References
- P. H. Hong, D. Y. Kong, D. I. Lee, B. Kim, C. S. Cho, and J. H. Lee, "Fabrication of probe beam by using joule heating and fusing", J. Sensor Sci. & Tech., Vol. 22, No. 1, pp. 89-94, 2013. https://doi.org/10.5369/JSST.2013.22.1.89
- T. Itoh, K. Kataoka, and T. Suga, "Characteristics of low force contact process for MEMS probe cards", Sens. Actuator A-Phys., Vol. 97-98, pp. 462-467, 2002. https://doi.org/10.1016/S0924-4247(01)00822-6
- T. Itoh, S. Kawamura, K. Kataoka, and T. Suga, "Electroplated Ni microcantilever probe with electrostatic actuation", Sens. Actuator A-Phys., Vol. 123-124, pp. 490-496, 2005. https://doi.org/10.1016/j.sna.2005.03.023
- Y. Zhang, Y. Zhang, and R. B. Marcus, "Thermally actuated microprobes for a new wafer probe card", IEEE J. Microelectromech. Syst., Vol. 8, No. 1, pp. 43-49, 1999. https://doi.org/10.1109/84.749401
- F. Wang, R. Cheng, and X. Li, "MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing", IEEE J. Microelectromech. Syst., Vol. 18, No. 4, pp. 933-941, 2009. https://doi.org/10.1109/JMEMS.2009.2021815
- C. J. Kim, H. Jung, J. C. Yang, S. H. Kong, D. S. Jang, and C. Kim, "Fabrication of a MEMS-based fine-pitch cantilever-type probe unit", Proc. of IEEE Conf. on Sensors, pp. 530-533, Daegu, Republic of Korea, 2006.
- J. C. Yang, H. Jung, C. J. Kim, J. E. Kim, and S. H. Kong, "Fabrication of a MEMS-based fine-pitch cnatilever-type probe unit", Proc. Intern. Microprocesses and Nanotechnology Conf., pp. 328-329, Kamakura, Japen, 2006.
- S. H. Yoon, V. R. Ortiz, K. H. Kim, Y. H. Seo, and M. R. K. Mofrad, "Analysis of circular PDMS microballoons with ultralarge deflection for MEMS design", J. Microelectromech. Syst., Vol. 19, No. 4, pp. 854-864, 2010. https://doi.org/10.1109/JMEMS.2010.2049984
- O. C. Jeong and S. Konishi, "All PDMS pneumatic microfinger with bidirectional motion and its application", J. Microelectromech. Syst., Vol. 15, No. 4, pp. 896-903, 2006. https://doi.org/10.1109/JMEMS.2006.879377
- A. S. Nezhad, M. Ghanbari, C. G. Agudelo, M. Packirisamy, R. B. Bhat, and A. Geitmann, "PDMS microcantilever-based flow sensor integration for lab-on-a-chip", IEEE Sens. J., Vol. 13, No. 2, pp. 601-609, 2013. https://doi.org/10.1109/JSEN.2012.2223667