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Feed-through Noise Reduction Technique for MEMS Gyroscope  

Park, Kyung-Jin (중앙대 공대 전자전기공학부)
Kang, Seong-Mook (중앙대 공대 전자전기공학부)
Baek, Chang-Wook (중앙대 공대 전자전기공학부)
Kim, Ho-Seong (중앙대 공대)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.58, no.11, 2009 , pp. 2247-2252 More about this Journal
Abstract
Since the dimensions of MEMS gyroscope are very small compared to those of conventional gyroscope, MEMS gyroscope should be able to measure charge of pico-coulomb caused by very small change of electrodes gap. However, feed-through signal from driving electrodes to the sensing electrodes due to the electromagnetic coupling is much greater than the sensing signal, which degrades the sensitivity of MEMS gyroscope. This paper introduces the feed-through noise canceling technique using dummy port and confirms the feasibility of feed-through noise canceling experimentally. Experimental results shows that, when driving signal is 6 Vpp, 30 kHz, feed-through signal of vacuum packaged Si Gyroscope decreases from -53.2 dBm to -77.1 dBm by using feed-through reduction technique. Q-factor that could not be measured without noise reduction is measured to be about 2500 and resonance frequency to be 7.018 kHz.
Keywords
MEMS Gyroscope; Feed-through; Noise reduction; Q-factor;
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