Fabrication and Characterization of Transparent Piezoresistors Using Carbon Nanotube Film |
Lee, Kang-Won
(Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Lee, Jung-A (Advanced Technology Division, Korea Institute of Standards and Science) Lee, Kwang-Cheol (Advanced Technology Division, Korea Institute of Standards and Science) Lee, Seung-Seob (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) |
1 | Wu, Z., Chen, Z., Du, X., Logan, J. M., Sippel, J., Nikolou, M., Kamaras, K., Reynolds, J. R., Tanner, D. B., Hebard, A. F. and Rinzler, A. G., 2004, “Transparent and Conductive Carbon Nanotube Films,” Science, Vol. 305, pp. 1273-1276. DOI ScienceOn |
2 | Allen, A., Sunden, E., Cannon, A., Graham, S. and King, W., 2006, “Nanomaterial Transfer Using Hot Embossing for Flexible Electronic Devices,” Appl. Phys. Lett., Vol. 88, pp. 083112. DOI ScienceOn |
3 | Zhou, Y., Hu, L. and Gruner, G., 2006, “A Method of Printing Carbon Nanotube Thin Films,” Appl. Phys. Lett., Vol. 88, pp. 123109. DOI ScienceOn |
4 | Giovanni, M. D., 1982, Flat and Corrugated Diaphragm Design Handbook, Marcel Dekker, USA, pp. 157-177. |
5 | Toriyama, T. and Sugiyama, S., 2002, “Analysis of Piezoresistance in p-Type Silicon for Mechanical Sensors,” J. MEMS, Vol. 11, No. 5, pp. 598-604. DOI ScienceOn |
6 | Engel, J., Chen, J. and Liu, C., 2003, “Development of Polyimide Flexible Tactile Sensor Skin,” J. Micromech. Microeng., Vol. 13, pp. 359-366. DOI ScienceOn |
7 | Beeby, S., Ensell, G., Kraft, M. and White, N., 2004, MEMS Mechanical Sensors, Artech House, United Kingdom, pp. 113-151. |
8 | Tong, J., Priebe, M. and Sun, Y., 2007, “Carbon Nanotube Based Strain Sensing Cantilevers,” In Proc. of 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2007), pp. 843-846. |
9 | Stampfer, C., Helbling, T., Obergfell, D., Schoberle, B., Tripp, M., Jungen, A., Roth, S., Bright, V. and Hierold, C., 2006, “Fabrication of Single-Walled Carbon Nanotube Based Pressure Sensors,” Nano Lett., Vol. 6, No. 2, pp. 233-237. DOI ScienceOn |
10 | Fung, K. M., Zhang, Q. H., Chan, H. M. and Li, J., 2005, “A PMMA Based Micro Pressure Sensor Chip Using Carbon Nanotubes as Sensing Elements,” In: Proc. of 18th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2005), pp. 251-254. |
11 | Gao, B., Yue, G. Z., Qui, Q., Cheng, Y., Shimoda, H., Fleming, L. and Zhou, O., 2001, “Fabrication and Electron Field Emission Properties of Carbon Nanotube Films by Electrophoretic Deposition,” Adv. Mater., Vol. 13, No. 23, pp. 1770-1773. DOI ScienceOn |
12 | Sreekumar, T., Liu, T., Kumar, S., Ericson, L., Hauge, R. and Smalley, R. E., 2003, “Single-Wall Carbon Nanotube Films,” Chem. Matt., Vol. 15, No. 1, pp. 175-178. DOI ScienceOn |
13 | Kim, Y., Minami, N., Zhu, W., Kazaoui, S., Azumi, R. and Matsumoto, M., 2003, “Langmuir-Blodgett Films of Single-Wall Carbon Nanotubes,” Jpn. J. Appl. Phys., Vol. 42, No. 12, pp. 7629-7634. DOI |
14 | Meitl, M., Zhou, Y., Gaur, A., Jeon, S., Usrey, M., Strano, M. and Rogers, J., 2004, “Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films,” Nano Lett., Vol. 4, No. 9, pp. 1643-1647. DOI ScienceOn |