• Title/Summary/Keyword: MEMS Gyroscope

Search Result 75, Processing Time 0.039 seconds

Analysis on Effects of Design Variable Uncertainty on the Performance of MEMS Gyroscope Based on Sample Statistics (샘플 통계에 근거한 MEMS 자이로스코프의 설계변수 불확정성이 성능에 미치는 영향 분석 방법)

  • Kim, Yong-Woo;Yoo, Hong-Hee
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • 2009.10a
    • /
    • pp.119-123
    • /
    • 2009
  • Recently, a MEMS gyroscope has been broadly fabricated and used due to development of a micromachining. However, there is a difference between the modeling design and the actual product and this difference can lead to the performance variation of a MEMS gyroscope. A classical design method does not exactly estimate the performance of a MEMS gyroscope. Therefore a design process considering the design variable uncertainty has to be employed to design MEMS gyroscope model. In this paper, the equation of motion of a MEMS gyroscope model is obtained to analyze the performance of a MEMS gyroscope and the effects of the design variables on the MEMS gyroscope performance are investigated. Finally the performance of MEMS gyroscope is estimated through a statistical analysis based on sample statistics.

  • PDF

Dynamic Modeling and Analysis of an Eccentric MEMS Gyroscope (편심형 MEMS 자이로스코프의 동적 모델링 및 해석)

  • Ha, Dong-Jin;Shin, Sang-Ha;Yoo, Hong-Hee
    • Proceedings of the KSME Conference
    • /
    • 2004.04a
    • /
    • pp.792-797
    • /
    • 2004
  • Dynamic modeling of an eccentric MEMS gyroscope is presented and the dynamic characteristics of the gyroscope are investigated with the modeling method. It is found that the eccentricity of the MEMS gyroscope affects the dynamic characteristics significantly. Different from conventional MEMS gyroscopes, the zero-rate output is significantly reduced in this gyroscope. To obtain general guidelines of the gyroscope design, dimensionless parameters are first identified and the effects of the parameters on the gyroscope performance measures are investigated.

  • PDF

Feed-through Noise Reduction Technique for MEMS Gyroscope (MEMS Gyroscope를 위한 feed-through 노이즈 제거 기법)

  • Park, Kyung-Jin;Kang, Seong-Mook;Baek, Chang-Wook;Kim, Ho-Seong
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.58 no.11
    • /
    • pp.2247-2252
    • /
    • 2009
  • Since the dimensions of MEMS gyroscope are very small compared to those of conventional gyroscope, MEMS gyroscope should be able to measure charge of pico-coulomb caused by very small change of electrodes gap. However, feed-through signal from driving electrodes to the sensing electrodes due to the electromagnetic coupling is much greater than the sensing signal, which degrades the sensitivity of MEMS gyroscope. This paper introduces the feed-through noise canceling technique using dummy port and confirms the feasibility of feed-through noise canceling experimentally. Experimental results shows that, when driving signal is 6 Vpp, 30 kHz, feed-through signal of vacuum packaged Si Gyroscope decreases from -53.2 dBm to -77.1 dBm by using feed-through reduction technique. Q-factor that could not be measured without noise reduction is measured to be about 2500 and resonance frequency to be 7.018 kHz.

Vibration Analysis for a Coupled MEMS-Gyroscope Design (연성된 MEMS 자이로스코프 모델의 설계를 위한 진동특성 해석)

  • 방선호;신상하;유홍희
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • 2003.11a
    • /
    • pp.946-969
    • /
    • 2003
  • Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. MEMS gyroscopes have shown that slight mistuning in fabricated process often leads to significant difference of vibration characteristics between expected and real designs. The difference frequently affects the MEMS gyroscope design in a negative way. As long as the coupling between excited and sensed motions exists, such difference occurs inevitably. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated for the design of the MEMS gyroscope.

  • PDF

Vibration Analysis for a Coupled MEMS-Gyroscope Design (연성된 MEMS 자이로스코프 모델의 설계를 위한 진동 해석)

  • 방선호;신상하;유홍희
    • Transactions of the Korean Society for Noise and Vibration Engineering
    • /
    • v.14 no.8
    • /
    • pp.655-660
    • /
    • 2004
  • Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. Slight mistuning in fabricated MEMS gyroscopes often leads to significant difference of vibration characteristics between expected and real designs. This difference frequently results in a negative effect to the MEMS gyroscope performance. As long as the coupling between excited and sensed motions exists, such difference inevitably occurs. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated.

Design and Analysis of MEMS Vibrating Ring Gyroscope Considering High-g shock reliability (고내충격용 MEMS 진동형 링 자이로스코프 설계 및 분석)

  • Yoon, Sung-Jin;Park, U-Sung
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.64 no.10
    • /
    • pp.1440-1447
    • /
    • 2015
  • This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles.

Sensitivity Optimization of MEMS Gyroscope for Magnet-gyro Guidance System (자기-자이로 유도 장치를 위한 MEMS형 자이로의 민감도 최적화)

  • Lee, Inseong;Kim, Jaeyong;Jung, Eunkook;Jung, Kyunghoon;Kim, Jungmin;Kim, Sungshin
    • The Journal of Korea Robotics Society
    • /
    • v.8 no.1
    • /
    • pp.29-36
    • /
    • 2013
  • This paper presents a sensitivity optimization of a MEMS (microelectromechanical systems) gyroscope for a magnet-gyro system. The magnet-gyro system, which is a guidance system for a AGV (automatic or automated guided vehicle), uses a magnet positioning system and a yaw gyroscope. The magnet positioning system measures magnetism of a cylindrical magnet embedded on the floor, and AGV is guided by the motion direction angle calculated with the measured magnetism. If the magnet positioning system does not measure the magnetism, the AGV is guided by using angular velocity measured with the gyroscope. The gyroscope used for the magnet-gyro system is usually MEMS type. Because the MEMS gyroscope is made from the process technology in semiconductor device fabrication, it has small size, low-power and low price. However, the MEMS gyroscope has drift phenomenon caused by noise and calculation error. Precision ADC (analog to digital converter) and accurate sensitivity are needed to minimize the drift phenomenon. Therefore, this paper proposes the method of the sensitivity optimization of the MEMS gyroscope using DEAS (dynamic encoding algorithm for searches). For experiment, we used the AGV mounted with a laser navigation system which is able to measure accurate position of the AGV and compared result by the sensitivity value calculated by the proposed method with result by the sensitivity in specification of the MEMS gyroscope. In experimental results, we verified that the sensitivity value through the proposed method can calculate more accurate motion direction angle of the AGV.

Development of Improved Fabrication Methods for 2-axis Electrically Levitated MEMS Gyroscope (2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발)

  • Seok, Seyeong;Lim, Geunbae
    • Journal of Sensor Science and Technology
    • /
    • v.24 no.4
    • /
    • pp.274-279
    • /
    • 2015
  • This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

Reliability Assessment of MEMS Gyroscope Sensor (MEMS 자이로스코프 센서의 신뢰성 문제)

  • Choi, Min-Seog;Choa, Sung-Hoon;Kim, Jong-Seok;Jeong, Hee-Moon;Song, In-Seob;Cho, Yong-Chul
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.28 no.9
    • /
    • pp.1297-1305
    • /
    • 2004
  • Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

A Study on the G-Sensitivity Error of MEMS Vibratory Gyroscopes (진동형 MEMS 자이로스코프 G-민감도 오차에 관한 연구)

  • Park, Byung-Su
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.63 no.8
    • /
    • pp.1075-1079
    • /
    • 2014
  • In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.