• Journal of the Semiconductor & Display Technology
• /
• v.22 no.3
• /
• pp.62-66
• /
• 2023

With the advancement in technology and rapid increase in the demand for microelectromechanical systems (MEMS) based inertial measurement units (IMUs), high-volume production and test system remain a major challenge for the MEMS industry. To compete with the challenging market of Industry 4.0, here we developed an automatic test system to evaluate the performance of the ovenized IMU sensors as well as analyze the data. The automatic test system was developed by interfacing a commercial MEMS IMU (BMI 088) using LabVIEW. The BMI 088 was tested experimentally for long-term bias stability, ON/OFF bias repeatability, and root mean square (rms) noise. Furthermore, the data was analyzed through the developed test system. The results show that the automatic test system has improved the test time and reduced human effort. The developed automatic test system is a significant approach to MEMS research and development (R&D) to increase and improve the mass production of IMUs.

• Journal of the Institute of Electronics Engineers of Korea SC
• /
• v.45 no.1
• /
• pp.41-49
• /
• 2008

Many machineries and equipments are being changing to various and complicated by development of recent technology and arrival of convergence age in distant future. These various and complicate equipments need more precise outcomes and low-power consumption sensors to get close and exact results. In this paper, we proposed fault tolerance and feedback theorem for sensor network and MEMS circuit which has a benefit of energy efficiency through wireless sensor network. The system is provided with independent sensor communication if possible as unused action, using idle condition of system and is proposed the least number of circuits. These technologies compared system efficiency after examining product of each Moving Distance by developed sensor which gives effects to execution of system witch is reduced things like control of management side and requirement for hardware, time, and interaction problems. This system is designed for practical application; however, it can be applied to a normal life and production environment such as "Ubiquitous City", "Factory Automata ion Process", and "Real-time Operating System", etc.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.40 no.2
• /
• pp.397-407
• /
• 2015

In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.32 no.7
• /
• pp.542-548
• /
• 2008

A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.

• Journal of Sensor Science and Technology
• /
• v.14 no.4
• /
• pp.265-271
• /
• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• Journal of Sensor Science and Technology
• /
• v.21 no.5
• /
• pp.374-378
• /
• 2012

Biofouling causes many problem in industrial processes, medical health industries, water utilities and our daily life. So detecting formation of biofilm on the surface of medical appliance, water pipe and industrial utility is highly important to prevent the problem caused by biofouling. In this study, we suggest an electrochemical sensor for detecting biofilm. We fabricated the electrochemical sensor in MEMS process and cultivated two different kinds of Pseudomonas aeruginosa RpoN type and Wild type on the surface of electrochemical sensor. Each group of Pseudomonas aeruginosa was cultivated according to the hours of 2, 4, 6, 8, 12 and 24. Then we investigated changes in degree of biofilm cultivation using cyclic voltammetry. As a result, it was observed that peak of the cyclic voltammetry curve is increased according as the biofilm growth on the surface of electrochemical sensor. Also we can discern between Pseudomonas aeruginosa RpoN type and Wild type.

• Journal of Sensor Science and Technology
• /
• v.20 no.1
• /
• pp.40-45
• /
• 2011

Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40\;{\mu}m$ long, $7\;{\mu}m$ wide, and $3\;{\mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.23 no.7
• /
• pp.164-171
• /
• 2019

Focusing on the bridge facilities, which occupy the largest proportion among SOC public facilities in Korea, it is possible to reduce the cost compared to existing wired measurement systems or wireless measurement systems developed by domestic telecommunications companies, and to increase the technical perfection to be applied to many bridges. We developed a wireless measurement system for bridges. Using LoRa, one of the unlicensed LPWAN technologies, we have developed an optimized MEMS-based LoRa smart sensor node considering the domestic ISM band and the existing wired sensor LoRa DAQ sensor node that can communicate with the LoRa network. Application server was developed for the test bed performance verification and efficient management of the developed sensor node.

• Journal of the Institute of Electronics Engineers of Korea SC
• /
• v.46 no.3
• /
• pp.22-30
• /
• 2009

GPS and INS integrated systems are expected to become commonly available as a result of low cost Micro-Electro-Mechanical Sensor (MEMS) technology. However, the current performance achieved by low cost sensors is still relatively poor due to the large inertial sensor errors. This is particularly prevalent in the urban environment where there are significant periods of restricted sky view. To reduce the inertial sensor error, GPS and low cost INS are integrated using a Loosely Coupled Kalman Filter architecture which is appropriate in most applications where there is good satellite availability. In this paper, we present the GPS/INS sensor Integration using Loosely Coupled Kalman Filter approach. We also compare the simulation results of Wander Azimuth Strapdown Mechanization Scheme with the reference values generated by the ZH35C trajectory simulator that is describe mathematically either by the geometry of the path, or as the position of the object over time.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.11 no.2
• /
• pp.134-144
• /
• 2007

In this study, a smart sensor unit is developed by using the smart sensor technology that is being rapidly developed in recent years for structural health monitoring system, and its performance is evaluated through various experiments, and also, damage detection experiment is performed on a model structure. This paper as the first half of this study contains the development and performance evaluation of the smart sensor. In the latter half of this study, structure damage detection experiment is performed for the application of verified smart sensor unit into structural health monitoring, and it is compared with a wire measurement system. The smart sensor is developed by using high-power wireless modem, MEMS Sensor and AVR microcontroller, and an embedded program is also developed for the control and operation of the sensor unit. To verify the performance of the smart sensor, many experiments are performed for sensitivity and resolution analysis tests, data acquisition by using cantilever beam and shaker, and on-site application using actual bridge. As a result, the smart sensor proves to be satisfactory in its performance.