센서학회지 (Journal of Sensor Science and Technology)

  • 제13권1호
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  • Pages.72-77
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  • 2004
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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전해 방전법을 이용한 유리 미세 구멍가공

Micro-hole Fabrication of Glass Using Electro-chemical Discharge Method

  • 이왕훈 (안동대학교 대학원 전자공학과) ;
  • 이영태 (안동대학교 정보전자공학교육과)
  • 발행 : 2004.01.30
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초록

In this paper, we fabricated an apparatus of the electro-chemical discharge drilling for boring narrow through-hole into a glass. In the electrolyte, electro-chemical discharge creates high temperature condition by the electro-discharge energy. Therefore, glass are removed by the accelerated chemical reaction with glasses and chemicals in the high temperature condition. For optimization of the electro-chemical discharge drilling, the process condition was studied experimentally as a function of the electrolyte concentration, supply voltage and process time. The optimum condition was from DC25V to DC30V of applied voltage, 35 wt% NaOH solution.

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참고문헌

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