• 한국전기전자재료학회논문지
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• 제25권1호
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• pp.62-67
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• 2012

Owing to the rapid growth of mobile and electronic equipment miniaturization technology, the supply of micro mobile computing machine has been fast raised. Accordingly they have performed many researches on energy harvesting technology to provide promising power supply equipment to substitute existing batteries. In this paper, in order to have low resonance frequency for piezoelectric energy harvester, we have tried to make it larger than before by adopting nickel that has much higher density than silicon. We have applied it for our energy harvesting actuator instead of the existing silicon based actuator. Through such new concept and approach, we have designed energy harvesting device and made it personally by making with micromachining process. The energy harvester structure has a cantilever type and has a dimension of $10{\times}2.5{\times}0.1\;mm^3$ for length, width and thickness respectively. Its electrode type is formed by using Au/Ti of interdigitate d33 mode. The pattern size and gap size is 50 ${\mu}m$. Based on the measurement of the nickel-based piezoelectric energy harvester, it is found to have 778 Hz for a resonant frequency with no proof mass. In that resonance frequency we could get a maximum output power of 76 ${\mu}W$ at 4.8 $M{\Omega}$ being applied with 1 g acceleration.

• 자원리싸이클링
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• 제26권6호
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• pp.97-101
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• 2017

메탈폼은 매우 많은 기공을 포함하는 세포상 구조를 갖는 고체금속을 일컫는다. 특히 관통 기공 같은 개기공들은 고온용 필터 및 촉매 지지체 등으로 산업적으로 많이 사용되고 있다. 본 연구에서는 슬러리 코팅공정으로 90% 이상의 기공율과 2 mm 이상의 기공크기를 갖는 Fe 폼을 제조하였다. 이때 Fe 분말과 $Fe_2O_3$ 분말의 혼합비를 달리하여 기공율과 기공크기를 제어하였다. 이를 위해 우선 분말, 증류수 및 폴리비닐알콜(PVA)를 균일하게 혼합하여 슬러리를 제조하였다. $Fe_2O_3$ 분말의 혼합 비율이 증가할수록 PU 폼에 코팅된 슬러리의 양이 증가한 반면 Fe 폼의 수축 및 기공율은 각각 감소하였다.

• Korean Chemical Engineering Research
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• 제54권2호
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• pp.223-228
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• 2016

본 논문은 PDMS을 기반으로 한 미세접촉인쇄법을 사용하여 보다 효율적으로 지방세포를 선택적으로 배양접시에 부착시켰으며 패터닝 된 배양접시에서 지방세포가 빠르게 지방분화를 가능하게 하였다. PDMS을 이용한 선택적 표면 처리 방법은 기존의 세포칩 제작과 달리 소량의 유기용매사용, 저가의 장비 사용, 또한 효율적으로 특정 지역 안에서 지방세포를 고정화하고 성장시킬 수 있으며 이를 통해 지방세포의 생리학적 상태를 손쉽게 관찰할 수 있는 분석 기술로 활용된다. 이렇게 구성된 지방세포칩 위에 대표적인 비만 억제제 약물인 Orlistat을 $0.2{\mu}M{\sim}5.0{\mu}M$ 농도로 처리하였을 때 대조군에 비하여 최대 26.5%의 억제 효과가 나타남을 확인하였다. 따라서, 본 논문에서 제안하는 방법을 통하여 다양한 비만 억제제 약물 탐색을 위한 세포칩으로 활용이 가능할 것으로 기대된다.

• Journal of Periodontal and Implant Science
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• 제53권5호
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• pp.321-335
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• 2023

