• Journal of Institute of Control, Robotics and Systems
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• v.15 no.3
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• pp.258-264
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• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• Journal of Institute of Control, Robotics and Systems
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• v.21 no.4
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• pp.315-320
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• 2015

This paper describes the implemenation of localization and visualization scheme to find out an ultrasonic source caused by defects of a power distribution line equipment. To increase the fault detection performance, $2{\times}4$ sensor array is configured with MEMS ultrasonic sensors, and from the sensor signals aquired, the azimuth and elevation angles of the ultrasonic source is estimated based on the delay-sum beam forming method. Also, to visualize the estimated location, it is marked on the background image. Experimental results show applicability of the present technique.

• International Journal of Ocean System Engineering
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• v.2 no.4
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• pp.223-232
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• 2012

For the accurate estimation of the position and orientation of a UUV (unmanned underwater vehicle), a low-cost AHRS (attitude heading reference system) was developed using a low-cost IMU (inertial measurement unit) sensor which provides information on the 3D acceleration, 3D turning rate and 3D earth-magnetic field data in the object coordinate system. The main hardware system is composed of an IMU sensor (ADIS16405) and TMS320F28335, which is coded with an extended kalman filter algorithm with a 50-Hz sampling frequency. Through an experimental gimbal device, good estimation performance for the pitch, roll, and yaw angles of the developed AHRS was verified by comparing to those of a commercial AHRS called the MTi system. The experimental results are here presented and analyzed.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1549_1550
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• 2009

본 연구에서는 적외선 가스 센서용 IR source에 대한 연구를 진행하였다. MEMS 공정을 이용하여 poly-silicon을 IR source의 발열체로 사용하였다. Chip size는 $2{\times}2mm$ 이며 membrane의 면적은 $1{\times}1mm$로 설계, 제작 하였다. 제작된 IR source의 적외선 방출 특성을 적외선 카메라를 이용하여 관찰하였으며, 같은 온도에서의 thermal stress에 대한 관찰도 진행하였다.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.98.1-98
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• 2002

In principle, a resonance type sensor generally has an oscillation characteristic. Thus, an analysis on transient oscillation response takes a great interest since it is related to the performance of resonant sensor. In particular, system bandwidth has tradeoff with oscillation accuracy, i.e. quality factor. For an efficient analysis of the oscillation characteristic, several analytic methods are introduced and summarized. The results are fundamentally based on the classical describing function method, but can explain the transient oscillation by introducing time varying concept about the predicted limit cycle. After introducing those methods, the application results to the specified system...

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.1
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• pp.24-28
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• 2005

A micromachined biochip with a three dimensional silicon chamber was developed for the construction of biosensors. Anisotropic etching was used fur the formation of the chamber on the p-type silicon wafer(100) and then was glued to the Pyrex glass bottom-substrate with pre-deposited platinum electrode. The electrochemical characterization of its Pt electrode and Ag/AgCl reference electrode was investigated.

• Proceedings of the Korean Information Science Society Conference
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• 2004.10c
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• pp.238-240
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• 2004

인간과 컴퓨터와 사물이 유기적으로 연계되어 다양하고 편리한 새로운 서비스를 제공해 주는 유비쿼터스 컴퓨팅 환경에서, 외부 환경의 감지와 제어 기능을 수행하는 센서 네트워크 기술이 최근 활발히 연구가 되고 있다. 이러한 센서 네트워크 기술은 저전력 저가격의 무선 통신 기술, 초소형 마이크로 프로세서 기술, 자동구성 이 가능한 ad-hoc 네트워크 기술, MEMS기술, 다양한 종류의 센서들과 이들의 표준화 노력, 그리고 임베디드 시스템 기술등의 발전으로 실현이 가능한 기술로서 평가되고 있다. 본 논문에서는 무선 센서 노드인 MICA2[1]와 자기장센서 HMC1002[2]를 이용하여 자기장의 변동을 감지하여 자성체의 위치를 파악하는 시스템의 설계 및 구현을 다룬다.

• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• Journal of Sensor Science and Technology
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• v.17 no.6
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Journal of Electrical Engineering and Technology
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• v.9 no.3
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• pp.950-956
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• 2014

Special purpose sensor design using MEMS (Micro-Electro-Mechanical Systems) technique is commonly used in Nondestructive Testing (NDT) research for the evaluation of existing structures and for the safety control and requirements. Various sensors and network have been developed for general infrastructures as well as safety-critical applications, e.g., aerospace, defense, and nuclear system, etc. In this paper, one of sensor technique using Fiber Bragg Gratings (FBG) and Finite Element Method (FEM) evaluation is discussed. The experimental setup and data collection technique is also demonstrated. The factors influencing test result and the advantages/limitations of this technique are also reviewed using various methods.