• Title/Summary/Keyword: Micro Fabrication Technology

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Micropattern Arrays of Polymers/Quantum Dots Formed by Electrohydrodynamic Jet (e-jet) Printing (이젯 프린터를 사용한 고분자/퀀텀닷 마이크로 패터닝 공정)

  • Kim, Simon;Lee, Su Eon;Kim, Bong Hoon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.35 no.1
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    • pp.18-23
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    • 2022
  • Electrohydrodynamic jet (e-jet) printing, a type of direct contactless microfabrication technology, is a versatile fabrication process that enables a wide range of micro/nanopattern arrays by applying a strong electric field between the nozzle and the substrate. In general, the morphology and the thickness of polymers/quantum dot micropatterns show a systematic dependence on the diameter of the nozzle and the ink composition with a fully automated printing machine. The purpose of this report is to provide typical examples of e-jet printed micropatterns of polymers/quantum dots to explain the effect of each process variable on the result of experiments. Here, we demonstrate several operating conditions that allow high-resolution printing of layers of polymers/quantum dots with a precise control over thickness and submicron lateral resolution.

Fabrication and characteristics of ZnO nanorods grown on Zn substrates by the hydrothermal method (수열합성법에 의해 Zn 기판 위에 제조된 ZnO 나노로드의 특성)

  • Sung, Ji-Hye;Kim, Jin-Ho;Hwang, Jong-Hee;Lim, Tae-Young;Yeon, Deuk-Ho;Cho, Yong-Soo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.4
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    • pp.147-152
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    • 2011
  • ZnO nanorods fabricated on a Zn substrate pre-coated with ZnO as a seed layer by the hydrothermal method were studied mainly as a function of ZnO precursor concentration. Characteristic features by using field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD) were investigated to define the changed micro-structure and crystalline phase of the ZnO nanorods according to the experimental conditions. The nanorod morphology strongly depended on the precursor concentration. For example, ZnO nanorods vertically aligned with a hexagonal (002) oriented structure with a diameter of 600~700 nm and length of $6.75{\mu}m$ were clearly observed at the highest concentration of 0.015 M. The strong hexagonal structure was believed to be associated with the highest photoluminescene (PL) intensity and a promising voltage value of ca. 6.069 V at $1000{\mu}A$.

Characteristics and Fabrication of Micro Gas Sensor with Single Electrode (단일전극을 가진 마이크로 가스센서의 제작 및 특성)

  • Song, Kap-Duk;Bang, Yeung-Il;Lee, Sang-Mun;Lee, Yun-Su;Choi, Nak-Jin;Joo, Byung-Su;Seo, Moo-Gyo;Huh, Jeung-Soo;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
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    • v.11 no.6
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    • pp.350-357
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    • 2002
  • Micro gas sensor with single electrode was proposed for improving stability and sensitivity. Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass substrate and a $SnO_2$ sensing material was thermally evaporated on Pt electrode. $SnO_2$ was patterned by lift-off process and then thermally oxidized in $O_2$ condition for 1 hr., $600^{\circ}C$. The size of fabricated sensor was $1.9{\times}2.1\;mm^2$. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearity for wide range($0{\sim}10,000\;ppm$) of gas concentrations. And the sensor shows a good recovery characteristics of 1% deviation compared to initial resistance.

TIR Holographic lithography using Surface Relief Hologram Mask (표면 부조 홀로그램 마스크를 이용한 내부전반사 홀로그래픽 노광기술)

