Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Structural Properties of Nickel Manganite Thin Films Fabricated by Metal Organic Decomposition

금속유기분해법으로 제조한 니켈 망가나이트 박막의 구조적 특성

  • Lee, Kui Woong (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Jeon, Chang Jun (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Jeong, Young Hun (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Yun, Ji Sun (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Nam, Joong Hee (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jeong Ho (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Paik, Jong Hoo (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Yoon, Jong-Won (Department of Advanced Materials Science and Engineering, Dankook University)
  • 이귀웅 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 전창준 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 정영훈 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 윤지선 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 남중희 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 조정호 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 백종후 (한국세라믹기술원 전자소재융합본부 지능형전자부품팀) ;
  • 윤종원 (단국대학교 신소재공학과)
  • Received : 2014.03.14
  • Accepted : 2014.03.19
  • Published : 2014.04.01
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Abstract

Thin thermistor films of solutions with nickel and manganese oxides were prepared by metal-organic decomposition (MOD). The structural properties of the thin films were investigated as a function of annealing temperature. Field emission scanning electron microscope (FE-SEM) results indicated that the thin films had a thin thickness, smooth and dense surface. The crystallization temperature of $414.9^{\circ}C$ was confirmed from thermogavimetric-differential thermal analysis (TG-DTA) curve. A single phase of cubic spinel structure was obtained for the thin film annealed from $700^{\circ}C$ to $800^{\circ}C$, which was confirmed from the X-ray diffraction (XRD). From the selected area electron diffraction (SAED) in high resolution transmission electron microscope (HRTEM), the nano grains (2~3 nm) of spinel phase with (311) and (222) planes were detected for the thin film annealed at $500^{\circ}C$, which could be applicable to read-out integrated circuit (ROIC) substrate of the uncooled microbolometer with low processing temperature.

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References

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