TIR Holographic lithography using Surface Relief Hologram Mask |
Park, Woo-Jae
(Department of Physics in Hanyang University)
Lee, Joon-Sub (Department of Physics in Hanyang University) Song, Seok-Ho (Department of Physics in Hanyang University) Lee, Sung-Jin (Mechatronics and Manufacturing Technology Center, Samsung Electronics CO.) Kim, Tae-Hyun (Mechatronics and Manufacturing Technology Center, Samsung Electronics CO.) |
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