• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.1
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• pp.23-29
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• 2016

In this paper, in order to quantify the peristalsis occurrence in a guinea pig's large intestine, a miniaturized air-gap capacitive pressure sensor was fabricated through micro-electro-mechanical system (MEMS). The proposed pressure sensor is a two-layered biocompatible polyimide substrate consisting of an air-gap capacitive plates between the substrates. The proposed pressure sensor was designed with a careful consideration of the structure and motility mechanism of the guinea pig's large intestine. Artificial pellets were mounted on a prototype pressure sensor to provide some redundancies in the form of size and shape of the guinea pig feces. Capacitance of a prototype sensor was recorded to be 2.5 ~ 3 pF. This capacitance value was later converted to count value using a lab fabricated data conversion system. Sensitivity of the pressure sensor was recorded to be below 1 mmHg per atmospheric pressure. During in vivo testing, artificial peristalsis caused by drug injection was measured by inserting the prototype pressure sensor into the guinea pig's large intestine and pressure data obtained due to artificial peristalsis was graphed using a labview program. The proposed pressure sensor could measure the pressure changes in the proximal, medial, and distal parts of the large intestine. The results of the experiment confirmed that pressure changes of guinea pig's large intestine was proportional to the degree of drug injection.

• Journal of Advanced Navigation Technology
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• v.23 no.3
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• pp.228-236
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• 2019

Recently, multi-sensor integration techniques have been actively studied to obtain reliable and accurate navigation solution in GPS (Global Positioning System)-denied harsh environments such as urban canyons, tunnels, and underground roads. In this paper, we propose a low-cost ultrasonic-speedometer utilizing the characteristics of the ultrasonic propagation. An efficient integrated INS (inertial navigation system)/ultrasonic-speedometer navigation system is also proposed to improve the accuracy of positioning in GPS-denied environments. To evaluate the proposed system, car experiments with field-collected measurements were performed. By the experiment results, it was confirmed that the proposed INS/ultrasonic-speedometer system bounds the positioning error growth effectively even though GPS signal is blocked more than 10 seconds and a low-cost MEMS IMU (micro electro mechanical systems inertial measurement unit) is utilized.

• Journal of Advanced Navigation Technology
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• v.27 no.4
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• pp.481-487
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• 2023

Recently, interest in UAM (Urban Air Mobility) has surged as a critical solution to urban traffic congestion and air pollution issues. However, efficient UAM operation requires accurate 3D Point Cloud data processing, particularly in separating the ground and objects. This paper proposes and validates a method for effectively separating ground and objects in a UAM environment, taking into account its dynamic and complex characteristics. Our approach combines attitude information from MEMS sensors with ground plane estimation using RANSAC, allowing for ground/object separation that isless affected by GPS errors. Simulation results demonstrate that this method effectively operates in UAM settings, marking a significant step toward enhancing safety and efficiency in urban air mobility. Future research will focus on improving the accuracy of this algorithm, evaluating its performance in various UAM scenarios, and proceeding with actual drone tests.

• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.258-263
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• 2004

In this study, we carried out a basic study for the development of optical transcutaneous $pCO_{2}$ gas sensor and analyzer using non-invasive method. The basic principle of $pCO_{2}$ measurement is adapted Beer lambert's law and embodied the system using NDIR method. This measuring system was composed of a IR lamp, a optical filter, a optical reaction chamber, pyroelectric sensor and a signal process. We measured $EtCO_{2}'s$ concentration in basis step instead of $pCO_{2}$ gas that can collect by inflicting heat in outer skin. We minimize the size of optical reaction chamber which takes up the largest volume, to make the portable sensor. We made optical reaction chamber in Si wafer using MEMS technology and the optical reaction chamber was shortened to 2 mm and we carried out an experiment. When we injected the $EtCO_{2}$ to the inside of the optical reaction chamber, we could confirm change of 4.6 mV. The system response time was within 2 second that is fairly fast.

• Journal of Sensor Science and Technology
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• v.20 no.5
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• pp.317-321
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• 2011

A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.

• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.54-59
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• 2002

This paper describes a new process technique for batch process of SOI(Si-on-Insulator) structures with buried cavities for MEMS(Micro Electro Mechanical System) applications by SDB(Si-wafer Direct Bonding) technology and electrochemical etch-stop. A low-cost electrochemical etch-stop method is used to control accurately the thickness of SOI. The cavities were made on the upper handling wafer by Si anisotropic etching. Two wafers are bonded with an intermediate insulating oxide layer. After high-temperature annealing($1000^{\circ}C$, 60 min), the SDB SOI structure with buried cavities was thinned by electrochemical etch-stop. The surface of the fabricated SDB SOI structure have more roughness that of lapping and polishing by mechanical method. This SDB SOI structure with buried cavities will provide a powerful and versatile substrate for novel microsensors arid microactuators.

