• Proceedings of the Computational Structural Engineering Institute Conference
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• 2011.04a
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• pp.307-310
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• 2011

본 연구에서는 항만 구조물의 구조건전성 모니터링을 위한 Imote2 센서 플랫폼 기반의 스마트 무선센서의 적용성을 평가하였다. 이를 위해 먼저, 고민감도 MEMS 가속도계를 탑재한 Imote2 센서 플랫폼 기반스마트 무선센서를 설계하였다. 둘째, 스마트 무선센서노드의 독자적인 구조 상태 모니터링을 위한 내장소프트웨어를 설계하였다. 마지막으로, 모형 케이슨 구조물의 진동실험을 통해 개발된 스마트 무선센서의 성능을 검증하였다.

• 한국방재학회:학술대회논문집
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• 2010.02a
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• pp.77.1-77.1
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• 2010

본 연구에서는 가속도기반 무선센서노드와 MEMS 가속도계 센서를 이용하여 철도교량의 구조건전성모니터링 기법들의 성능을 검토하였다. 이를 위해 다음과 같은 세 단계의 연구가 수행되었다. 첫째, 저가형 가속도기반 무선센서노드를 설계하였다. 둘째, 철도교량의 구조건전성모니터링을 위한 진동특성 및 건전성평가기법을 선정하였다. 마지막으로, 모형 강판형교에 대한 진동실험을 통해 개발된 가속도기반 무선센서노드의 성능을 평가하고 일련의 손상 시나리오를 대상으로 건전성평가 기법의 성능을 검토하였다. 시간영역 기법인 AR 모델과 주파수영역 기법인 파워스펙트럼 상관계수가 강판형교 구조손상 모니터링에 높은 정확도를 보였다.

• JSTS:Journal of Semiconductor Technology and Science
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• v.16 no.3
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• pp.367-374
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• 2016

This paper presents an electro-thermal modeling of an amorphous silicon (a-Si) uncooled microbolometer. This modeling provides a comprehensive solution for simulating the electro-thermal characteristics of the fabricated microbolometer and enables electro-thermal co-simulation between MEMS and CMOS integrated circuits. To validate this model, three types of uncooled microbolometers were fabricated using a post-CMOS surface micromachining process. The simulation results show a maximum discrepancy of 2.6% relative to the experimental results.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2369-2371
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• 2005

MEMS 기술을 이용하여 마이크로 $H_2$ 가스센서를 제작하고 마이크로 히터의 열적 특성과 $H_2$ 가스 농도 변화에 따를 마이크로 가스센서에 대한 감도를 분석하였다. 마이크로 가스센서의 전압 인가에 따른 히터의 온도는 1.0V에서 $250-280^{\circ}C$의 고온 특성을 보였으며, 동작온도 $250^{\circ}C$에서 $H_2$ 가스는 $SnO_2/V_2O_5/Pd$의 감응물질을 도포한 센서의 반응이 우수한 특성을 확인하였다. 동작 온도 $250^{\circ}C$ $H_2$ 농도 5000ppm의 조건에서 $SnO_2/V_2O_5/Pd$의 감응물질을 도포한 가스센서에서 $H_2$ 흡착 반응 시간은 3sec이 탈착 반응 시간은 8-10sec의 결과를 보였다.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.308-312
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• 2005

We present a microfluidic chip designed for the detection of antibody by using quantum dots fluorescence and a microbead-based assay. A custom designed PDMS microfluidic chip with multi-layer channel is utilized for capturing microbeads; antibody injection into each micro-well; QD injection; and fluorescence detection. The experiment using the fabricated microfluidic chip has been performed on solutions with various concentrations of antibody and has shown correlated fluorescent intensities.

• Journal of Sensor Science and Technology
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• v.15 no.4
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• pp.245-250
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• 2006

In this paper, glass cap wafer for MEMS device package is fabricated by using sand blaster dry etcher and Its surface is studied. The surface of dry etched glass is analyzed by using SEM, and many glass particles and micro cracks are observed. If these kind of particles were dropped from glass to the surface of device, It would make critical failure to the operation of device. So, several cleaning and etching methods are induced to remove these kinds of dormant failure mode and optimized condition is found out.

• Journal of Sensor Science and Technology
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• v.13 no.1
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• pp.72-77
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• 2004

In this paper, we fabricated an apparatus of the electro-chemical discharge drilling for boring narrow through-hole into a glass. In the electrolyte, electro-chemical discharge creates high temperature condition by the electro-discharge energy. Therefore, glass are removed by the accelerated chemical reaction with glasses and chemicals in the high temperature condition. For optimization of the electro-chemical discharge drilling, the process condition was studied experimentally as a function of the electrolyte concentration, supply voltage and process time. The optimum condition was from DC25V to DC30V of applied voltage, 35 wt% NaOH solution.

• Proceedings of the KIEE Conference
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• 2004.05a
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• pp.120-122
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• 2004

Wearable input device that can make free-space typewriting possible is introduced. We named this device as $SCURRY^{TM}$. To measure the angular velocity of hand and the acceleration rates at the ends of fingers, we buried MEMS inertial sensors in this keyboard. We processed sensor signals to get the information on hand movement and finger-click motion. With this signal processing, apparent finger movements were depicted over the virtual keyboard shown on output device of a target computing system. In this paper, a finger-click recognition method is proposed to improve the recognition performance for finger clicking of $SCURRY^{TM}$. The proposed method is composed of three parts including feature extraction part, valid click part, and cross-talk avoidance part. The experiments were conducted to verify the effectiveness and efficiency of the proposed algorithms.

• Journal of the Korean Society of Mechanical Technology
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• v.13 no.4
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• pp.93-99
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• 2011

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

• Journal of Biomedical Engineering Research
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• v.42 no.4
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• pp.193-200
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• 2021

Flowmeter and oxygen sensors are listed in COVID-19 essential medical devices. This article reports a Teensy microcontroller-based Oxygen mass flow controller (MFC), core part of the oxygen respirator or extracorporeal membrane oxygenation (ECMO). The developed MFC consisting of the microcontroller, MEMS flow sensor, and solenoid valve was able to accurately control 0 to 100 sccm of oxygen flow rate. The pressure of vacuum chamber increased proportionally to the flow rate (0.998 of Pearson correlation coefficient). The experimental results proved that the developed MFC exhibits comparable performance to a commercial MFC in accuracy, settling time, linearity with pressure, and repeatability of oxygen mass flow control. It is expected that this simple and cheap MFC is utilized for oxygen therapy against the severe acute respiratory syndrome coronavirus 2.