  • Park, Woo-Jae;Lee, Joon-Sub;Song, Seok-Ho;Lee, Sung-Jin;Kim, Tae-Hyun
    • Korean Journal of Optics and Photonics
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    • v.20 no.3
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    • pp.175-181
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    • 2009
  • Holographic lithography is one of the potential technologies for next generation lithography which can print large areas (6") as well as very fine patterns ($0.35{\mu}m$). Usually, photolithography has been developed with two target purposes. One was for LCD applications which require large areas (over 6") and micro pattern (over $1.5{\mu}m$) exposure. The other was for semiconductor applications which require small areas (1.5") and nano pattern (under $0.2{\mu}m$) exposure. However, holographic lithography can print fine patterns from $0.35{\mu}m$ to $1.5{\mu}m$ keeping the exposure area inside 6". This is one of the great advantages in order to realize high speed fine pattern photolithography. How? It is because holographic lithography is taking holographic optics instead of projection optics. A hologram mask is the key component of holographic optics, which can perform the same function as projection optics. In this paper, Surface-Relief TIR Hologram Mask technology is introduced, and enables more robust hologram masks than those previously reported that were formed in photopolymer recording materials. We describe the important parameters in the fabrication process and their optimization, and we evaluate the patterns printed from the surface-relief TIR hologram masks.

Design and Fabrication of the Digital Iron Using the Micro-processor (마이크로프로세서를 이용한 디지털 전기인두기의 설계 및 제작)

  • An, Yang-Ki;Yoon, Dong-Han
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.38 no.5
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    • pp.33-41
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    • 2001
  • The digital iron using ${\mu}$ processor is designed and compared experimentally with the conventional analog Iron. Designed digital iron shows two improved temperature control characteristics. First, the reduction of the difference error between the user setting temperature and the real temperature of the iron tip is examined. When the iron temperature is set to $200[^{\circ}C]$, $300[^{\circ}C]$, $400[^{\circ}C]$, $480[^{\circ}C]$ at the environmental temperatures of $-5[^{\circ}C]$ and $25[^{\circ}C]$, it is examined that the tip temperature is very stable and its error is within ${\pm}1.8[^{\circ}C]$. Second, it is conformed that the temperature fluctuation of the iron due to the soldering is reduced manifestly. When the temperature of iron tip is varied from $200[^{\circ}C]$ to $480[^{\circ}C]$ with 1[g] solder, the temperature errors of the analog iron are measured to be from $6[^{\circ}C]$ to $10[^{\circ}C]$. In case of designed digital iron, however, these errors are much smaller and they are from $2[^{\circ}C]$ to $5[^{\circ}C]$.

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Influence of Water Infiltration and Flexural Strength Change with Glazing Treatment of Dental Porcelain (치과도재의 Glazing 여부에 따른 수분침투 정도와 굽힘강도에 미치는 영향)

  • Lee, Ju-Hee;Lee, Chae-Hyun;Song, Jeong-Hwan
    • Journal of dental hygiene science
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    • v.17 no.4
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    • pp.358-367
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    • 2017
  • The purpose of this study was to evaluate the influence of water infiltration and flexural strength changes in dental porcelain with glazing treatment. The block specimens were prepared as experimental materials, using feldspar type commercial dental porcelain; then, these were fired at $940^{\circ}C$ for 1 minute. The fired specimens were polished with a dimension of $40{\times}5.5{\times}5mm$. The specimens were distributed to two experimental groups: with and without glazing treatment specimens (n=5), and they were immersed in a solution of pH 7 for 3, 7, and 20 days at $40^{\circ}C$ after fabrication. To evaluate the flexural strength changes with water infiltration treatment in specimens with and without glazing, the 3-point flexural test was performed, using a universal testing machine until failure occurred. Starting powder and fired specimens consisted of amorphous and leucite crystalline phase. The Vickers hardness of fired specimens was more than 1.6 times higher than that of the enamel of natural teeth. According to porosimeter results, the specimens without glazing treatment exhibited a porosity of about 14.7%, whereas the glazed specimens exhibited the lowest porosity at about 1.1%. The average flexural strength of glazed specimens was higher than the flexural strength of specimens without glazing treatment (p<0.05). The flexural strength of all specimens with and without glazing treatment deteriorated with accelerated aging in the solution. In addition, significant differences between these two treatment groups were observed in all of the specimens treated at various water infiltration periods (p<0.05). The exposure of internal pores and micro-cracks in the surface due to polishing of the fired specimens influenced mechanical behaviors. Especially, the flexural strength in specimens without glazing treatment has shown significant degradation with the infiltration of water. Therefore, this study suggests that glazing processes can improve mechanical properties of dental porcelain.

