• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.321-328
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• 2011

The 30 nm-thick Ni layers was deposited on a flexible polyimide substrate with an e-beam evaporation. Subsequently, we deposited a Si layer using a catalytic CVD (Cat-CVD) in a hydride amorphous silicon (${\alpha}$-Si:H) process of $T_{s}=180^{\circ}C$ with varying thicknesses of 55, 75, 145, and 220 nm. The sheet resistance, phase, degree of the crystallization, microstructure, composition, and surface roughness were measured by a four-point probe, HRXRD, micro-Raman spectroscopy, FE-SEM, TEM, AES, and SPM. We confirmed that our newly proposed Cat-CVD process simultaneously formed both NiSi and crystallized Si without additional annealing. The NiSi showed low sheet resistance of < $13{\Omega}$□, while carbon (C) diffused from the substrate led the resistance fluctuation with silicon deposition thickness. HRXRD and micro-Raman analysis also supported the existence of NiSi and crystallized (>66%) Si layers. TEM analysis showed uniform NiSi and silicon layers, and the thickness of the NiSi increased as Si deposition time increased. Based on the AES depth profiling, we confirmed that the carbon from the polyimide substrate diffused into the NiSi and Si layers during the Cat-CVD, which caused a pile-up of C at the interface. This carbon diffusion might lessen NiSi formation and increase the resistance of the NiSi.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.107-110
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• 2003

The sheet metal shearing process is normally used in the precision elements such as semi-conductor components. In precision elements, burrs usually reduce the quality of machined parts and cause interference, jamming and misalignment during assembly procedures and because of their sharpness, they can be safety hazard to personnel. Furthermore, not only burrs are hard to predict and avoid, but also deburring, the process of removing burrs, is time-consuming and costly. In order to get the burr-free parts, therefore, we developed the precise burr measuring system using the laser. Using the X-Y precious table, we used vertical measuring method. Through the laser measurement system, we gain the minute analog signal, so this signal was amplified by the electric circuit. Finally, we gained the realtime burr data using A/D converter, PC. By introducing the novel laser measuring method which employing vertical measurement mechanism, we could get fast and precious burr data. Through the experiments, the accuracy of the developed system is proved. The burr height measured during the punching process can be used for automatic deburring and in-situ aligning.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.96-103
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• 2002

The objective of this study is to adjust the roll gap fur the dimension accuracy of bar in hot bar rolling process considering roll wear. In this study hot bar rolling processes fur round and oval passes have been investigated. In order to predict the roll wear, the wear model is reformulated as an incremental from and then wear depth of roll is calculated at each deformation step on contact area using the results of finite element analysis, such as relative sliding velocity and normal pressure at contact area. Archard's wear model was applied to predict the roll wear. To know the effects of thermal softening of DCI (Ductile Cast Iron) roll material according to operating conditions, high temperature micro hardness test is executed and a new wear model has been proposed by considering the thermal softening of DCI roll expressed in terms of the main tempering curve. The new technique developed in this study for adjusting roll gap can give more systematically and economically feasible means to improve the dimension accuracy of bar with full usefulness and generality.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.1
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• pp.109-118
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• 2003

The recent trend towards miniaturization causes an increased demand for parts with very small dimensions. Milli-structure components are classified as a component group whose size is between macro- and micro-scale. The manufacturing process of these components of thin sheet metal forming has a microscopic properties in addition to a typical phenomenon of bulk deformation because of the forming size. Also, the material properties and the deformation behavior change with miniaturization, which means that, a coarse grained materials show a higher resistance against deformation, when the grain size is in the range of the sheet thickness. In this study, a new numerical approach is proposed to simulate intergranular milli-structure in forming by the finite element method. The grain element and grain boundary element are introduced to simulate the milli-structure in the bending. The grain element is used to analyze the deformation of individual grain while the grain boundary element is for the investigation on the movement of the grain boundary. Also, the result of the finite element analysis is confirmed by a series of milli-sized forming experiments.

