 50, 60, 70 wt%) composites were prepared and tensile test was carried out. In here, nano-alumina was previously surface-treated with GDE (glycerol diglycidyl ether). As micro-alumina and GDE-treated nano-alumina contents increased, tensile strength increased and the highest value was shown in the system with 3 g GDE-treated nano-alumina.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.1053-1057
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• 1997

Laser thin film process with a Q-switch pulsed YAG laser was performed for micro machining. In this research, we performed basic Cr thin film on glass substrates removal machining experiments. Form experiments, it happens not only evaporration of thin film but also spatter and cohesion of melting substance in working region, when machining a Cr thin film by Q-switch YAG laser beam irradiation. Critical energy of surface irradiation type by irradiation direction of laser in a face composing thin film on the glass is higher than that of back irradiation type, but the latter is favorable because of spatter appearance. In case of image formation position when laser beam is irradiated, the defocus is permitted to a certain extent within forcus depth. Ifexceeds focus depth, formation of pattern is vanishing step by step.

• 한국정밀공학회지
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• 제23권8호
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• pp.163-170
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• 2006

By removing sacrificial layer through ashing process, movable MEMS structure on substrate can be fabricated in surface micromachining. However, MEMS structure includes, during the ashing process, the warping or buckling effects due to stress gradient along the vertical direction of thin film. In this study, we presented method for counteracting the unwanted deflection of MEMS structure and designed using character of deposit process to overcome limited design conditions. Unit cell patterns were designed with character of deposit shape, and their final shapes were adopted using Finite Element Method. Finally, RF MEMS switch was fabricated by surface micro machining as test vehicles. We checked out that alleviation effect for deformation of switch improved by 35%.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2002년도 전력전자학술대회 논문집
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• pp.697-700
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• 2002

In this paper, we proposed the micro web-server Implementation on Strong ARM processor with embedded Linux. The parallel port connecting parallel I/O is controlled via HPPT protocol and web browser program. HTTP protocol is ported into Linux and the micro web server program and port control program are installed on-board memory using CGI to be accessed by web browser, such as Internet Explore and Netscape. 8bit LED and DIP switches are connected to the processor port and the switch input status is monitored and the LED output is controlled from remote hosts vie internet. The result of the proposed embedded micro-web server can be used in automation systems, remote distributed control via internet using web browser.

• Transactions on Electrical and Electronic Materials
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• 제17권3호
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• pp.129-133
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• 2016

Theoretical and graphical analysis of pull-in-voltage and figure of merit for a fixed-fixed capacitive Micro Electromechanical Systems (MEMS) switch is presented in this paper. MEMS switch consists of a thin electrode called bridge suspended over a central line and both ends of the bridge are fixed at the ground planes of a coplanar waveguide (CPW) structure. A thin layer of dielectric material is deposited between the bridge and centre conductor to avoid stiction and provide low impedance path between the electrodes. When an actuation voltage is applied between the electrodes, the metal bridge acquires pull in effect as it crosses one third of distance between them. In this study, we describe behavior of pull-in voltage and figure of merit (or capacitance ratio) of capacitive MEMS switch for five different dielectric materials. The effects of dielectric thicknesses are also considered to calculate the values of pull-in-voltage and capacitance ratio. This work shows that a reduced pull-in-voltage with increase in capacitance ratio can be achieved by using dielectric material of high dielectric constant above the central line of CPW.