Elastic Buffer Layer Coupled Micro Probe |
Choi, Ju Chan
(Graduate School of Electronics Engineering, Kyungpook National University)
Choi, Young Chan (Graduate School of Electronics Engineering, Kyungpook National University) Jung, Dong Geon (Graduate School of Electronics Engineering, Kyungpook National University) Kong, Seong Ho (Graduate School of Electronics Engineering, Kyungpook National University) |
1 | P. H. Hong, D. Y. Kong, D. I. Lee, B. Kim, C. S. Cho, and J. H. Lee, "Fabrication of probe beam by using joule heating and fusing", J. Sensor Sci. & Tech., Vol. 22, No. 1, pp. 89-94, 2013. 과학기술학회마을 DOI ScienceOn |
2 | T. Itoh, K. Kataoka, and T. Suga, "Characteristics of low force contact process for MEMS probe cards", Sens. Actuator A-Phys., Vol. 97-98, pp. 462-467, 2002. DOI ScienceOn |
3 | T. Itoh, S. Kawamura, K. Kataoka, and T. Suga, "Electroplated Ni microcantilever probe with electrostatic actuation", Sens. Actuator A-Phys., Vol. 123-124, pp. 490-496, 2005. DOI ScienceOn |
4 | Y. Zhang, Y. Zhang, and R. B. Marcus, "Thermally actuated microprobes for a new wafer probe card", IEEE J. Microelectromech. Syst., Vol. 8, No. 1, pp. 43-49, 1999. DOI ScienceOn |
5 | F. Wang, R. Cheng, and X. Li, "MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing", IEEE J. Microelectromech. Syst., Vol. 18, No. 4, pp. 933-941, 2009. DOI ScienceOn |
6 | C. J. Kim, H. Jung, J. C. Yang, S. H. Kong, D. S. Jang, and C. Kim, "Fabrication of a MEMS-based fine-pitch cantilever-type probe unit", Proc. of IEEE Conf. on Sensors, pp. 530-533, Daegu, Republic of Korea, 2006. |
7 | J. C. Yang, H. Jung, C. J. Kim, J. E. Kim, and S. H. Kong, "Fabrication of a MEMS-based fine-pitch cnatilever-type probe unit", Proc. Intern. Microprocesses and Nanotechnology Conf., pp. 328-329, Kamakura, Japen, 2006. |
8 | S. H. Yoon, V. R. Ortiz, K. H. Kim, Y. H. Seo, and M. R. K. Mofrad, "Analysis of circular PDMS microballoons with ultralarge deflection for MEMS design", J. Microelectromech. Syst., Vol. 19, No. 4, pp. 854-864, 2010. DOI ScienceOn |
9 | O. C. Jeong and S. Konishi, "All PDMS pneumatic microfinger with bidirectional motion and its application", J. Microelectromech. Syst., Vol. 15, No. 4, pp. 896-903, 2006. DOI ScienceOn |
10 | A. S. Nezhad, M. Ghanbari, C. G. Agudelo, M. Packirisamy, R. B. Bhat, and A. Geitmann, "PDMS microcantilever-based flow sensor integration for lab-on-a-chip", IEEE Sens. J., Vol. 13, No. 2, pp. 601-609, 2013. DOI ScienceOn |