Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication and characteristics of micro-machined thermoelectric flow sensor

실리콘 미세 가공을 이용한 열전형 미소유량센서 제작 및 특성

  • Lee, Young-Hwa (Department of Material Engineering, Chungnam National University) ;
  • Roh, Sung-Cheoul (Thermo-Fluid System Department, Korea Institute of Machinery and Materials) ;
  • Na, Pil-Sun (Department of Material Engineering, Chungnam National University) ;
  • Kim, Kook-Jin (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Lee, Kwang-Chul (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Choi, Yong-Moon (Division of Physical Metrology, Korea Research Institute of Standards and Science) ;
  • Park, Se-Il (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Ihm, Young-Eon (Department of Material Engineering, Chungnam National University)
  • 이영화 (충남대학교 재료공학과) ;
  • 노성철 (한국기계연구원 열유체공정기술연구부) ;
  • 나필선 (충남대학교 재료공학과) ;
  • 김국진 (한국표준과학연구원 전자기표준부) ;
  • 이광철 (한국표준과학연구원 전자기표준부) ;
  • 최용문 (한국표준과학연구원 물리표준부) ;
  • 박세일 (한국표준과학연구원 전자기표준부) ;
  • 임영언 (충남대학교 재료공학과)
  • Published : 2005.01.30
Download PDF
⟨ Previous Next ⟩

Abstract

A thermoelectric flow sensor for small quantity of gas flow rate was fabricated using silicon wafer semiconductor process and bulk micromachining technology. Evanohm R alloy heater and chromel-constantan thermocouples were used as a generation heat unit and sensing parts, respectively. The heater and thermocouples are thermally isolated on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ laminated membrane. The characteristics of this sensor were observed in the flow rate range from 0.2 slm to 1.0 slm and the heater power from 0.72 mW to 5.63 mW. The results showed that the sensitivities $(({\partial}({\Delta}V)/{\partial}(\dot{q}));{\;}{\Delta}V$ : voltage difference, $\dot{q}$ : flow rate) were increased in accordance with heater power rise and decreasing of flow rate.

Keywords

References

  1. J. van Kuijk, T. S. J. Lammerink, H.-E. de Bree, M. Elwenspoek and J. H. J. Fluitman, 'Multi-parameter detection in fluid flows', Sensors and Actuators A, vol. 46-47, pp. 369-372, 1995
  2. M. A. Gajda and H. Ahmed, 'Applications of thermal silicon sensors on membranes', Sensors and Actuators A, vol. 49, pp. 1-9, 1995 https://doi.org/10.1016/0924-4247(96)80025-2
  3. 이형주, 김진섭, 김여환, 이정희, 최용문, 박세일, '유전체$(Si_3N_4/SiO_2/Si_3N_4)$ 멤브레인 위에 제작된 크로멜-알루멜 열전 유량센서', 한국센서학회지, 제12권, 제3호, pp. 1-9, 2003
  4. 정귀상, 김미목, 남태철, 'SOI 멤브레인과 트랜치 구조상에 제작된 발열저항체형 마이크로 유량센서의 특성', 한국전기전자재료학회지, 제14권, 제8호, pp. 658-662, 2001
  5. E. Yoon and K. D. Wise, 'An integrated mass flow sensor with on-chip CMOS interface circuitry', IEEE Trans. Electron Devices, vol. 39, no. 6, Jun. 1992
  6. A. Glaninger, A. Jachimovicz, F. Kohl, R. Chabi-covsky, and G. Urban, 'Wide range semiconductor flow sensors', Sensors and Actuators A, vol. 85, pp. 139-146, 2000 https://doi.org/10.1016/S0924-4247(00)00370-8
  7. N. T. Nguyen, 'Micromachined flow sensors-a review', Flow Meas. lustrum., vol. 8, no. 1, pp. 7-16, 1997 https://doi.org/10.1016/S0955-5986(97)00019-8
  8. 최우창, 최혁환, 권태하, 이명교, '가스센서용 마이크로 히터의 발열특성', 한국센서학회지, 제7권, 제5호, pp. 356-363, 1998
  9. G. Kaltsas and A. G. Nassiopoulou, 'Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation', Sensors and Actuators A, vol. 76, pp. 133-138, 1999 https://doi.org/10.1016/S0924-4247(98)00370-7
  10. B. W. van Oudheusden, 'Silicon thermal flow sensors', Sensors and Actuators A, vol. 30, pp. 5-26, 1992 https://doi.org/10.1016/0924-4247(92)80192-6
  11. T. S. I. Lammerink, N. R. Tas, M. Elwenspoek, and J. H. J. Fluitman. 'Micro-liquid flow sensor', Sensors and Actuators A, vol. 37-38, pp. 45-50, 1993
  12. 김명규, 박동수, 김창원, 김진섭, 이정희, 이종현, 손병기, '스트레스균형이 이루어진 $Si_3N_4/SiO_2/Si_3N_4$ 유전체 멤버레인의 제작', 한국센서학회지, 제4권, 제3호, pp. 51-59, 1995
  13. 이영화, 권성원, 김국진, 박세일, 임영언, 'Evanohm R 합금 히터를 사용한 크로멜-콘스탄탄 다중접합 열전변환기의 제작 및 특성,' 한국센서학회지, 제13권, 제1호, pp.35-40, 2004 https://doi.org/10.5369/JSST.2004.13.1.035
  14. 안영배, 김진섭, 김명규, 이종현, 이정희, '스트레스 균형이 이루어진 멤버레인 및 박막 열전대를 응용한 유체센서', 한국센서학회지, 제5권, 제6호, pp.51-59, 1996