• 센서학회지
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• 제28권2호
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• pp.127-132
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• 2019

In this study, the fabrication of through-silicon vias (TSVs) filled with SWNTs/Sn by utilizing surface/bulk micromachining and MEMS technologies is proposed. Tin (Sn) and single-walled nanotube (SWNT) powders are used as TSV interconnector materials in the development of a novel TSV at low temperature. The measured resistance of a TSV filled with SWNT/Sn powder is considerably reduced by increasing the fraction of Sn and is lower than that of a TSV filled with only Sn. This is because of a decrease in the surface scattering of electrons along with an increase in the grain size of sintered SWNTs/Sn. The proposed method is conducted at low temperatures (< $400^{\circ}C$) due to the low melting temperature of Sn; hence, the proposed TSVs filled with SWNTs/Sn can be utilized in CMOS based applications.

• 대한금속재료학회지
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• 제48권2호
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• pp.169-174
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• 2010

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

• 대한임베디드공학회논문지
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• 제17권4호
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• pp.239-247
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• 2022

The existing studies on the localization in the GNSS (Global Navigation Satellite System) denied environment usually exploit low-cost MEMS IMU (Micro Electro Mechanical Systems Inertial Measurement Unit) sensors to replace the GNSS signals. However, the navigation system still requires GNSS signals for the normal environment. This paper presents an integrated GNSS/INS (Inertial Navigation System) navigation system which combines GNSS and multiple IMU sensors using extended Kalman filter in partially GNSS-denied environments. The position and velocity of the INS and GNSS are used as the inputs to the integrated navigation system. The Mahalanobis distance is used for novelty detection to detect the outlier of GNSS measurements. When the abnormality is detected in GNSS signals, GNSS data is excluded from the fusion process. The performance of the proposed method is evaluated using MATLAB/Simulink. The simulation results show that the proposed algorithm can achieve a higher degree of positioning accuracy in the partially GNSS-denied environment.

• Smart Structures and Systems
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• 제32권4호
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• pp.195-205
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• 2023

The contact acoustic emission (AE) monitoring system is time-consuming and costly for monitoring concrete structures in large scope, in addition, the great difference in acoustic impedance between air and concrete makes the detection process inconvenient. In this work, we broaden the conventional AE source localization method for concrete to the non-contact (air-coupled) micro-electromechanical system (MEMS) microphones array, which collects the energy-rich leaky Rayleigh waves, instead of the relatively weak P-wave. Finite element method was used for the numerical simulations, it is shown that the propagation velocity of leaky Rayleigh waves traveling along the air-concrete interface agrees with the corresponding theoretical properties of Lamb wave modes in an infinite concrete slab. This structures the basis for implementing a non-contact AE source location approach. Based on the experience gained from numerical studies, experimental studies on the proposed air-coupled AE source location in concrete slabs are carried out. Finally, it is shown that the locating map of AE source can be determined using the proposed system, and the accuracy is sufficient for most field monitoring applications on large plate-like concrete structures, such as tunnel lining and bridge deck.

• 한국산학기술학회논문지
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• 제10권1호
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• pp.186-193
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• 2009

본 논문에서는 전열(마이크로 히터, 센서)을 이용해 금형의 표면을 가열하는 E-MOLD 특허기술을 적용하여 휴대전화용 복합기능 도광판(Prismless LGP)을 제작하고, 전사성을 평가하였다. 이를 위하여 MEMS 공정을 이용하여 복합기능 도광판용 니켈 스탬퍼를 제작하였고, E-MOLD 기술의 핵심인 이동가열코어(movable heated core)가 설치된 금형을 설계, 제작하였다 이를 이용하여 성형조건 중 금형온도를 변화시키면서 복합기능 도광판을 사출성형으로 제조 하였고, 금형온도가 성형품의 전사성에 미치는 영향에 대하여 알아보았다. 또한, 전산모사 프로그램(CAE)을 이용하여 금형온도와 사출시간에 따른 수지의 유동성을 해석하였다. 금형온도에 따른 도광판의 전사성은 $100^{\circ}C$(25.0nm), $140^{\circ}C$(48.4nm), $180^{\circ}C$(52.1nm)로 나타났고, 스탬퍼(52.1nm)와 비교했을 때 $180^{\circ}C$에서 전사성이 가장 우수했다. 전산모사 해석결과에 따르면, 수지의 유동성은 금형온도($50{\sim}180^{\circ}C$)가 증가할수록 향상되었다. 사출시($1{\sim}2sec$)이 길수록 유동성이 감소하는 경향을 $160^{\circ}C$에서 확인하였다. 따라서 수지의 전사성과 유동성은 금형온도에 따라 증가하고, 특히 유리전이 온도($140^{\circ}C$) 이상에서 크게 상승하였다.

