• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.12
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• pp.1857-1863
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• 2010

We present the fabrication and characterization of transparent carbon nanotube film (CNF) piezoresistors. CNFs were fabricated by vacuum filtration methods with 65?92% transmittance and patterned on Au-deposited silicon wafer by photolithography and dry etching. The patterned CNFs were transferred onto poly-dimethysiloxane (PDMS) using the weak adhesion property between the silicon wafer and the Au layer. The transferred CNFs were confirmed to be piezoresistors using the equation of concentrated-force-derived resistance change. The gauge factor of the CNFs was measured to range from 10 to 20 as the resistance of the CNFs increased with applied pressure. In polymer microelectromechanical systems, CNF piezoresistors are the promising materials because of their high sensitivity and low-temperature process.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1101-1106
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• 2014

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.2
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• pp.173-178
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• 2012

Currently, active research is being performed on printing of electronic devices such as RFID devices, flexible displays, solar cells, and e-paper. This technique has several advantages over existing technologies such as lithography and etching. In particular, RFID devices, flexible displays, solar cells, and e-paper require flexibility and a mass production system. Thus, attention is being focused on the roll-to-roll process. High quality should be guaranteed in the roll-to-roll printed electronics systems, and good thickness and roughness qualities must be ensured. Experimental design was applied to this problem to analyze the main effects and interaction effects of various factors. Matching technology between the nip roll characteristics and the quality of the print pattern in roll-to-roll printed electronics systems was proposed to improve the printing quality.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2171-2176
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• 2007

The 3-omega (3-${\omega}$) method is utilized to measure the thermal conductivity of nanofluids. A metal line heater on a silicon nitride membrane bridge structure is microfabricated by a bulk silicon etching method. Localized measurement of the thermal conductivity within the nanofluids droplet is possible by the fabricated 3-${\omega}$ sensor. Time varying AC temperature amplitudes and thermal conductivities are measured to check the stability of the nanofluids containing multi-wall carbon nanotubes (MWCNTs). Stabilities of MWCNT nanofluids prepared with different chemical treatments are compared. Acid treated MWCNT showed best dispersion stability in water while MWCNTs dispersed in water with surfactants such as Gum Arabic and Sodium dodecyl benzene sulfate showed clear sign of gravity dependence.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2001.10a
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• pp.200-203
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• 2001

Micromolding methods such as micro-injection molding and micro-compression molding are most suitable for mass production of plastic micro-optics with low cost. In this study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements(DOEs) with various grating patterns, were fabricated using micro-compression molding process. The mold inserts were made by ultrapricision mechanical machining and silicon etching. A micro compression molding system was designed and developed. Polymer powders were used as molded materials. Various defects found during molding were analyzed and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Mim lenses of hemispherical shape with $250{\mu}m$ diameter were fabricated. The blazed and 4 stepped DOEs with $24{\mu}m$ pitch and $5{\mu}m$ depth were also fabricated. Optical and geometrical properties of plastic molded parts were tested by interferometric technique.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.909-914
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• 2001

Fluid properties which are most commonly used to evaluate spray atomization characteristics, are important because they affect velocity and size distribution of droplets. The purpose of this study was to incorporate the significant characteristics in atomization process of industrial etching spray and how each of them affects the design of precise pressure-swirl nozzles. The experiment was carried out with different viscosity and density of fluid. The macro characteristics of liquid spray, such as the spray angle and shape were captured by PMAS and the micro characteristics of liquid spray, such as droplet size and velocity were obtained by PDA. The mean velocity and SMD of droplets were measured along axial and radial direction. It was found that the higher viscosity and density resulted in the larger SMD and the lower mean velocity of droplets.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.956-959
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• 2002

In this work, a new non-lithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photo-lithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.11
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• pp.228-233
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• 2002

In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

• Journal of the korean academy of Pediatric Dentistry
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• v.10 no.1
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• pp.77-83
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• 1983

The purpose of this study was to observe the microleakage of a pit and fissure sealant at the tooth-restoration interface. One hundred and sixty-seven extracted permanent and deciduous teeth were used and some simple mechanical pretreatment were done before etching. The degree of microleakage was assessed by $Ca^{45}$ after 24 hours, and 2 months. The results were as follows: 1. Among total 167 teeth, 53 teeth (32%) were demonstrated the microleakage. 2. After 2 months the leakage was increased from 22 percent to 35 percent in permanent teeth, and from 32 percent to 43 percent in primary teeth. 3. The group treated by fluoride paste was demonstrated the largest leakage, 50 percent in primary teeth and 33 percent in permanent teeth. There are more leakage in primary teeth (38%) than permanent teeth (28%).

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1069-1072
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• 2003

Ultraviolet-nanoimprint lithography (UV-NIL) is a promising nanoimprint method for cost-effectively defining nanometer scale structures at room temperature and low pressure. Nanostamp fabrication technology is a key technology for UV-NIL because fabricating a high resolution nanostamp is the first step for defining high resolution nanostructures in a substrate. We used quartz as an UV transparent stamp material for the UVNIL. A $5{\times}5{\times}0.09$ inch stamp was fabricated using the quartz etch process in which Cr film was used as a hard mask for transferring nanostructures into the quartz. In this paper, we describe the quartz etching process and discuss the results including SEM images.