Purpose: The aim of this study was to investigate the efficacy of photo-crosslinked gelatin methacryloyl (GelMa) hydrogel containing calcium phosphate nanoparticles (CNp) when applying different fabrication methods for bone regeneration. Methods: Four circular defects were created in the calvaria of 10 rabbits. Each defect was randomly allocated to the following study groups: 1) the sham control group, 2) the GelMa group (defect filled with crosslinked GelMa hydrogel), 3) the CNp-GelMa group (GelMa hydrogel crosslinked with nanoparticles), and 4) the CNp+GelMa group (crosslinked GelMa loaded with nanoparticles). At 2, 4, and 8 weeks, samples were harvested, and histological and micro-computed tomography analyses were performed. Results: Histomorphometric analysis showed that the CNp-GelMa and CNp+GelMa groups at 2 weeks had significantly greater total augmented areas than the control group (P<0.05). The greatest new bone area was observed in the CNp-GelMa group, but without statistical significance (P>0.05). Crosslinked GelMa hydrogel with nanoparticles exhibited good biocompatibility with a minimal inflammatory reaction. Conclusions: There was no difference in the efficacy of bone regeneration according to the synthesized method of photo-crosslinked GelMa hydrogel with nanoparticles. However, these materials could remain within a bone defect up to 2 weeks and showed good biocompatibility with little inflammatory response. Further improvement in mechanical properties and resistance to enzymatic degradation would be needed for the clinical application.

• 센서학회지
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• 제8권2호
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• pp.115-123
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• 1999

PSG(800nm)/$Si_3N_4$ (150nm)로 구성된 유전체 membrane 윗면에 heater와 감지전극을 등일면상에 동시에 형성하였다. 제작된 소자의 전체 면적은 $3.78{\times}3.78mm^2$이고, diaphragm의 면적은 $1.5{\times}1.5mm^2$이며, 감지막치 면적은 $0.24{\times}0.24mm^2$였다. 그리고 diaphragm내의 열분포 분석을 유한요소법을 이용하여 수행하였으며, 실제로 제작된 소자의 열분포와 비교하였다. 소비전력은 동작온도 $350^{\circ}C$에서 약 85mW였다. Sn 금속막을 상온과 $232^{\circ}C$의 두 가지 기판온도에서 열증착하였고, 이를 $650^{\circ}C$의 산소분위기에서 3시간 열산화함으로써 $SnO_2$ 감지막을 형성하였다. 그리고 이를 SEM과 XRD로 특성을 분석하였다. 제작된 소자에 대해서 온도 및 습도에 대한 감지막의 영향 및 부탄가스에 대한 반응특성도 조사하였다.

• 전기화학회지
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• 제14권4호
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• pp.196-200
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• 2011

본 연구에서는 니오븀 산화물을 비교적 저온에서 단시간 동안의 양극산화법을 통해 제조하였다. 이때, 전해질로는 NaF와 HF를 혼합하여 사용하였으며, 20~120 V의 다양한 전압 조건에 따라 생성되는 니오븀 산화물의 미세구조를 관찰하였다. 일반적으로 니오븀 금속의 양극산화 시 초기에 생성된 니오븀 산화물은 무정형 구조이나 반응이 경과함에 따라 점차 결정형 산화물로 성장하게 된다. 이러한 산화물은 XRD 분석을 통하여 결정형의 $Nb_2O_5$ 임을 확인하였고, FE-SEM 분석결과, 그 표면은 매우 밀집된 형태의 나노로드로 이루어진 마이크로콘 산화물임을 알 수 있었다. 적절한 공정변수로 제조된 니오븀 산화물은 마이크로콘 구조 전체 표면에 걸쳐 동일한 크기를 갖는 나노로드 다발을 형성하고 있으며, 이러한 나노 구조는 또한 넓은 표면적을 기대할 수 있어 염료감응 태양전지나 바이오 소재 등에 대한 다양한 분야에 응용될 수 있을 것으로 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.86-86
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• 2012

The new approaches for silicon solar cell of new concept have been actively conducted. Especially, solar cells with wire array structured radial p-n junctions has attracted considerable attention due to the unique advantages of orthogonalizing the direction of light absorption and charge separation while allowing for improved light scattering and trapping. One-dimenstional semiconductor nano/micro structures should be fabricated for radial p-n junction solar cell. Most of silicon wire and/or pillar arrays have been fabricated by vapour-liquid-solid (VLS) growth because of its simple and cheap process. In the case of the VLS method has some weak points, that is, the incorporation of heavy metal catalysts into the growing silicon wire, the high temperature procedure. We have tried new approaches; one is electrochemical etching, the other is noble metal catalytic etching method to overcome those problems. In this talk, the silicon pillar formation will be characterized by investigating the parameters of the electrochemical etching process such as HF concentration ratio of electrolyte, current density, back contact material, temperature of the solution, and large pre-pattern size and pitch. In the noble metal catalytic etching processes, the effect of solution composition and thickness of metal catalyst on the etching rate and morphologies of silicon was investigated. Finally, radial p-n junction wire arrays were fabricated by spin on doping (phosphor), starting from chemical etched p-Si wire arrays. In/Ga eutectic metal was used for contact metal. The energy conversion efficiency of radial p-n junction solar cell is discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.389-390
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• 2012

