• Journal of Institute of Control, Robotics and Systems
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• v.17 no.2
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• pp.125-130
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• 2011

This paper shows a method to design complementary filter using least square. The complementary filter is one of useful filters estimating angle. The basic concept of this filter is to enhance advantages of each sensor that angle detecting using a gyroscope has good accuracy at a high frequency and an accelerometer at a low frequency. When designing complementary filter, the most commonly used method is using cut-off frequency. However, it may be not easy to obtain a cut-off frequency. This paper presents a systematic method to determine the coefficients of the complementary filter using well-known linear least squares minimizing error between estimating angle and true angle.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.303-306
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.250-250
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ $40{\mu}m$ long cantilevers, the fundamental frequency appeared at 147.2 kHz - 856.3 kHz. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz. Therefore, polycrystalline 3C-SiC micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.141.6-141
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• 2001

This paper presents the attitude algorithm using Fuzzy technique to mix gyro information with accelerometer. The attitude angle calculated by the low-cost gyros only increases its error with time rapidly because of the integration process of the algorithm and large sensor error. It is known that the accelerometer output includes the attitude information of a vehicle and its information is more effective during low dynamic maneuver. Therefore it is needed to combine two information appropriately for obtaining the attitude information from low-cost MEMS inertial sensors. Because Fuzzy logic is very effective to make a decision of maneuvering state, it is applied to the mixed algorithm. It is shown by experiment ...

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.2
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• pp.166-171
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• 2010

Wired monitoring systems have been used for damage detection and dynamic analysis of large structures(bridges, dams, plants, etc.). However, the real-world applications still remain limited, mainly due to time and cost issues inherent to wired systems. In recent years, an increasing number of researchers have adopted WSN(wireless sensor network) technologies to the field of SHM(structural health monitoring). Accurate time synchronization is most critical for the wireless approach to be feasible for SHM purpose, along with sufficient wireless bandwidth and highly precise measuring resolution. To satisfy technical criteria stated above, a wireless vibration monitoring system that uses high-precision MEMS(micro-electro-mechanical system) sensors and A/D convertor is discussed in detail. It was found experimentally that the level of time synchronization fell within $200\;{\mu}sec$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.12
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• pp.994-1000
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• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.439-439
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• 2000

In this paper, the relationship among the vertical acceleration, measuring points and walking patterns is analyzed. To measure acceleration, the acceleration measurement unit and communication board is constructed. It uses MEMS accelerometer ADXL-202 that detects 2-axis acceleration simultaneously. It is shown by the experiment test that the walking pattern is recognized and walking step is detected at easy when acceleration measurement unit is mounted on leg.. This results can be directly utilized in designing the personal navigation system with low-cost inertial sensor.

• Journal of Sensor Science and Technology
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• v.16 no.4
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• pp.319-323
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• 2007

This paper describes the mechanical characteristics of poly 3C-SiC thin films grown on Si wafers with thermal oxide. In this work, the poly 3C-SiC thin film was deposited by APCVD method using only Ar carrier gas and single precursor HMDS at $1100^{\circ}C$. The elastic modulus and hardness of poly 3C-SiC thin films were measured using nanoindentation. Also, the roughness of surface was investigated by AFM. The resulting values of elastic modulus E, hardness H and the roughness of the poly 3C-SiC film are 305 GPa, 26 GPa and 49.35 nm respectively. The mechanical properties of the grown poly 3C-SiC film are better than bulk Si wafers. Therefore, the poly 3C-SiC thin film is suitable for abrasion, high frequency and MEMS applications.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.2
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• pp.112-115
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• 2011

To stabilize the electric characteristic of Silicon Thin Film Transistor, reducing the current leakage is most important issue. To reduce the current leakage, many ideas were suggested. But the increase of mask layer also increased the cost. On this research Bird's Beak process was use to present element. Using Silvaco simulator, it was proven that it was able to reduce current leakage without mask layer. As a result, it was possible to suggest the structure that can reduce the current leakage to 1.39nA without having mask layer increase. Also, I was able to lead the result that electric characteristic (on/off current ratio) was improved compare from conventional structure.