Browse > Article
http://dx.doi.org/10.3795/KSME-A.2010.34.12.1857

Fabrication and Characterization of Transparent Piezoresistors Using Carbon Nanotube Film  

Lee, Kang-Won (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Lee, Jung-A (Advanced Technology Division, Korea Institute of Standards and Science)
Lee, Kwang-Cheol (Advanced Technology Division, Korea Institute of Standards and Science)
Lee, Seung-Seob (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.34, no.12, 2010 , pp. 1857-1863 More about this Journal
Abstract
We present the fabrication and characterization of transparent carbon nanotube film (CNF) piezoresistors. CNFs were fabricated by vacuum filtration methods with 65?92% transmittance and patterned on Au-deposited silicon wafer by photolithography and dry etching. The patterned CNFs were transferred onto poly-dimethysiloxane (PDMS) using the weak adhesion property between the silicon wafer and the Au layer. The transferred CNFs were confirmed to be piezoresistors using the equation of concentrated-force-derived resistance change. The gauge factor of the CNFs was measured to range from 10 to 20 as the resistance of the CNFs increased with applied pressure. In polymer microelectromechanical systems, CNF piezoresistors are the promising materials because of their high sensitivity and low-temperature process.
Keywords
Carbon Nanotube Film; Transparent Piezoresistors; Wafer Transfer Methods;
Citations & Related Records

Times Cited By SCOPUS : 0
연도 인용수 순위
  • Reference
1 Wu, Z., Chen, Z., Du, X., Logan, J. M., Sippel, J., Nikolou, M., Kamaras, K., Reynolds, J. R., Tanner, D. B., Hebard, A. F. and Rinzler, A. G., 2004, “Transparent and Conductive Carbon Nanotube Films,” Science, Vol. 305, pp. 1273-1276.   DOI   ScienceOn
2 Allen, A., Sunden, E., Cannon, A., Graham, S. and King, W., 2006, “Nanomaterial Transfer Using Hot Embossing for Flexible Electronic Devices,” Appl. Phys. Lett., Vol. 88, pp. 083112.   DOI   ScienceOn
3 Zhou, Y., Hu, L. and Gruner, G., 2006, “A Method of Printing Carbon Nanotube Thin Films,” Appl. Phys. Lett., Vol. 88, pp. 123109.   DOI   ScienceOn
4 Giovanni, M. D., 1982, Flat and Corrugated Diaphragm Design Handbook, Marcel Dekker, USA, pp. 157-177.
5 Toriyama, T. and Sugiyama, S., 2002, “Analysis of Piezoresistance in p-Type Silicon for Mechanical Sensors,” J. MEMS, Vol. 11, No. 5, pp. 598-604.   DOI   ScienceOn
6 Engel, J., Chen, J. and Liu, C., 2003, “Development of Polyimide Flexible Tactile Sensor Skin,” J. Micromech. Microeng., Vol. 13, pp. 359-366.   DOI   ScienceOn
7 Beeby, S., Ensell, G., Kraft, M. and White, N., 2004, MEMS Mechanical Sensors, Artech House, United Kingdom, pp. 113-151.
8 Tong, J., Priebe, M. and Sun, Y., 2007, “Carbon Nanotube Based Strain Sensing Cantilevers,” In Proc. of 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2007), pp. 843-846.
9 Stampfer, C., Helbling, T., Obergfell, D., Schoberle, B., Tripp, M., Jungen, A., Roth, S., Bright, V. and Hierold, C., 2006, “Fabrication of Single-Walled Carbon Nanotube Based Pressure Sensors,” Nano Lett., Vol. 6, No. 2, pp. 233-237.   DOI   ScienceOn
10 Fung, K. M., Zhang, Q. H., Chan, H. M. and Li, J., 2005, “A PMMA Based Micro Pressure Sensor Chip Using Carbon Nanotubes as Sensing Elements,” In: Proc. of 18th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2005), pp. 251-254.
11 Gao, B., Yue, G. Z., Qui, Q., Cheng, Y., Shimoda, H., Fleming, L. and Zhou, O., 2001, “Fabrication and Electron Field Emission Properties of Carbon Nanotube Films by Electrophoretic Deposition,” Adv. Mater., Vol. 13, No. 23, pp. 1770-1773.   DOI   ScienceOn
12 Sreekumar, T., Liu, T., Kumar, S., Ericson, L., Hauge, R. and Smalley, R. E., 2003, “Single-Wall Carbon Nanotube Films,” Chem. Matt., Vol. 15, No. 1, pp. 175-178.   DOI   ScienceOn
13 Kim, Y., Minami, N., Zhu, W., Kazaoui, S., Azumi, R. and Matsumoto, M., 2003, “Langmuir-Blodgett Films of Single-Wall Carbon Nanotubes,” Jpn. J. Appl. Phys., Vol. 42, No. 12, pp. 7629-7634.   DOI
14 Meitl, M., Zhou, Y., Gaur, A., Jeon, S., Usrey, M., Strano, M. and Rogers, J., 2004, “Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films,” Nano Lett., Vol. 4, No. 9, pp. 1643-1647.   DOI   ScienceOn