• Title/Summary/Keyword: Micro Machine Tool

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The Parametric Influence on Focused Ion Beam Processing of Silicon (집속이온빔의 공정조건이 실리콘 가공에 미치는 영향)

  • Kim, Joon-Hyun;Song, Chun-Sam;Kim, Jong-Hyeong;Jang, Dong-Young;Kim, Joo-Hyun
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.2
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    • pp.70-77
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    • 2007
  • The application of focused ion beam(FIB) technology has been broadened in the fabrication of nanoscale regime. The extended application of FIB is dependent on complicated reciprocal relation of operating parameters. It is necessary for successful and efficient modifications on the surface of silicon substrate. The primary effect by Gaussian beam intensity is significantly shown from various aperture size, accelerating voltage, and beam current. Also, the secondary effect of other process factors - dwell time, pixel interval, scan mode, and pattern size has affected to etching results. For the process analysis, influence of the secondary factors on FIB micromilling process is examined with respect to sputtering depth during the milling process in silicon material. The results are analyzed by the ratio of signal to noise obtained using design of experiment in each parameter.

A Study on the Grindability of New Ceramics (뉴 세라믹스의 연삭성에 관한 연구)

  • Kim, Seong-Kyeum;Kim, Nam-Hoon
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.3
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    • pp.103-108
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    • 2007
  • The number of parts made of ceramic materials has gradually been increasing in field of from mechanical engineering to electronics engineering and, mechanical engineering ceramics have spread because of three very favourable characteristic features of their application, namely, heat, wear, and corrosion resistance. therefore, the elaboration of suitable grinding technologies is Important. grinding is problematic because crack-free ceramics are difficult to process owing to their particular micro structure. In this paper we report on the application of advanced precision grinding process, elaborating continuous wheel dressing. The removal rate can be increased significantly and surface roughness is improved. Various problems(roughness, ground surface etc)encountered in grinding of ceramics are also discussed.

An Evaluation of the Effect of Micro-cracks on Macro Elastic Moduli (매크로 탄성 계수에 미치는 마이크로 크랙의 영향 평가)

  • Kang, Sung-Soo;Kim, Hong-Gun
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.5
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    • pp.97-103
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    • 2006
  • A meso-scale analysis method using the natural element method, which is a kind of meshless method, is proposed for the analysis of material damage of brittle microcracking solids such as ceramic materials, concrete and rocks. The microcracking is assumed to occur along Voronoi edges in the Voronoi diagram generated using the nodal points as the generators. The mechanical effect of microcracks is considered by controlling the material constants in the neighborhood of the microcracks. The macro elastic moduli of anisotropic as well as isotropic solids containing a number of randomly distributed microcracks are calculated in order to demonstrate the validity of the proposed method.

A study on Corrective Polishing (형상수정 폴리싱에 관한 연구)

  • 김의중;신근하
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.950-955
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    • 2001
  • For the development of an ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We analyze and test the unit removal profiles for a ball type polishing tool. Using these results we calculate dwell time distributions and residual errors for a target removal shape. We use the polishing simulation method and feed rate calculation method for the dwell time calculation. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

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Behavior of Fatigue Crack at Interface and Around Interface for friction Welded Dissimilar Materials (이종마찰압접재의 접합계면 및 계면근방에서의 피로균열거동)

  • 오환섭
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1998.03a
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    • pp.287-292
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    • 1998
  • In this study behavior of fatigue crack and fatigue fracture is observed under rotary bending fatigue testing in friction welded dissimilar materials. Fatigue fracture most occurred in SM15C heat affected zone around Interface. In case of fatigue test, stress is reduced the position of fracture gradually moves to the welded Interface. Micro crack of heat affected zone surface on SM15C is observed at any different stress.

