Fabrication of Thick Silicon Dioxide Air-Bridge and Coplanar Waveguide for RF Application Using Complex Oxidation Process and MEMS Technology |
Kim, Kook-Jin
(Korea Research Institute of Standarts and Science)
Park, Jeong-Yong (School of Electronic & Electrical Eng., Kyungpook Nat'l University) Lee, Dong-In (School of Electronic & Electrical Eng., Kyungpook Nat'l University) Lee, Bong-Hee (School of Electronic & Telecom. Eng., Pohang 1 College) Bae, Yong-Hok (Dept. of Electronics, Uiduk University) Lee, Jong-Hyun (School of Electronic & Electrical Eng., Kyungpook Nat'l University) Park, Se-Il (Korea Research Institute of Standarts and Science) |
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Quasi-TEM characteristic impednce of micromachined CMOS coplanar waveguides
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DOI ScienceOn |
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Selectively Oxidized Porous Silicon (SOPS) Substrate for Packaging
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Silicon high-resistivity-substrate milliter-wave technology
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High performance RF passive elements on thick oxidized porous silicon(OPS) memrane
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Finite Element Analysis of Lossy Waveguides-Application to Microstrip Lines on Semiconductor Substrate
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SSOI technology for intergrated Schottky barrier diode
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Coplanar Waveguides on Silicon Substrate with Thick Oxidized Porous Silicon(OPS) Layer
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DOI ScienceOn |
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Dielectric properties of oxidized porous silicon in a low resistivity substrate
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DOI |
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Si-micromachned Coplanar Waveguides for use in high-frequency circuits
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11 |
Microachined Coplanar Wavegides in CMOS Technology
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Formation and properties of porous silicon and its application
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DOI ScienceOn |
13 |
Characterisrics of Metal-Insulator-Semiconductor Coplanar Waveguides for Monolithic Microave Circuits
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