Fabrication of Portable Self-Powered Wireless Data Transmitting and Receiving System for User Environment Monitoring (사용자 환경 모니터링을 위한 소형 자가발전 무선 데이터 송수신 시스템 개발)

  • Jang, Sunmin;Cho, Sumin;Joung, Yoonsu;Kim, Jaehyoung;Kim, Hyeonsu;Jang, Dayeon;Ra, Yoonsang;Lee, Donghan;La, Moonwoo;Choi, Dongwhi
    • Korean Chemical Engineering Research
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    • v.60 no.2
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    • pp.249-254
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    • 2022
  • With the rapid advance of the semiconductor and Information and communication technologies, remote environment monitoring technology, which can detect and analyze surrounding environmental conditions with various types of sensors and wireless communication technologies, is also drawing attention. However, since the conventional remote environmental monitoring systems require external power supplies, it causes time and space limitations on comfortable usage. In this study, we proposed the concept of the self-powered remote environmental monitoring system by supplying the power with the levitation-electromagnetic generator (L-EMG), which is rationally designed to effectively harvest biomechanical energy in consideration of the mechanical characteristics of biomechanical energy. In this regard, the proposed L-EMG is designed to effectively respond to the external vibration with the movable center magnet considering the mechanical characteristics of the biomechanical energy, such as relatively low-frequency and high amplitude of vibration. Hence the L-EMG based on the fragile force equilibrium can generate high-quality electrical energy to supply power. Additionally, the environmental detective sensor and wireless transmission module are composed of the micro control unit (MCU) to minimize the required power for electronic device operation by applying the sleep mode, resulting in the extension of operation time. Finally, in order to maximize user convenience, a mobile phone application was built to enable easy monitoring of the surrounding environment. Thus, the proposed concept not only verifies the possibility of establishing the self-powered remote environmental monitoring system using biomechanical energy but further suggests a design guideline.

Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids (금속촉매를 이용한 GaN 피라미드 꼭지점 위의 마이크로 GaN 구조 형성)

  • Yun, W.I.;Jo, D.W.;Ok, J.E.;Jeon, H.S.;Lee, G.S.;Jung, S.K.;Bae, S.M.;Ahn, H.S.;Yang, M.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.3
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    • pp.110-113
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    • 2011
  • In this paper, we propose a new method for the fabrication of GaN microstructures formed only on the vertex of GaN pyramid by using of metal catalysts. GaN pyramidal structures were selectively grown on 3 ${\mu}m$ $SiO_2$ dot patterns followed by thin film deposition of Au and Cr only on the vertex area of the GaN pyramids with precisely controlled photolithography. After the metal deposition, the samples were loaded in the MOVPE reactor for the growth of GaN microstructures for 10 minutes. Temperature for the growth of the GaN microstructures was changed from $650^{\circ}C$ to $750^{\circ}C$. Rod type GaN microstructures were grown in the direction of vertical to the six {1-101} facets and the shape of the GaN microstructures was changed depend on the type of metal.

Fabrication of MEMS Test Socket for BGA IC Packages (MEMS 공정을 이용한 BGA IC 패키지용 테스트 소켓의 제작)

