Fabrication of Cantilever and Bridge Type Piezoelectric Micro-transducer for Mass Detecting Device (질량감지 소자를 위한 Cantilever 및 Bridge Type 압전 마이크로 Transducer의 제작)
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- Proceedings of the Korean Ceranic Society Conference
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- 2003.04a
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- pp.54.1-54
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- 2003