• 조명전기설비학회논문지
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• 제14권1호
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• pp.22-29
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• 2000

본 논문은 가스절연개폐장치내에 바늘모양의 금속입자가 존재하는 경우 $\pm1.2/44[{\mu}s]$ 비진동성 임펄스와 $\pm0.4[{\mu}s]/1.14[MHz]$ 진동성 임펄스전압이 인가되었을 때 $SF_6$가스의 절연특성에 관한 것으로 절연파괴전압-시간 특성 (V-t 특성) 및 절연파괴전압-압력 특성(V-p 특성)을 측정하고 검토하였다. 실험은 길이 10[mml, 반경 0.5[mm]인 바늘모양의 돌기물에 의해 형성된 불평등 전계이며, 가스압력이 0.1~0.5[MPa]인 범위에서 수행하였다. 그 결과 절연 파괴는 정.부극성 모두 계단상 펄스에 의해 진전하는 리더메커니즘으로 발생하였다. 정극성의 진동성 임펼스전압이 인가되었을 때 절연파괴전압이 가장 낮았으며, 짧은 시간범위에서 V-t곡선의 감쇠가 현저하고 가스압력의 의존성이 적게 나타났다. 이에 반해 부극성의 경우 V-t 특성과 V-p 특성은 인가전압의 파형에 대한 의존성이 현저하였다.

• 한국입자에어로졸학회지
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• 제13권2호
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• pp.79-85
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• 2017

실험실 규모의 유동층 반응기(Length=0.25m, Diameter=0.05m)에서 고부가가치 물질인 희유금속 산화물 $NiO/MoO_3/MoS_2$의 공탑속도에 따른 최소유동화 속도 및 압력손실 경향을 확인하였다. 시료의 L/D 1, 2, 3 변화에 따른 Superficial gas velocity 0.07~0.45 m/s 범위에서 $NiO/MoO_3/MoS_2$의 L/D 1, 2, 3에서의 평균 압력손실은 Decreasing flux에서 290~1952 Pa, Increasing flux에서 253~1925 Pa로 나타났다. Wen이 제시한 이론값과 실험데이터를 비교해본 결과, 0.021~0.36배 차이나는 것을 확인하였다. 이번 결과를 통하여, 희유금속 산화물을 실제 현상에서 적용 가능한 운전조건을 결정할 수 있었다.

• 한국입자에어로졸학회지
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• 제19권3호
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• pp.53-62
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• 2023

This study compared the collection efficiency of a two-stage electrostatic precipitator (ESP) with a lightweight PET film-coated carbon electrode collector plate, depending on the relative humidity of the exhaust gas and the applied voltage to the pre-charger. It was confirmed that the onset voltage at which corona discharge occurs decreases and the discharge current decreases at the same voltage as the relative humidity increases. On the other hand, even though there was almost no change in the diameter of the particles generated depending on the relative humidity, the efficiency was higher at the same voltage as the relative humidity increased. In addition, by applying a two-stage ESP structure, the collection efficiency was higher than that of a single-stage electrostatic precipitator under the same conditions. The ESP using the carbon electrode coated with PET film used in this study is expected to be effective in various aspects such as weight and in the current situation where environmental regulations are rapidly tightening.

• 한국환경보건학회지
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• 제36권2호
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• pp.108-117
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• 2010

In this study, ambient particulate matter ($PM_{2.5}$ and $PM_{10}$) levels were measured and their chemical and physical properties were characterized. Two sites in Gwangju were sampled once a month from December 2008 to November 2009. The annual mean concentrations of $PM_{2.5}$ and $PM_{10}$ were $26.9\;{\mu}g/m^3$ and $46.3\;{\mu}g/m^3$, respectively, in Nongseongdong and $26.1\;{\mu}g/m^3$ and $44.8\;{\mu}g/m^3$, respectively, in Duam-dong. $PM_{2.5}$ levels were 1.8 times higher than the USA Environmental Protection Agency (EPA) national ambient air quality standard for $PM_{2.5}$ ($15\;{\mu}g/m^3$). The average $PM_{2.5}/PM_{10}$ ratio of 0.58 suggested that $PM_{2.5}$ is a significant component of the ambient particle pollution. The order of concentration of metallic elements in $PM_{2.5}$ and $PM_{10}$ was Si > Al > Fe > Zn > Pb > Cu > Mn. Cd was not detected. The earth crustal enrichment factors for Cr, Cu, Pb and Zn in $PM_{2.5}$ were higher than those in $PM_{10}$. When the earth crustal enrichment factors for Cr, Cu, Pb and Zn were higher than 10, this suggested influence from anthropogenic sources. The soil contribution ratios for $PM_{2.5}$ and $PM_{10}$ were 11.3% and 16.4%, respectively, and were higher in the fall and winter. Anions (${SO_4}^{-2}$, ${NO_3}^-$, and $Cl^-$) comprise 28.7% of $PM_{2.5}$ and 21.4% of $PM_{10}$. The correlation coefficient of Zn-Fe, Mn-Cu, Fe-Cu and Fe-Mn in $PM_{2.5}$ was high in the sampling sites, and metallic elements were primarily from anthropogenic sources such as fuel combustion and vehicle emissions.

