Study of sand blaster dry etched glass wafer surface for micro device package |
Kim, Jong-Seok
(Department of Micro/Nano system, Korea University)
Nam, Kwang-Woo (Samsung Advanced Institute of Technology) Choa, Sung-Hoon (Samsung Advanced Institute of Technology) Kwon, Jae-Hong (School of Electrical Engineering, Korea University) Ju, Byeong-Kwon (School of Electrical Engineering, Korea University) |
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