• 한국전기전자재료학회논문지
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• 제22권1호
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• pp.53-60
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• 2009

$ZrTiO_4$ dielectric thin films were coated by metal-organic decomposition, and annealed by rapid thermal processing up to $900^{\circ}C$ for their crytallization. Crystallized single-phase $ZrTiO_4$ thin films were fabricated above the annealing temperature of $800^{\circ}C$, but their grains were randomly oriented without specific textured orientation. Best dielectric properties were presented by the sample annealed at $800^{\circ}C$ which had crystalline structure and flat surface. Dielectric constant of the film was maintained at 32 throughout full frequency range up to 6 GHz, and dielectric loss was varied between 0.01 and 0.04.

• 한국전기전자재료학회논문지
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• 제23권4호
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• pp.311-316
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• 2010

$Zr_{0.7}Sn_{0.3}TiO_4$ (ZST) thin films were fabricated by metal-organic decomposition, and their dielectric properties were investigated in order to evaluate their potential use in passive capacitors for rf and analog/mixed signal integrated circuits. The ZST thin film annealed at the temperature of $800^{\circ}C$ showed a dielectric constant of 27.3 and a dielectric loss of 0.011. The capacitor using the ZST film had quadratic and linear voltage coefficient of capacitance (VCC) of -65 ppm/$V^2$ and -35 ppm/V at 100 kHz, respectively. It also exhibited a good temperature coefficient of capacitance (TCC) value of -32 ppm/$^{\circ}C$ at 100 kHz.

• 한국세라믹학회지
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• 제37권7호
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• pp.665-672
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• 2000

The ferroelectric YMnO3 thin films were prepared by MOD(metal-organic decomposition) method with Y- and Mn-acetylacetonate as starting materials. Thin films were grown on various substrates by spin-coating technique. The crystalline phases of the thin films were identified by X-ray diffractometer as a function of heat-treatment temperature, pH of coating solution and substrate. In addition, the effect of Mn/Y molar ratio(0.8~1.2) on the formation of hexagonal-YMnO3 phase was investigated. In forming highly c-axisoriented hexagonal-YMnO3 single phase, the Pt coated Si substrate was more effective than the bare Si substrate, and the optimum heat-treatment condition was at 82$0^{\circ}C$ for 30 min. Higher Mn/Y molar ratio within 0.8~1.2 and pH of YMnO3 precursor solution within 0.5~2.5 favored formation of ferroelectric hexagonal phase rather than orthorhombic phase. Leakage current density of the hexagonal-YMnO3 thin film formed on Pt(111)/TiO2/SiO2/Si substrate was low enough as 0.4~4.0$\times$10-8(A/$\textrm{cm}^2$) at 5 V and its remanent polarization(Pr), calculated from the P-E hysteresis loop, was 3 nC/$\textrm{cm}^2$.

• 한국환경과학회지
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• 제15권3호
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• pp.221-227
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• 2006

Oxidative TCE decomposition over $TiO_2$-supported single and complex metal oxide catalysts has been conducted using a continuous flow type fixed-bed reactor system. Different types of commercial $TiO_2$ were used for obtaining the supported catalysts via an incipient wetness technique. Among a variety of titanias and metal oxides used, a DT51D $TiO_2\;and\;CrO_x$ would be the respective promising support and active ingredient for the oxidative TCE decomposition. The $TiO_2-based\;CrO_x$ catalyst gave a significant dependence of the catalytic activity in TCE oxidation reaction on the metal loadings. The use of high $CrO_x$ contents for preparing $CrO_x/TiO_2$ catalysts might produce $Cr_2O_3$ crystallites on the surface of $TiO_2$, thereby decreasing catalytic performance in the oxidative decomposition at low reaction temperatures. Supported $CrO_x$-based bimetallic oxide systems offered a very useful approach to lower the $CrO_x$ amounts without any loss in their catalytic activity for the catalytic TCE oxidation and to minimize the formation of Cl-containing organic products in the course of the catalytic reaction.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2001년도 추계 학술발표강연 및 논문개요집
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• pp.136-136
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• 2001

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.370.1-370.1
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• 2016

Volatile organic compounds (VOCs) are considered hazardous air pollutants and these are emitted from building materials and household products. VOCs can cause global warming as well as human sickness, and even cancer. Photocatalysis provides a way of converting VOCs into harmless materials. Various researches have shown that $TiO_2$ is the most efficient photocatalysts due to its excellent activity. In this study, metal/non-metal doped $TiO_2$ particles are synthesized for the enhancement of the photocatalytic properties of pure $TiO_2$. By metal/non-metal doping, band gap energies of prepared samples were analyzed by UV/Visible spectrophotometer. The physical and chemical properties of synthesized powder were characterized by field emission scanning electron microscope, by BET for measuring their specific surface area, and by XRD for phase identification and particle size determination. Degradation ability for p-xylene was evaluated through monitoring the concentration in a closed chamber. Relation between their properties and decomposition abilities for VOC were evaluated based on the experimental results.

