• 센서학회지
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• 제24권5호
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• pp.287-290
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• 2015

Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.1536-1540
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• 1997

Recently, many advanced technologies in electronics, mechanics, material and computer science have been applied to medictine and they have changed the method of diagnosis and treatment to more quantitative way than before. Now day, with the aid of this technology, the device for the minimal invasive diagnosis and treatment is being developed for the convenience and safety of patients. this paper introduces application of senso and MEMS(Micro Electro Mechnical System) in medicine and biotechnology, which are essential factor for the realization of minimal invasive diagnosis and treatment.

• 한국정보통신학회논문지
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• 제15권4호
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• pp.905-912
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• 2011

본 논문에서는 실시간 안압 모니터링을 위한 안압 센서와 안압에 따른 안압 센서의 공진 주파수를 검출 할 수 있는 외부 코일을 설계 및 구현 하였다. 안압 센서는 3-D EM 시뮬레이션을 통하여 설계 하였고, MEMS 기반 기술로 구현 되었다. 측정 결과로서, 안압 센서의 공진 주파수는 외부 코일의 공진 주파수에 비하여 낮아야 하며, 안압 센서의 공진 주파수가 외부 코일의 공진 주파수에 근접 하게 위치 할 때, 위상 변화량이 높아짐을 확인 하였다. 또한, 안압 센서는 외부 코일과의 거리에 따라 최대위상 변화가 발생하는 지점이 불변하여야 하는데, 설계된 안압 센서는 외부 코일과의 거리가 변화 할 때, 최대위상 변화량 자체는 변화 하지만, 최대위상 변화가 발생하는 지점이 동일함을 확인 하였다.

• 센서학회지
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• 제19권2호
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• pp.130-136
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• 2010

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

• Smart Structures and Systems
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• 제5권6호
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• pp.663-679
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• 2009

The use of Micro-Electro-Mechanical Systems (MEMS) accelerometers in geotechnical instrumentation is relatively new but on the rise. This paper describes a new MEMS-based system for in situ deformation and vibration monitoring. The system has been developed in an effort to combine recent advances in the miniaturization of sensors and electronics with an established wireless infrastructure for on-line geotechnical monitoring. The concept is based on triaxial MEMS accelerometer measurements of static acceleration (angles relative to gravity) and dynamic accelerations. The dynamic acceleration sensitivity range provides signals proportional to vibration during earthquakes or construction activities. This MEMS-based in-place inclinometer system utilizes the measurements to obtain three-dimensional (3D) ground acceleration and permanent deformation profiles up to a depth of one hundred meters. Each sensor array or group of arrays can be connected to a wireless earth station to enable real-time monitoring as well as remote sensor configuration. This paper provides a technical assessment of MEMS-based in-place inclinometer systems for geotechnical instrumentation applications by reviewing the sensor characteristics and providing small- and full-scale laboratory calibration tests. A description and validation of recorded field data from an instrumented unstable slope in California is also presented.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• 한국공간구조학회논문집
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• 제19권2호
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• pp.63-72
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• 2019

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

• 한국항공우주학회지
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• 제44권5호
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• pp.455-462
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• 2016

적외선 검출기와 같은 우주용 영상센서는 작동 유무 및 시간경과에 따라 센서의 응답특성이 변하기 때문에 영상품질이 저하된다. 이러한 영상센서의 비균일 응답특성을 보정하기 위하여 궤도상에서 보정용 흑체시스템을 이용하여 주기적인 보정을 실시 할 수 있도록 해야 한다. 본 논문에서는 저온에서 고온에 이르는 다양한 기준온도에서의 높은 온도균일도 확보 및 흑체의 대표표면온도 추정이 용이하고, 초경량, 저전력, 고정밀도의 흑체 시스템을 구현하기 위해 MEMS(Micro Electro Mechanical Systems)기반의 흑체시스템을 제안하였으며, 열해석을 통해 성능을 입증하였다.

• 한국정밀공학회지
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• 제17권8호
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• pp.120-125
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• 2000

This paper proposes a tilt sensor made by MEMS technology. The sensor consists of an electrode glass a small mercury drop a circular channel and a cover glass. The mercury drop is used as medium of a current flow and in contact with two circular chromel electrodes used as an angular-motion resistance When this sensor inclines the mercury drop inside the circular channel moves into the bottom under the influence of gravity. A tilt angle can be measured by changed resistance as tilting this sensor, This sensor has a linear section between +50.$^{\circ}$ and -50.$^{\circ}$ with the accuracy of 2.$^{\circ}$. We are also studying about the enlargement of the linear section and the effect of the size of the mercury drop.

• 한국구조물진단유지관리공학회 논문집
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• 제15권2호
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• pp.170-178
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• 2011

본 논문에서는 MEMS 센서와 블루투스 무선 통신 모듈을 이용하여 교량 모니터링을 위한 무선 계측 시스템 개발에 대한 연구를 수행하였다. 이를 위하여 MEMS 센서의 가속도 측정 범위 및 주파수 응답 범위 성능을 검증하기 위한 실험을 수행하여 교량 계측에 적합성 여부를 판단하였다. 실험 결과, 고성능의 압전형 가속도 센서에 비하여 동적 범위와 측정 주파수 범위의 성능은 낮으나 30Hz 미만의 저주파수 대역 측정에는 무리가 없을 것으로 판단한다. 그리고 최대 통신 거리 측정 결과, 280m정도의 성능을 가지고 있음을 확인하였다. 마지막으로 개발된 무선 가속도 센서 시스템을 공용중인 교량에 설치한 후, 교통하중에 의한 진동데이터를 획득하여 교량의 동특성을 실시간 분석하였다. 분석결과는 대상교량의 FE 해석결과와 비교를 통하여 무선 가속도 센서 시스템의 성능을 평가하였다. 실험 결과, MEMS 센서와 블루투스 무선 통신 모듈을 이용하여 개발한 무선 가속도 센서는 교량과 같은 저주파수 진동특성을 갖는 건설구조물의 계측에 효과적으로 사용할 수 잇을 것으로 판단된다.