Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Micromachined Mercury Drop Tilt Sensor

MEMS 기술을 이용한 수은방울경사각센서 개발

  • Oh, Jong-Hyun ;
  • Oh, Dong-Young (Dept. of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Lee, Seung S. (Dept. of Mechanical Engineering, Pohang University of Science and Technology)
  • Published : 2000.08.01
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Abstract

This paper proposes a tilt sensor made by MEMS technology. The sensor consists of an electrode glass a small mercury drop a circular channel and a cover glass. The mercury drop is used as medium of a current flow and in contact with two circular chromel electrodes used as an angular-motion resistance When this sensor inclines the mercury drop inside the circular channel moves into the bottom under the influence of gravity. A tilt angle can be measured by changed resistance as tilting this sensor, This sensor has a linear section between +50.$^{\circ}$ and -50.$^{\circ}$ with the accuracy of 2.$^{\circ}$. We are also studying about the enlargement of the linear section and the effect of the size of the mercury drop.

Keywords

References

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