In this study, we fabricate a superhydrophobic surface made of hierarchical nanostructures that combine wax crystalline structure with moth-eye structure using vacuum cluster system and measure their hydrophobicity and durability. Since the lotus effect was found, much work has been done on studying self-cleaning surface for decades. The surface of lotus leaf consists of multi-level layers of micro scale papillose epidermal cells and epicuticular wax crystalloids [1]. This hierarchical structure has superhydrophobic property because the sufficiently rough surface allows air pockets to form easily below the liquid, the so-called Cassie state, so that the relatively small area of water/solid interface makes the energetic cost associated with corresponding water/air interfaces smaller than the energy gained [2]. Various nanostructures have been reported for fabricating the self-cleaning surface but in general, they have the problem of low durability. More than two nanostructures on a surface can be integrated together to increase hydrophobicity and durability of the surface as in the lotus leaf [3,5]. As one of the bio-inspired nanostructures, we introduce a hierarchical nanostructure fabricated with a high vacuum cluster system. A hierarchical nanostructure is a combination of moth-eye structure with an average pitch of 300 nm and height of 700 nm, and the wax crystalline structure with an average width and height of 200 nm. The moth-eye structure is fabricated with deep reactive ion etching (DRIE) process. $SiO_2$ layer is initially deposited on a glass substrate using PECVD in the cluster system. Then, Au seed layer is deposited for a few second using DC sputtering process to provide stochastic mask for etching the underlying $SiO_2$ layer with ICP-RIE so that moth-eye structure can be fabricated. Additionally, n-hexatriacontane paraffin wax ($C_{36}H_{74}$) is deposited on the moth-eye structure in a thermal evaporator and self-recrystallized at $40^{\circ}C$ for 4h [4]. All of steps are conducted utilizing vacuum cluster system to minimize the contamination. The water contact angles are measured by tensiometer. The morphology of the surface is characterized using SEM and AFM and the reflectance is measured by spectrophotometer.

• 센서학회지
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• 제14권1호
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• pp.22-27
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• 2005

A thermoelectric flow sensor for small quantity of gas flow rate was fabricated using silicon wafer semiconductor process and bulk micromachining technology. Evanohm R alloy heater and chromel-constantan thermocouples were used as a generation heat unit and sensing parts, respectively. The heater and thermocouples are thermally isolated on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ laminated membrane. The characteristics of this sensor were observed in the flow rate range from 0.2 slm to 1.0 slm and the heater power from 0.72 mW to 5.63 mW. The results showed that the sensitivities $(({\partial}({\Delta}V)/{\partial}(\dot{q}));{\;}{\Delta}V$ : voltage difference, $\dot{q}$ : flow rate) were increased in accordance with heater power rise and decreasing of flow rate.

• 한국분말재료학회지
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• 제23권5호
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• pp.391-396
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• 2016

In this study, ultra-fine soft-magnetic micro-powders are prepared by high-pressure gas atomization of an Fe-based alloy, Fe-Hf-B-Nb-P-C. Spherical powders are successfully obtained by disintegration of the alloy melts under high-pressure He or $N_2$ gas. The mean particle diameter of the obtained powders is $25.7{\mu}m$ and $42.1{\mu}m$ for He and $N_2$ gas, respectively. Their crystallographic structure is confirmed to be amorphous throughout the interior when the particle diameter is less than $45{\mu}m$. The prepared powders show excellent soft magnetic properties with a saturation magnetization of 164.5 emu/g and a coercivity of 9.0 Oe. Finally, a toroidal core is fabricated for measuring the magnetic permeability, and a ${\mu}_r$ of up to 78.5 is obtained. It is strongly believed that soft magnetic powders prepared by gas atomization will be beneficial in the fabrication of high-performance devices, including inductors and motors.