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http://dx.doi.org/10.4313/JKEM.2014.27.4.226

Structural Properties of Nickel Manganite Thin Films Fabricated by Metal Organic Decomposition  

Lee, Kui Woong (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Jeon, Chang Jun (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Jeong, Young Hun (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Yun, Ji Sun (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Nam, Joong Hee (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Cho, Jeong Ho (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Paik, Jong Hoo (Intelligent Electronic Component Team, Korea Institute of Ceramic Engineering and Technology)
Yoon, Jong-Won (Department of Advanced Materials Science and Engineering, Dankook University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.27, no.4, 2014 , pp. 226-231 More about this Journal
Abstract
Thin thermistor films of solutions with nickel and manganese oxides were prepared by metal-organic decomposition (MOD). The structural properties of the thin films were investigated as a function of annealing temperature. Field emission scanning electron microscope (FE-SEM) results indicated that the thin films had a thin thickness, smooth and dense surface. The crystallization temperature of $414.9^{\circ}C$ was confirmed from thermogavimetric-differential thermal analysis (TG-DTA) curve. A single phase of cubic spinel structure was obtained for the thin film annealed from $700^{\circ}C$ to $800^{\circ}C$, which was confirmed from the X-ray diffraction (XRD). From the selected area electron diffraction (SAED) in high resolution transmission electron microscope (HRTEM), the nano grains (2~3 nm) of spinel phase with (311) and (222) planes were detected for the thin film annealed at $500^{\circ}C$, which could be applicable to read-out integrated circuit (ROIC) substrate of the uncooled microbolometer with low processing temperature.
Keywords
Metal-organic decomposition; Spin-coating; Microbolometer; Nickel manganite;
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