• 대한기계학회논문집B
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• 제34권4호
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• pp.423-428
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• 2010

반도체 공정에서 배출되는 미세입자를 포집하기 위하여 전기집진장치가 적용되고 있으나, 배출가스 내 포함된 강부식성 오염원에 의한 전기집진장치 내부 오염 및 부식 문제가 심각하여, 이를 해결하기 위한 방안이 절실하다. 본 연구에서는 탄소섬유로 이루어진 하전부와 PET 필름 사이에 금속 박막이 삽입된 집진부로 이루어진 내부식 전기집진장치를 개발하여, 하전부 및 집진부 인가전압, 처리유량, 하전부 채널 수 등의 운전 조건에 따른 전기집진기의 초미세입자 집진 성능을 평가하였다. 평균입경이 100 nm인 KCl 입자를 시험입자로 사용하였으며, 전기집진기 전/후단 입자 농도 변화를 측정하기 위하여 SMPS를 사용하였다. 본 연구에서 개발된 9채널 하전부와 65 mm 집진부로 구성된 전기집진기의 성능평가 결과, $500\;m^3/hr$ 유량조건에서 하전부 및 집진부에 7 kV와 10 kV를 각각 인가하였을 때, 300 nm입자에 대한 포집효율이 90% 이상으로 높게 나타났다.

• 청정기술
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• 제7권3호
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• pp.215-223
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as electrolyzed water(EW) are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed water was generated by an electrolysis system which consists of three anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH4Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO2 concentration changes dissolved from air. Contact angles of UPW, AW, and CW on DHF treated Si wafer surfaces were measured to be $65.9^{\circ}$, $66.5^{\circ}$ and $56.8^{\circ}$, respectively, which characterizes clearly the eletrolyzed water. To analyze the amount of metallic impurities on Si wafer surface, ICP-MS was introduced. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. To analyze the number of particles on Si wafer surfaces, Tencor 6220 were introduced. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about $9{\ell}$ chemicals, while EW did only $400m{\ell}$ HCl electrolyte or $600m{\ell}$ NH4Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for promoting environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

• Korean Chemical Engineering Research
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• 제54권5호
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• pp.659-664
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• 2016

In order to resolve the AAEM species migration routes and the interaction relationship between biochar structure and AAEM species during biomass pyrolysis, experiments were performed in an entrained flow reactor with $N_2$ at $500{\sim}900^{\circ}C$. ICP-AES, XPS and SEM-EDX were used to examine content and distribution of AAEM species and the physicochemical structures of biochar. The results show that at $500{\sim}700^{\circ}C$, the precipitation rate of AAEM species is relatively high. At high temperature (>$700^{\circ}C$), the AAEM species continue to migrate from interior to exterior, but little precipitation from biochar surface. And the migration of AAEM species is mainly realized by the C-O bond as the carrier medium. The AAEM species on biochar surface are mainly Na, Mg and Ca (<$700^{\circ}C$), while changing to K, Mg and Ca (${\geq}700^{\circ}C$). From $500^{\circ}C$ to $900^{\circ}C$, the biochar particle morphology gradually changes from fibers to porous structures, finally to molten particles. At $700{\sim}900^{\circ}C$, Ca element is obviously enriched on the molten edge of the biochar porous structures.