• 대한전자공학회논문지SD
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• 제37권6호
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• pp.9-16
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• 2000

본 논문은 다결정실리콘의 점착방지를 위한 새로운 화학적 방법에 의한 코팅방법을 제시하였고 그 특성을 확인하였다. 이 코팅방법은 최근에 사용되어지고 있는 Octadecyltrichlorosilane (OTS) 나 1H,1H2H,2H-perfluorodecyltrichlorosilane (FDTS) 같은 Monoalkyltrichlorosilanes (MTS, $RSiCl_3$) 계열의 물질 대신에 Dialkyldichlorosilanes (DDS, $R2SiCl_2$) 계열의 물질을 이용하여 다결정실리콘의 표면을 바꾸는 방법이다. 이 DDS 계열의 화학물질 중에서 Dichlorodimethylsilane (DDMS, $(CH_3)2SiCl_2$)는 쉽게 구할 수 있고 다결정실리콘의 표면을 친수성에서 소수성으로 간단하고 빠른 방법으로 바꿀 수 있는 장점이 있다. 본 논문에서는 DDMS 코팅된 다결정실리콘으로 만들어진 외팔보를 3 mm길이까지 제작하여 점착현상이 전혀 일어나지 않았음을 확인하였고 이를 실제 구조물에 적용하였다.

• 한국산학기술학회논문지
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• 제19권11호
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• pp.1-7
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• 2018

마이크로칼럼에서는 전자빔을 스캔하기 위해 초소형화된 정전디플렉터를 사용하는 경우가 많다. 주로 두 개의 8중극 디플렉터(double octupole deflector)를 사용하는 경우가 많은데, 이는 스캔 영역을 넓게 하면서도 전자빔이 대물렌즈를 통과할 때에 광축 근처에 위치하도록 함으로써 수차를 작게 유지할 수 있는 장점이 있기 때문이다. 마이크로칼럼은 최종적으로는 멀티 칼럼 형태로 사용하여 전자빔 장비의 throughput을 높이고자 하는 목적으로 연구가 되고 있는데, 칼럼의 수가 많아지게 되면 각 부품에 연결되는 배선의 수도 함께 증가하게 된다. 이에 따라 정전렌즈, 디플렉터 등의 마이크로칼럼 부품 배선을 진공 챔버 밖에 있는 제어장비와 연결하는 과정에서 실질적인 문제에 봉착하게 된다. 이러한 문제를 완화하기 위하여 렌즈 수를 최소화할 수 있도록 대물렌즈를 제거한 마이크로칼럼 구조를 선택하여, 변형된 4중극 및 8중극 디플렉터의 동작을 전산모사 방법으로 연구하였다. 기본적으로 MEMS 공정을 적용하기 용이한 실리콘 디플렉터 구조에서 각 전극의 크기를 동일하게 하지 않고, 서로 다른 크기의 전극을 교대로 배치하도록 디자인하였다. 8중극과 4중극 디플렉터 각각에서 디플렉터 전압을 인가하는 구동전극의 크기에 변화를 주었을 때 스캔 영역과 디플렉터 중심점에서의 전기장의 변화를 조사하여 비교하였다. 스캔 영역은 디플렉터전압에 따라 선형적으로 비례하였다. 스캔영역과 중심점에서의 전기장 세기 모두 8중극 디플렉터에 비해 4중극 디플렉터에서 더 크게 나타났으며, 전극의 크기에 따라 약 1.3 ~ 2.0 배 큰 것으로 조사되었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.541-546
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• 2005

Tracking control of an automatic pipe cutting robot (APCROMB) is studied. Using magnetic force APCROMB, which is designed and developed in Kyung Hee University, binds itself to the pipe and executes unmanned cutting process. The gravity effect on the movement of APCROMB varies as it rotates around the cylindrical pipe laid in the gravitational field. To maintain a constant velocity and consistent cutting performance against the varying gravitational effect, the authors adopt a multi-rate repetitive learning controller (MRLC), which learns the required effort to cancel the repetitive tracking errors caused by nonlinear effect. In addition to the varying gravity effect other types of nonlinear disturbances including backlash in the driving system and the slip between the wheels of APCROMB and the pipe also cause degradation in the cutting process. In order to identify those nonlinear disturbances the position estimation based on the encoder attached at the motor is not good enough. To identify the absolute angular position of APCROMB the authors propose the angular position estimation based on the signals from a MEMS-type two-axis accelerometer mounted on APCROMB. The tracking performances of APCROMB with a MRLC using the encoder-based position estimation is experimentally measured and results are shown. Also the difference between the encoder-based angular displacement measurement and the accelerometerbased angular displacement measurement is included.

• 한국정밀공학회지
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• 제23권6호
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• 한국분말재료학회지
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• 제20권5호
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.