  • Kim, Sang-Won;Cho, Chan-Seob;Nam, Jae-Woo;Kim, Bong-Hwan;Lee, Jong-Hyun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.47 no.11
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    • pp.1-5
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    • 2010
  • We developed a novel micro-electro mechanical systems (MEMS) test socket using silicon on insulator (SOI) substrate with the cantilever array structure. We designed the round shaped cantilevers with the maximum length of $350{\mu}m$, the maximum width of $200{\mu}m$ and the thickness of $10{\mu}m$ for $650{\mu}m$ pitch for 8 mm x 8 mm area and 121 balls square ball grid array (BGA) packages. The MEMS test socket was fabricated by MEMS technology using metal lift off process and deep reactive ion etching (DRIE) silicon etcher and so on. The MEMS test socket has a simple structure, low production cost, fine pitch, high pin count and rapid prototyping. We verified the performances of the MEMS test sockets such as deflection as a function of the applied force, path resistance between the cantilever and the metal pad and the contact resistance. Fabricated cantilever has 1.3 gf (gram force) at $90{\mu}m$ deflection. Total path resistance was less than $17{\Omega}$. The contact resistance was approximately from 0.7 to $0.75{\Omega}$ for all cantilevers. Therefore the test socket is suitable for BGA integrated circuit (IC) packages tests.

The study on Comparison Evaluation of Shear Bond Strength of Co-Cr Based Alloy using for Porcelain Fused Metal (도재용착주조관용 Co-Cr계 비귀금속 합금의 전단결합강도 비교평가에 관한 연구)

  • Kim, Hee-Jin;Kim, Bu-Sob
    • Journal of Technologic Dentistry
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    • v.32 no.3
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    • pp.195-207
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    • 2010
  • Purpose: The purpose of this study was to observe the microstructural changes of surface in the specimens, performing the shear bond strength testing. The currently most used non-precious alloys are nickel-chromium based alloys with or without beryllium. However, their biocompatibility has been questioned concerning possible damages to the health of the patient and professionals involved in the fabrication of prosthesis caused by long exposure to Ni and Be. An option to nickel-chromium alloys is the cobalt-chromium alloy, an alternative that does not sacrifice the physical properties of the metal porcelain systems. Studies in the animals substantially show that the cobalt-chromium alloys are relatively well tolerated, being therefore more biocompatible than the nickel-chromium alloys. Methods: Non-addition Be to nickel-chromium based alloy(Bellabond plus) and cobalt-chromium alloy which has been widely used(Wirobond C) fused with ZEO light porcelain classified control group and cobalt-chromium alloy which is developing alloy of Alphadent company in Korea(Alphadent alloy) fused with ZEO light porcelain classified experimental group. The specimens of $4mm{\times}4mm{\times}0.5mm$ were prepared as-cast and as-opaque to cast body to analyze the mechanical characteristic change, the microstructure of alloy surface. The phase change was used to observe through XRD analysis and OM/SEM was used to observe the surface of specimens as-cast and as-opaque to cast body. Chemical formation of their elements was measured with EDS. Then hardness was measured with Micro Vicker's hardness tester. Shear bond strength test thirty specimens of $10mm{\times}10mm{\times}2mm$ was prepared, veneered, 3mm high and 3mm in diameter, over the alloy specimens. The shear bond strength test was performed in a universal testing machine(UTM) with a cross head speed of 0.5mm/min. Ultimate shear bond strength data were analyzed with one-way ANOVA and the Scheffe's test (P<0.05). Within the limits of this study, the following conclusions were drawn: The X-ray diffraction analysis results for the as-cast and as-opaque specimens showed that the major relative intensity of Bellabond plus alloy were changed smaller than Wirobond C and Alphadent Co-Cr based alloys. Results: Microstructural analysis results for the opaque specimens showed all the alloys increased carbides and precipitation(PPT). Alphadent Co-Cr based alloy showed the carbides of lamellar type. The Vickers hardness results for the opaque specimens showed Wirobond C and Alphadent Co-Cr based alloys were increaser than before ascast, but Bellabond plus alloy relatively decreased. The mean shear bond strengths (MPa) were: 33.11 for Wirobond C/ZEO light; 25.00 for Alphadent Co-Cr alloy/ZEO light; 18.02 for Bellabond plus/ZEO light. Conclusion: The mean shear bond strengths for Co-Cr and Ni-Cr based alloy were significantly different. But the all groups showed metal-metal oxide modes in shear bond strengths test at the interface.