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http://dx.doi.org/10.6117/kmeps.2018.25.3.055

Analysis of Shear Stress Type Piezoresistive Characteristics in Silicon Diaphragm Structure  

Choi, Chae-Hyoung (Division. of Electronics & Information Engineering, Yeungnam University College)
Choi, Deuk-Sung (Division. of Electronics & Information Engineering, Yeungnam University College)
Ahn, Chang-Hoi (Department of Electronic Engineering, Yeungnam University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.25, no.3, 2018 , pp. 55-59 More about this Journal
Abstract
In this paper, we investigated the characteristics of shear stress type piezoresistor on a diaphragm structure formed by MEMS (Microelectromechanical System) technology of silicon-direct-bonding (SDB) wafers with Si/$SiO_2$/Si-sub. The diaphragm structure formed by etching the backside of the wafer using a TMAH aqueous solution can be used for manufacturing various sensors. In this study, the optimum shape condition of the shear stress type piezoresistor formed on the diaphragm is found through ANSYS simulation, and the diaphragm structure is formed by using the semiconductor microfabrication technique and the shear stress formed by boron implantation. The characteristics of the piezoelectric resistance are compared with the simulation results. The sensing diaphragm was made in the shape of an exact square. It has been experimentally found that the maximum shear stress for the same pressure at the center of the edge of the diaphragm is generated when the structure is in the exact square shape. Thus, the sensing part of the sensor has been designed to be placed at the center of the edge of the diaphragm. The prepared shear stress type piezoresistor was in good agreement with the simulation results, and the sensitivity of the piezoresistor formed on the $2200{\mu}m{\times}2200{\mu}m$ diaphragm was $183.7{\mu}V/kPa$ and the linearity of 1.3 %FS at the pressure range of 0~100 kPa and the symmetry of sensitivity was also excellent.
Keywords
MEMS; SDB wafer; TMAH aqueous solution; exact square diaphragm structure; shear stress type piezoresistor; ANSYS simulation;
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Times Cited By KSCI : 2  (Citation Analysis)
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