• Journal of Sensor Science and Technology
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• v.24 no.5
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• pp.287-290
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• 2015

Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1536-1540
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• 1997

Recently, many advanced technologies in electronics, mechanics, material and computer science have been applied to medictine and they have changed the method of diagnosis and treatment to more quantitative way than before. Now day, with the aid of this technology, the device for the minimal invasive diagnosis and treatment is being developed for the convenience and safety of patients. this paper introduces application of senso and MEMS(Micro Electro Mechnical System) in medicine and biotechnology, which are essential factor for the realization of minimal invasive diagnosis and treatment.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.4
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• pp.905-912
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• 2011

Interaocular pressure (IOP) sensor and external coil to detect the resonance frequency of the IOP sensor are designed and implemented using MEMS technology. The IOP sensor is designed using 3-D electromagnetic (EM) simulation. The resonance frequency of IOP sensor needs to be lower than that of the external coil. Additionally, the resonance frequency of the IOP sensor needs to be located near the resonance frequency of the coil to get the sufficient amplitude of phase variation. The frequency where the phase peak appears must be constant according to the distance between the IOP sensor and the external coil. From the measurement results, we demonstrated that the designed IOP sensor has the same resonance frequency with various distances between the IOP sensor and the coil.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.130-136
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• 2010

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

• Smart Structures and Systems
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• v.5 no.6
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• pp.663-679
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• 2009

The use of Micro-Electro-Mechanical Systems (MEMS) accelerometers in geotechnical instrumentation is relatively new but on the rise. This paper describes a new MEMS-based system for in situ deformation and vibration monitoring. The system has been developed in an effort to combine recent advances in the miniaturization of sensors and electronics with an established wireless infrastructure for on-line geotechnical monitoring. The concept is based on triaxial MEMS accelerometer measurements of static acceleration (angles relative to gravity) and dynamic accelerations. The dynamic acceleration sensitivity range provides signals proportional to vibration during earthquakes or construction activities. This MEMS-based in-place inclinometer system utilizes the measurements to obtain three-dimensional (3D) ground acceleration and permanent deformation profiles up to a depth of one hundred meters. Each sensor array or group of arrays can be connected to a wireless earth station to enable real-time monitoring as well as remote sensor configuration. This paper provides a technical assessment of MEMS-based in-place inclinometer systems for geotechnical instrumentation applications by reviewing the sensor characteristics and providing small- and full-scale laboratory calibration tests. A description and validation of recorded field data from an instrumented unstable slope in California is also presented.

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Journal of Korean Association for Spatial Structures
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• v.19 no.2
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• pp.63-72
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• 2019

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.5
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• pp.455-462
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• 2016

Output Characteristics of the spaceborn image sensor such as infrared(IR) sensor are varied according to time elapses and sensor repetition on/off operation. As a result, the quality of IR sensor image is decreased. Therefore, spaceborne image sensor require a periodic calibration using a black body system by correcting a non-uniformity of the sensor. In this paper, we proposed a MEMS-based black body system that can implement the high temperature uniformity at various standard temperatures ranging from low to high temperature and easily estimate the representative surface temperature. In addition, it has advantages lightweight, low-power and high accuracy. The feasibility of the proposed MEMS-based black body system was verified through the thermal analysis.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.8
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• pp.120-125
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• 2000

This paper proposes a tilt sensor made by MEMS technology. The sensor consists of an electrode glass a small mercury drop a circular channel and a cover glass. The mercury drop is used as medium of a current flow and in contact with two circular chromel electrodes used as an angular-motion resistance When this sensor inclines the mercury drop inside the circular channel moves into the bottom under the influence of gravity. A tilt angle can be measured by changed resistance as tilting this sensor, This sensor has a linear section between +50.$^{\circ}$ and -50.$^{\circ}$ with the accuracy of 2.$^{\circ}$. We are also studying about the enlargement of the linear section and the effect of the size of the mercury drop.

• Journal of the Korea institute for structural maintenance and inspection
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• v.15 no.2
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• pp.170-178
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• 2011

In this paper, a research was performed to develop a wireless measurement system for bridge monitoring using MEMS sensor and bluetooth wireless communication module. First, in order to prove the suitability of MEMS sensor for the bridge measurement, its ranges of measuring acceleration and of frequency response were experimented. Also, the quality of wireless communication was tested by an experiment on long-distance communication for the knowledge of maximum communication distance, and also by an experiment on the data transmit-receive capability both inside and outside of a steel box bridge. Later, placing the wireless acceleration sensor system that had been developed in our lab on a bridge in public service, we acquired vibration data from the bridge under traffic load and analyzed its dynamic characteristics in realtime. For the analysis of the data, NExT & ERA algorithm were employed. The result of analysis was compared to the FE analysis of the same bridge, and the comparison made it possible to evaluate the performance of wireless acceleration sensor system. As a result, it was proven that the wireless acceleration sensor system developed with the use of MEMS sensor and bluetooth wireless communication module could be effectively applied to the measurement of structure whose vibration feature was low frequency like a bridge.