• 한국재료학회지
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• 제11권4호
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• pp.251-257
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• 2001

반도체 소자의 고집적화에 따른 세정공정 수는 점점 증가하고 있는 추세에 있다 현재 사용되는 세정은 다량의 화학약품 및 초순수를 소비하며, 고온에서 행하여지고 있는 RCA세정을 근간으로 하고 있다. 세정공정수의 증가는 바로 화학약품의 사용량 증가를 초래하게 되며, 이에 따른 환경문제가 심각하게 대두되고 있는 실정에 이르렀다. 따라서 이러한 화학약품 및 초순수 사용을 절감하고, 저온에서 세정공정이 이뤄지는 기술이 향후 요구되어 지고 있다. 이번 연구는 이러한 관점에서 화학약품 및 초순수 사용량을 줄이며, 상온 공정이 이뤄지는 전리수를 이용하여 실리콘 웨이퍼 세정을 하였다. 제조된 전리수는 산화성 성질을 지닌 양극수와 환원성 성질인 음극수로 이루어지고, 각각 pH 및 ORP는 4.7/+1050mV, 9.8/-750mV를 30분 이상 유지하고 있었다 전리수의 양극수에 의한 금속제거 효과가 음극수의 효과보다 우수함을 확인할 수 있었으며, 다양한 입자제거 실험에도 불구하고, 동일한 분포도를 나타내고 있었다.

• 한국분말재료학회지
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• 제21권6호
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• pp.434-440
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• 2014

Silicon carbide(SiC) layer is particularly important tri-isotropic (TRISO) coating layers because it acts as a miniature pressure vessel and a diffusion barrier to gaseous and metallic fission products in the TRISO coated particle. The high temperature deposition of SiC layer normally performed at $1500-1650^{\circ}C$ has a negative effect on the property of IPyC layer by increasing its anisotropy. To investigate the feasibility of lower temperature SiC deposition, the influence of deposition temperature on the property of SiC layer are examined in this study. While the SiC layer coated at $1500^{\circ}C$ obtains nearly stoichiometric composition, the composition of the SiC layer coated at $1300-1400^{\circ}C$ shows discrepancy from stoichiometric ratio(1:1). $3-7{\mu}m$ grain size of SiC layer coated at $1500^{\circ}C$ is decreased to sub-micrometer (< $1{\mu}m$) $-2{\mu}m$ grain size when coated at $1400^{\circ}C$, and further decreased to nano grain size when coated at $1300-1350^{\circ}C$. Moreover, the high density of SiC layer (${\geq}3.19g/cm^3$) which is easily obtained at $1500^{\circ}C$ coating is difficult to achieve at lower temperature owing to nano size pores. the density is remarkably decreased with decreasing SiC deposition temperature.

• Bulletin of the Korean Chemical Society
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• 제19권9호
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• pp.934-942
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• 1998

$^13CO$ chemisorbed on platinum particles in L-zeolite has been investigated by static and magic angle spinning NMR spectroscopy. The representative spectra are composed of a broad asymmetric peak with a center of gravity at 230±30 ppm and a sharp symmetric peak at 124±2 ppm which is tentatively assigned to physisorbed $CO_2$, on inner walls of L-zeolite. Overall, the broad resonance component is similar to our previous results of highly dispersed (80-96%) CO/Pt/silica or CO/Pt/alumina samples, still showing metallic characters. The principal difference is in the first moment value. The broad peak in the spectra is assigned to CO linearly bound to Pt particles in the L-zeolites, and indicates a distribution of isotropic shifts from bonding site to bonding site. The NMR results reported here manifest that the Pt particles inside of the L-zeolites channels are not collectively the same with the ones supported on silica or alumina with similar dispersion in terms of Pt particle shape and/or ordering of Pt atoms in a particle. As a result, Pt particles of CO/Pt/L-zeolite were agglomerated accompanying CO desorption upon annealing. There were no definite changes in the NMR spectra due to differences of exchanged cations. Comparison of our observation on CO/Pt/L-zeolite with Sharma et al.'s reveals that even when the first moment, the linewidtb, and the relaxation times of the static spectra and the dispersion measured by chemisorption are similar, the properties of Pt particles can be dramatically different. Therefore, it is essential to take advantage of the strengths of several techniques together in order to interpret data reliably, especially for the highly dispersed samples.