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http://dx.doi.org/10.5369/JSST.2013.22.5.374

Elastic Buffer Layer Coupled Micro Probe  

Choi, Ju Chan (Graduate School of Electronics Engineering, Kyungpook National University)
Choi, Young Chan (Graduate School of Electronics Engineering, Kyungpook National University)
Jung, Dong Geon (Graduate School of Electronics Engineering, Kyungpook National University)
Kong, Seong Ho (Graduate School of Electronics Engineering, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.22, no.5, 2013 , pp. 374-378 More about this Journal
Abstract
In this paper, a new structure of probe unit is designed and fabricated with PDMS, which is well-known elastic material, as a buffer layer for increasing overdrive force and mechanical strength. In general, PDMS is widely used as actuation material due to its elasticity and compatibility of fabrication process. In this work, PDMS layer is chosen for mechanical elasticity of the proposed probe unit. We achieved the high overdrive force by placing PDMS buffer layer under the silicon based cantilever due to its elasticity. Moreover, the relation between prove length and overdrive force was measured by experiment in this work. Therefore, the various specifications of the micro prove unit can be designed by using the results of this work.
Keywords
Cantilever; Probe; PDMS; Elastic layer; Overdrive force;
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Times Cited By KSCI : 1  (Citation Analysis)
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