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A Study on the friction weldability of inconel alloy-stainless steel (인코넬 합금과 스테인레스 강의 마찰용접 특성 연구)

  • 김의환;민택기
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.10 no.2
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    • pp.73-78
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    • 2001
  • In this study, the friction weldability and properties of inconel alloy(IN738LC) to stainless steel (STS304) was investigat-ed. Upset length increased according to increment of friction pressure and time. The tensile strength of the friction weld-ing reached 85% of the STS304 base metal strength under the conditions of 8 sec friction time, 50MPa friction pressure and 150 MPa upset pressure. From the result of fracture surface analysis, IN738LC section can be joined with STS 304 materials in shape of a convex lens. Also, the temperature of welded interface was measured with k-type thermocouple. Finally the plastic flow confirmed at the welded interface STS304 by micro test.

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Development of Straightness, Roundness Measurement System for Standard Electrode of Loss Angle (손실각 표준기 전극의 진직, 진원도 측정시스템 개발)

  • 장종훈
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1998.10a
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    • pp.198-203
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    • 1998
  • To acquire the high precision of profile for standard electrode of loss angle, it is needed ultraprecision machining technology like MEAP(Magnetic Electronic Abrasive Polishing) and the very high profile measurement technology which can measure a micro unit about the workpiece. So, in this paper, it was developed the measurement system of precision of profile using non-contactable sensor that was approximate sensor of capacitance type, because that is better than others in the electrical characteristics. And standard electrode of loss angle was machined by the MEAP machining technology. In this study, it was development of precision measurement system. This system could be used measure the workpiece of roundness and straightness much more precise and faster than general mechanical measurement system done before. And it could be helped to minimize machining time and planning by very fast and precise measurement about the workpiece.

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Flip-chip Bonding Using Nd:YAG Laser (Nd:YAG 레이저를 이용한 Flipchip 접합)

  • Song, Chun-Sam;Ji, Hyun-Sik;Kim, Jong-Hyeong;Kim, Joo-Hyun;Kim, Joo-Han
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.17 no.1
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    • pp.120-125
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    • 2008
  • A flip-chip bonding system using DPSS(Diode Pumped Solid State) Nd:YAG laser(wavelength : 1064nm) which shows a good quality in fine pitch bonding is developed. This laser bonder can transfer beam energy to the solder directly and melt it without any physical contact by scanning a bare chip. By using a laser source to heat up the solder balls directly, it can reduce heat loss and any defects such as bridge with adjacent solder, overheating problems, and chip breakage. Comparing to conventional flip-chip bonders, the bonding time can be shortened drastically. This laser precision micro bonder can be applied to flip-chip bonding with many advantage in comparison with conventional ones.

Effect of Hone stone on Accuracy of Honing in 2-Cycle engine Cylinder having Open Hole (열린 홀을 가진 2사이클 엔진실린더의 호닝가공에서 혼스톤이 호닝의 정밀도에 미치는 영향)

  • 한규택
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1999.10a
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    • pp.326-331
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    • 1999
  • Grinding technology in morden industry society is focusing on research & development for grinding stone and machining parts for the purpose of high accuracy and high efficiency of products. But, in order to equip the high technology and high accuracy of micro stone which is one of grinding stone, hardly and continuous effort on R&D is required.In this study, honing processing work of 2-cycle engine cylinder for motorcycle which has open hole is practiced so as to clear how borning that is prior step of honing and hone stone make an influence on accuracy of honing. As the result of analyzing the results of experiments, we came to conclusion that we can secure good conditions of honing by controlling and keeping appropriate cycle-time in the stage of boring of prior step of honing.

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Evaluation Method of Micro Crack in a Ceramic Ferrule by Resonant Ultrasound Spectroscopy (공명초음파법을 이용한 세라믹제 페롤의 미소 크랙 평가법)

  • Yang, In-Young
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.3
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    • pp.59-66
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    • 2006
  • In this paper, we suggested an evaluation method of cracks in a ceramic product by resonant ultrasound spectroscopy. For experiment, we manufactured nondestructive measurement system by resonant ultrasound spectroscopy and measured resonance frequencies of acceptable and cracked ferrules. The evaluation criterion of ferrule is based on the comparison of resonance frequencies between acceptable and cracked-ferrule. The criterion value that defined by suggested formula is 2. By using the criterion, it is possible to evaluate both acceptable and cracked-ferrule.