• Journal of the Korea Convergence Society
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• v.11 no.1
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• pp.175-180
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• 2020

In this study, we developed a micropattern technology in the shape of RFID TAG antenna using ultrasonic micropattern manufacturing system developed to enable micropattern technology. The ultrasonic tool horn in longitudinal vibration mode was installed in the micropattern manufacturing system to develop the ultrasonic press technology for the micropattern antenna shape of the RFID TAG antenna shape on the insulating sheet surface. The ultrasonic shaping technology was manufactured by applying the resonance design technique to a 60kHz tool horn, and by using the micropattern manufacturing system, the coil wire having a thickness of 25㎛ can be ultrasonically press-molded on an insulating sheet of 200㎛ or less. In ultrasonic press technology, the antenna shape having a minimum line width of 150㎛ could be molded without disconnection, peeling, or twisting of the coil wire.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.1
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• pp.66-71
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• 2004

Magnesium alloys have been widely used for many structural components of automobiles and aircraft because of high specific strength and good cast-ability in spite of hexagonal closed-packed crystal structure of pure magnesium. In this study, it is studied about the forming characteristics of press forging of AZ31 magnesium alloy by MSC/MARC in case of material having one boss and MSC/Supeiforge in case of material having multi-boss with heat transfer analysis during deformation at elevated temperature. For these results it is simulated about temperature distribution, strain distribution, and stress distribution of AZ31 Magnesium alloy. During the press forging, foot regions of bosses showed greater temperature rise than other areas of AZ31 sheet. Finally the plastic strain of AZ31 sheet did not remarkably vary with increasing temperature from 373 to 473K, while it significantly increased as the forming temperature increased from 473 to 573K, which is related with the change in micro-structures, such as dynamic re-crystallization occurring during the deformation process.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.178-184
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• 2006

Hot embossing is to fabricate desired pattern on the polymer substrate by pressing the patterned mold against the substrate which is heated above the glass transition temperature, and it is a high throughput fabrication method for bio chip, optical microstructure, etc. due to the simultaneous large area patterning. However, the bad pattern fidelity in large area patterning is one of the obstacles to applying the hot embossing technology for mass production. In the present study, PDMS pad was used as a cushion on the backside of the micro-patterned 4 inch Si mold to improve the pattern fidelity over the 4 inch PMMA sheet by increasing the conformal contact between the Si mold and the PMMA sheet. The pattern replicability improvement over 4 inch wafer scale was evaluated by comparing the replicated pattern height and depth for PDMS-cushioned Si mold against the rigid Si mold without PDMS cushion.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.12
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• pp.1017-1026
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• 2016

The present paper describes the two off-surface visualization techniques and their application examples to vortex flows. One of the two visualization techniques is the classical smoke-wire technique, and the other is the visualization technique using the micro water-droplets generated by the home-style ultrasonic humidifier. The smoke-wire technique has the limit of air flow speed (about 5 m/sec for 0.07 mm-diameter wire) and the pollution problem, but it produces very fine and clear streak line sheet. It is applied to visualize the wing-tip vortices of a 3-dimensional wing. The micro water-droplet technique has the larger limit of air flow speed (above 10 m/sec) and is free from pollution and toxic problems compared to the smoke-wire technique. It is successfully applied to visualize the complex vortex system of a double-delta wing with an apex strake.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.04a
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• pp.7-13
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• 2003

Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for micro lens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of micro lens which depend on the thermal treatment. For the replication of micro lens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of micro lenses. Fabricated microlenses showed good surface roughness with the order of 1nm.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2544-2546
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• 1998

The electrical and physical charateristics of Pt-Co alloy thin films on $Al_2O_3$ substrate, deposited by r.f cosputtering respectively, were analyzed with thickness of thin films ($1700{\sim}10000{\AA}$) and increasing annealing temperature ($800{\sim}1000^{\circ}C$). At input power of Pt : 4.4 W/$cm^2$, Co : 6.91 W/$cm^2$, working vacuum of 10 mTorr and annealing conditions of $1000^{\circ}C$) and 60 min, the resistivity and sheet resistivity of Pt-Co thin films with thickness of $3000{\AA}$ was $15{\mu}{\Omega}{\cdot}cm$ and 0.5 ${\Omega}/{\square}$, respectively. The TCR value of Pt-Co alloy thin films was measured with various thickness of thin films and annealing conditions. The optimum TCR value of 3850 ppm/$^{\circ}C$ in temperature range($200{\sim}400^{\circ}C$) is gained under conditions $3000{\AA}$ of thin films thickness and $1000^{\circ}C$ of annealing temperature. The thermal charateristics of Pt-Co micro heaters were analysed with Pt-Co RTD integrated on the same substrate. In the analysis of characteristics of Pt-Co micro heaters, the Pt-Co micro heaters with thickness of $3000{\AA}$ and annealing temperature of $1000^{\circ}C$ had a good linearity and temperature is up to $468.2^{\circ}C$ with 2.1 watts of the heating power.