• KSTLE International Journal
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• 제8권2호
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• pp.26-28
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• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• Applied Science and Convergence Technology
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• 제25권5호
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• pp.98-102
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• 2016

The level set method has recently become popular in the simulation of semiconductor processes such as etching, deposition and photolithography, as it is a highly robust and accurate computational technique for tracking moving interfaces. In this research, full three-dimensional level set simulation has been developed for the investigation of focused ion beam processing. Especially, focused ion beam induced nanodot formation was investigated with the consideration of three-dimensional distribution of redeposition particles which were obtained by Monte-Carlo simulation. Experimental validations were carried out with the nanodots that were fabricated using focused $Ga^+$ beams on Silicon substrate. Detailed description of level set simulation and characteristics of nanodot formation will be discussed in detail as well as surface propagation under focused ion beam bombardment.

• 한국진공학회지
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• 제4권S1호
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• pp.130-137
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• 1995

Deopsition of thermal quality SiO2 using a high density plasma ECR CVD process has been demonstrated to give void and seam free gap fill of high aspect ratio metallization structures with a simple oxygen-silane chemistry. This is achieved by continuous sputter etching of the film during the deposition process. A two-step process is utilized to deposit a composite layer for higher manufacturing efficiency. The first step, which has a deposition rate of approximately 0.5 $\mu$m/min., is used to provide complete gap fill between the metal lines. The second step, which has a deposition rate of up to 1.5 $\mu$m/min., is used to deposit a total thickness of 2.0$\mu$m for the intermetal dielectric film. The topography of this composite film is very compatible with subsequent chemicl mechanical polishing(CMP) planarization processing.

• 대한소아치과학회지
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• 제33권4호
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• pp.597-605
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• 2006

교합면 치아우식증을 예방하기 위한 가장 보편적이면서 효과적인 방법으로 치면열구전색술이 소개되었다. 치면열구전색재의 도포시 열구내 유기물, 치태, 법랑질 잔사 등을 제거하여 전색재의 유지율을 증가시키고자 하는 여러 가지 방법들이 소개되고 있다. 최근 Er:YAG 레이저가 새로운 법랑질 표면처리방법으로 소개되고 있는데 이것이 기존의 다른 방법들과 비교하여 더 나은 결과를 보이는지 연구해보고자 하였다. 첫 번째 실험으로 Er:YAG 레이저 조사시 산부식과 유사한 형태를 보이는 조사 조건을 알아보고자 하였다. 또한 이를 기초로 하여 법랑질 표면처리방법으로 전통적인 산부식 방법만을 시행한 경우(1군), 기계적 삭제방법인 열구성형술(Fissurotomy)을 시행한 경우(2군), Er:YAG 레이저만 조사한 경우(3군), Er:YAG 레이저 조사 후 산부식을 시행(4군)한 경우로 나누어 전색재를 도포하고 미세누출 정도를 평가하여 다음과 같은 결과를 얻었다. 1. 주사전자현미경사진에서 100mJ, 5Hz Er :YAG 레이저로 조사시 산부식과 유사한 양상을 관찰할 수 있었다. 2. 기계적 삭제방법이 산부식만 시행한 경우에 비해 더 낮은 미세 누출을 보였으나 통계학적 유의성을 보이지는 않았다(p<0.05). 3. 산부식을 시행한 경우보다 레이저를 조사한 후 산부식을 시행한 경우가 더 낮은 미세누출을 보였다.

• 비파괴검사학회지
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• 제24권6호
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• pp.573-580
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• 2004

본 연구는 cMUT 제작을 위한 미세공정기술을 개발하기 위하여 수행되었다. 이를 위하여 외국의 관련 제조공정 연구결과들을 분석하였다. cMUT 제작의 주요 공정인 미소 진동 박막 형성, 희생층 형성, 식각 공정에 대한 실험을 수행하여 적절한 공정조건을 찾고자 하였다. 각 제작 공정조건들을 변화시켜 가면서 증착된 실리콘 질화막의 두께, 균일도, 잔류응력을 측정하였다. 희생층으로서 실리콘 산화막의 공정조건을 변화시켜 가면서 산화막의 성장률을 분석하였다. 마지막으로 희생층 식각을 위한 최적 식각공정을 얻기 위한 실험을 수행하였다. 본 연구에서 얻어진 주요 미세공정 조건은 추후 cMUT 제작에 적용될 예정이다.

