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http://dx.doi.org/10.7736/KSPE.2014.31.12.1101

Alignment Algorithm for Nano-scale Three-dimensional Printing System  

Jang, Ki-Hwan (Department of Mechanical and Aerospace Engineering, Seoul National University)
Lee, Hyun-Taek (Department of Mechanical and Aerospace Engineering, Seoul National University)
Kim, Chung-Soo (Department of Mechanical and Aerospace Engineering, Seoul National University)
Chu, Won-Shik (Institute of Advanced Machines and Design, Seoul National University)
Ahn, Sung-Hoon (Department of Mechanical and Aerospace Engineering, Seoul National University)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.12, 2014 , pp. 1101-1106 More about this Journal
Abstract
Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.
Keywords
Nano-scale 3D Printing; Micro/Nano-scale structuring; Alignment Algorithm; NPDS; FIB;
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Times Cited By KSCI : 1  (Citation Analysis)
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