• 한국전기전자재료학회논문지
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• 제27권4호
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• pp.226-231
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• 2014

Thin thermistor films of solutions with nickel and manganese oxides were prepared by metal-organic decomposition (MOD). The structural properties of the thin films were investigated as a function of annealing temperature. Field emission scanning electron microscope (FE-SEM) results indicated that the thin films had a thin thickness, smooth and dense surface. The crystallization temperature of $414.9^{\circ}C$ was confirmed from thermogavimetric-differential thermal analysis (TG-DTA) curve. A single phase of cubic spinel structure was obtained for the thin film annealed from $700^{\circ}C$ to $800^{\circ}C$, which was confirmed from the X-ray diffraction (XRD). From the selected area electron diffraction (SAED) in high resolution transmission electron microscope (HRTEM), the nano grains (2~3 nm) of spinel phase with (311) and (222) planes were detected for the thin film annealed at $500^{\circ}C$, which could be applicable to read-out integrated circuit (ROIC) substrate of the uncooled microbolometer with low processing temperature.

• 한국재료학회지
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• 제5권8호
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• pp.1045-1049
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• 1995

유기금속분해법(MOD, Metal Organic Decomposition)에 의하여 ITO 박막을 제조하고 SnO$_2$의 조성과 소성온도의 변화에 따른 박막의 특성변화를 고찰하였다. SnO$_2$의 양이 변하여도 ITO는 In$_2$O$_3$의 결정구조를 유지하고 있었으며, 이로부터 Sn이 In자리를 치환하여 고용체를 형성함을 알 수 있었다. SnO$_2$를 9wt.% 첨가 하였을때 비저항이 2.5$\times$$10^{-3}$$\Omega$-cm로 가장 낮은 값을 보였으며, 이는 타 연구자들의 결과치 보다 약 10배정도 큰 값이다. 이러한 비저항값의 차이는 작은 입경으로 인한 이동도의 감소 때문인 것으로 판단되었다. 투광도는 SnO$_2$의 첨가량 및 소성온도에 크게 의존하지 않았으며 가시영역에서 90% 이상을 보였다. 광흡수단으로부터 계산된 optical energy gap은 4.51-4.96eV 이었다.

• 공업화학
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• 제16권5호
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• pp.628-634
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• 2005

Zirconia-alumina 고분자 전구체가 유기물-무기물 용액 방법으로 zirconium acetylacetonate (ZA), aluminium nitrate (AN), polyethylene glycol (PEG), 그리고 에탄올을 이용하여 제조되었다. 고분자 전구체의 열적 특성 및 점도를 시차주사열용량분석기(DSC), 열중량분석기(TGA), 그리고 동적유변측정기를 이용하여 측정하였다. 부피 팽창을 동반하는 강렬한 발열반응이 $140^{\circ}C$에서 일어났다. 고분자 전구체의 부피팽창은 금속물질중에 유기물의 분해반응과 금속양이온과 PEG 사이의 반응에 의한 것이다. 이들 분해반응과 금속양이온과 PEG 사이의 반응에 대한 여부를 적외선분광기(FT-IR)와 $^{13}C$ solid-NMR 결과로부터 확인하였다. 고분자 전구체의 온도가 증가함에 따라 N-O, O-H, 그리고 C=C에서의 피이크 강도가 감소하였다. 이 결과는 강렬한 발열반응시 금속 물질의 분해반응과 PEG와 금속양이온의 반응이 일어났음을 나타내는 것이다. 다공성 파우더는 $800^{\circ}C$에서 2 h 동안 소결과정을 거쳐 결정성 $ZrO_2-Al_2O_3$ 복합체가 되었다.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• 제10권S_3호
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• pp.127-137
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• 2001

The sonochemical Process has been applied as a treatment method and was investigated its effect on the decomposition of humic substances(HS). The reaction kinetics and mechanisms in the Process of sonochemical treatment for humic substances(HS) in wastewater have also been discussed. It was observed that the metal ions such as Fe(II) and Mn(II) showed catalytic effects, while Al(III), Ca(II), and Mg(II) had inhibitory effects on the decomposition of humic substances in sonochemical reaction with hydrogen peroxide. Experimental results also showed factors such as hydrogen peroxide dose affected the formation of disinfection by-products. Two trihalomethanes, chloroform and dichlorobromomethane were formed as major disinfection by-products during chlorination. The mechanism of radical reaction is controlled by an oxidation process. The radicals are so reactive that most of them are consumed by HS radicals and hydroxyl radicals can be acted on organic solutes by hydroxyl addition, hydrogen abstraction, and electron transfer. The depolymerization and the radical reaction of HS radicals appear to occur simultaneously. The final steps of the reaction are the conversion of organic acids to carbon dioxide.