• 대한치과교정학회지
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• 제29권4호
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• pp.445-456
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• 1999

최근에는 교육수준의 향상, 소득증대, 대중매체의 발달 등으로 인하여 성인 교정환자의 수요가 상당히 증가하고 있다. 성인환자는 어린환자에 비해 상대적으로 구강내 도재수복물을 장착하고 있는 경우가 많아 도재치에 대한 교정용 브라켓의 직접접착의 기회도 증가하고 있다. 자연치에서는 법랑질을 산부식하여 비교적 쉽게 접착력을 증진시킬 수 있으나 도재치에서는 임상에서 브라켓이 너무 쉽게 탈락하거나 오히려 도재파절의 위험성이 존재하여 도재치에 대한 효과적인 직접접착법에 대하여 관심을 갖게 되었다. 그러나, 이러한 접착효율에 대한 다양한 연구가 있었으나 아직 정설로 받아들여지는 것은 없는 실정이다. 본 연구는 임상에서 비교적 간단히 이용할 수 있는 몇 가지 방법을 in vitro 상의 실험을 통하여 그 결과를 비교검토하여 효과적인 방법을 제시하고자 시행되었다. 우선 장석형 도재인 Ceramco II로 도재 시편을 제작하였다. 도재의 표면처리방법은 Glazing한 도재 자체를 사용하기 위해서는 무처리하였으며, 거칠기를 부여하기위해서는 불화수소산으로 산부식하거나 Microetcher II로 Sandblasting, 또는 불화수소산과 Sandblasting을 복합처리하였다. 접착레진은 화학중합형 인 Ortho-two와 광중합형인 Transbond를 사용하였다 모든 시편에는 도재 프라이머를 도포하였다. 실험군은 7가지 군으로 나누어 브라켓의 전단강도를 측정하였다. 1. 도재의 표면처리에 대한 비교에서 Ortho-two군내에서는 불화수소산이나 sandblasting으로 표면거칠기를 부여한 군이 무처리군에 비해 높은 전단강도를 갖는다. Transbond군내에서는 각각의 표면처리에 따른 유의성있는 차이가 없었다. 2. 불화수소산이나 Sandblasting처리군에서는 화학중합형 레진인 Ortho-two가 광중합형 레진인 Transbond보다 높은 전단강도를 갖는다. 3. 도재 파절율의 비교에서는 무처리군이 표면거칠기를 부여한 군에 비해 매우 낮은 파절율 갖는다. 4. E(Transbond+Intact)군의 평균전단강도는 134.4kg/$cm^2$ 로 본 실험군중 가장 낮은 것으로 나타났다. 이것은 선학들이 제안한 임상적용가능 전단강도보다 크므로 7가지군 모두 임상적으로 교정력을 가하기 에 충분한 전단강도를 갖는다. 그러나, 도재의 파절율을 고려해볼 때 파절율이 상대적으로 낮은 무처리군이 임상적으로 더 효과적일 것으로 사료된다.

• 한국초전도ㆍ저온공학회논문지
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• 제22권3호
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• pp.7-12
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• 2020

Electromechanical properties of REBCO CC tapes are known to be limited by defects (cracks) that form in the brittle REBCO layer. These defects could be inherently acquired during the CC tapes' manufacturing process, such as slitting, and which can be initiated at the CC tapes' edges. If propagated and long enough, they are believed to cause critical current degradation and can substantially decrease the delamination strength of CC tapes. Currently, commercially available CC tapes from various manufacturers utilize different growth techniques for depositing the REBCO layers on the substrates in their CC tapes preparation. Their epitaxial techniques, unfortunately, cannot perfectly avoid the formation of particles, in which sometimes acts as current blocking defects, known as outgrowths. Collective research regarding the composition, size, and formation of these particles for various CC tapes with different deposition techniques are particularly uncommon in a single study. Most importantly, these particles might interact in one way or another to the existing cracks. Therefore, systematic investigation on the interactions between the cracks' development mechanism and particles on the REBCO superconducting layers of practical CC tapes are of great importance, especially in the design of superconducting devices. Here, a proper etching process was employed for the CC tapes to expose and observe the REBCO layers, clearly. The scanning electron microscope, field emission scanning microscope, and energy-dispersive x-ray spectroscopy were utilized to observe the interactions between cracks and particles in various practical CC tapes. Particle compositions were identified whether as non-superconducting or superconducting and in what manner it interacts with the cracks were studied.

