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http://dx.doi.org/10.3795/KSME-B.2008.32.7.542

Micro-Fabrication and Thermal Characteristics of a Thermal Mass Air Flow Sensor for Real-time Applications  

Park, Byung-Kyu (서울대학교 기계항공공학부)
Lee, Joon-Sik (서울대학교 기계항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.32, no.7, 2008 , pp. 542-548 More about this Journal
Abstract
A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.
Keywords
Thermal Mass Flow Sensor; Thermo-resistive Type; MEMS Sensor Microfabrication;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 2
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