• Journal of Sensor Science and Technology
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• v.31 no.5
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• pp.348-352
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• 2022

Hydrogen gas (H₂) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H₂ gas sensor with high performance. In this paper, we confirmed that H₂ gas detection ability of SnO₂ based H₂ gas sensor along with thermal treatment effect of SnO₂. Proposed SnO₂ based H₂ gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO₂ thin films are thermally treated in various thermal treatement temperature in range of 500-900 ℃ and their H₂ gas detection ability is estimatied by measuring output current of H₂ gas sensor. Based on experimental results, fabricated H₂ gas sensor with SnO₂ thin film which is thermally treated at 700 ℃ has a superior H₂ gas detection ability, and it can be expected to utilize at the practical applications.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.3
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• pp.55-59
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• 2018

In this paper, we investigated the characteristics of shear stress type piezoresistor on a diaphragm structure formed by MEMS (Microelectromechanical System) technology of silicon-direct-bonding (SDB) wafers with Si/$SiO_2$/Si-sub. The diaphragm structure formed by etching the backside of the wafer using a TMAH aqueous solution can be used for manufacturing various sensors. In this study, the optimum shape condition of the shear stress type piezoresistor formed on the diaphragm is found through ANSYS simulation, and the diaphragm structure is formed by using the semiconductor microfabrication technique and the shear stress formed by boron implantation. The characteristics of the piezoelectric resistance are compared with the simulation results. The sensing diaphragm was made in the shape of an exact square. It has been experimentally found that the maximum shear stress for the same pressure at the center of the edge of the diaphragm is generated when the structure is in the exact square shape. Thus, the sensing part of the sensor has been designed to be placed at the center of the edge of the diaphragm. The prepared shear stress type piezoresistor was in good agreement with the simulation results, and the sensitivity of the piezoresistor formed on the $2200{\mu}m{\times}2200{\mu}m$ diaphragm was $183.7{\mu}V/kPa$ and the linearity of 1.3 %FS at the pressure range of 0~100 kPa and the symmetry of sensitivity was also excellent.

• Journal of Sensor Science and Technology
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• v.11 no.3
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• pp.163-170
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• 2002

This paper proposes a $10\;{\mu}m$ thick oxide air-bridge structure which can be used as a substrate for RF circuits. The structure was fabricated by anodic reaction, complex oxidation and micromachining technology using TMAH etching. High quality films were obtained by combining low temperature thermal oxidation ($500^{\circ}C$, 1 hr at $H_2O/O_2$) and rapid thermal oxidation (RTO) process ($1050^{\circ}C$, 2 min). This structure is mechanically stable because of thick oxide layer up to $10\;{\mu}m$ and is expected to solve the problem of high dielectric loss of silicon substrate in RF region. The properties of the transmission line formed on the oxidized porous silicon (OPS) air-bridge were investigated and compared with those of the transmission line formed on the OPS layers. The insertion loss of coplanar waveguide (CPW) on OPS air-bridge was (about 2dB) lower than that of CPW on OPS layers. Also, the return loss of CPW on OPS air-bridge was less than about -20 dB at measured frequency region for 2.2 mm. Therefore, this technology is very promising for extending the use of CMOS circuitry to higher RF frequencies.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.49 no.1
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• pp.47-56
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• 2012

Bicycle has a large amount of kinetic energy available for energy harvesting technology in its speedy and balanced riding movement. Systematic and realistic analysis of its dynamic property is essential to improve the efficiency of energy harvester. However, there has not been enough researches about precise measurement or analysis of bicycle dynamics on real roads. This study aims to investigate the characteristics of vibrational movement of bicycle using MEMS-based accelerometer and to develop a prototype of electromagnetic energy harvester with nonlinear behavior which is proper to the random vibrations accompanied in bicycle riding. The vibrational components have average magnitude of 1 g and turn out to be independent of riding speed. The developed prototype of energy harvester was installed on a front port of a bicycle to use this ambient vibration and generated an average electrical power of 1.5 mW which is enough to support power for most of portable sensors and short range radio-frequency communication. Further study about isolation of vibration from a rider and conversion efficiency is ongoing. The developed energy harvester is expected to be a platform technology for sustainable portable power supply for various smart IT devices and applications.