• 한국염색가공학회지
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• 제27권1호
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• pp.18-26
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• 2015

para-aramid fibers were treated by atmosphere air plasma to improve the interfacial adhesion. The wettability of plasma-treated aramid fiber was observed by means of dynamic contact angle surface free energy measurement. Surface roughness were investigated with the help of scanning electron microscopy and atomic force microscopy. The tensile test of aramid fiber roving was carried out to determine the effect of plasma surface treatments on the mechanical properties of the fibers. A pull-out force test was carried out to observe the interfacial adhesion effect with matrix material. It was found that surface modification and a chemical component ratio of the aramid fibers improved wettability and adhesion characterization. After oxygen plasma, it was indicated that modified the surface roughness of aramid fiber increased mechanical interlocking between the fiber surface and vinylester resin. Consequently the oxygen plasma treatment is able to improve fiber-matrix adhesion through excited functional group and etching effect on fiber surface.

• 대한기계학회논문집A
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• 제26권3호
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• pp.428-435
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• 2002

Pyroelectric $Pb(Zr_{0.3}Ti_{0.7})O_3$ (PZT30/70) thin film IR detectors has been fabricated and characterised. The PZT30/70 thin film was deposited onto $Pt/Ti/Si_3N_4/SiO_2/Si$ substrate by the sol-gel process. Four different substrate conditions were studied for their effects on the pyroelectric responses of the IR detectors. The substrate conditions were the combinations of the Si etching and the Pt/Ti patterning. In the Si etched substrate, the $Si_3N_4/SiO_2$ composite layer was used as silicon etch-stop, and was used as the membrane to support the PZT pyroelectric film element as well. The measured pyroelectric current and voltage responses of detectors fabricated on the micro-machined thin $Si_3N_4/SiO_2$ membrane were two orders higher than those of the detectors on the bulk-silicon. For detectors on the membrane substrate, the Pt/Ti patterned detectors showed a 2-times higher pyroelectric response than that of not-patterned detectors. On the other hand, the pyroelectric response of the detectors on the not-etched Si substrate was almost the same, regardless of the Pt/Ti patterning. It was also found that the rise time strongly depended on the substrate thickness: the thicker the substrate was, the longer the rise-time.

• 치위생과학회지
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• 제18권1호
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• pp.42-49
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• 2018

The computer-aided design/computer-aided manufacturing (CAD/CAM) system was introduced to shorten the production time of all-ceramic restorations and the number of patient visits. Among these types of ceramic for dental CAD/CAM, they have been processed into inlay, onlay, and crown shapes using leucite-reinforced glass-ceramics to improve strength. The purpose of this study was to observe the mechanical properties and microstructure of leucite-reinforced glass-ceramics for dental CAD/CAM. Two types of leucite-reinforced glass-ceramic blocks (IPS Empress CAD, Rosetta BM) were prepared with diameter of 13 mm and thickness of 1 mm. Biaxial flexural testing was conducted using a piston-on-three-ball method at a crosshead speed of 0.5 mm/min. Weibull statistics were used for the analysis of biaxial flexural strength. Fracture toughness was obtained using an indentation fracture method. Specimens were observed by field emission scanning electron microscopy to examine the microstructure of the leucite crystalline phase after acid etching with 0.5% hydrofluoric acid aqueous solution for 1 minute. The results of strength testing showed that IPS Empress CAD had a mean value of $158.1{\pm}8.6MPa$ and Rosetta BM of $172.3{\pm}8.3MPa$. The fracture toughness results showed that IPS Empress CAD had a mean value of $1.28{\pm}0.19MPa{\cdot}m^{1/2}$ and Rosetta BM of $1.38{\pm}0.12MPa{\cdot}m^{1/2}$. The Rosetta BM sample exhibited higher strength and fracture toughness. Moreover, the crystalline phase size and ratio were increased in the Rosetta BM sample. The above results are expected to elucidate the basic mechanical properties and crystal structure characteristics of IPS Empress CAD and Rosetta BM. Additionally, they will help develop leucite-reinforced glass-ceramic materials for CAD/CAM.