• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.38-44
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• 2005

Pyrolyzed polyimide is explored in terms of MEMS material. This paper describes chemical, electrical, mechanical properties of pyrolyzed polyimide (PIX-1400) thin film as MEMS material. When polyimide thin film was pyrolyzed at $800^{\circ}C$ for 60 minutes in $N_{2}$ ambient, the residual ratio of pyrolyzed film thickness measured with a surface profiler is about 49 %, and the resistivity is about $2.17{\times}10^{-2}\;{Omega}cm$. From the result of the load-deflection test, the estimated Young's modulus and initial average stress of pyrolyzed polyimide are 67 GPa and 30 MPa, respectively. As one demonstration of MEMS structures of pyrolyzed polyimide, the fabrication method of the microbridge structure is proposed for a micro heater and a resonator.

• 센서학회지
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• 제26권2호
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• pp.91-95
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• 2017

Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and military. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-based near infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer utilizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selectively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si (a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technology has the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.

• 한국재료학회지
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• 제18권11호
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• pp.592-596
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• 2008

Spring constants (displacement per unit applied load) of MEMS socket pins of given structures were computed by theoretical analysis and confirmed by the finite element method (FEM). In the theoretical analysis, the displacement of pins was calculated based on the 2-dimensional bending theory of the curved beam. For the 3-dimensional modeling, CATIA was used. After modeling, the raw data were transferred to ANSYS, which was employed in the 3-dimensional analysis for the calculation of the stress and strain and loaddisplacement The theoretical analysis and the FEM results were found to agree, with each showing the spring constants as 63.4 N/m within a reasonable load range. These results show that spring constants can be easily obtained through theoretical calculation without resorting to experiments and FEM analysis for simple and symmetric structures. For the some change of shape and structural stiffness, this theoretical analysis can be applied to MEMS socket pins.

• 대한기계학회논문집A
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• 제33권9호
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• pp.976-981
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• 2009

MEMS capacitive gap sensor is developed for measuring abrasion depth of gun barrel rifling. Measuring abrasion depth of gun barrel rifling is very important because it is related with exactness of firing and life of arms. The method using a gap sensor is not to hurt rifling. And it can measure abrasion depth through minimum shooting, because the developed gap sensor can measure from $1{\mu}m{\sim}12{\mu}m$ using Polydimethylsiloxane(PDMS) material and making a stretchable electrode on PDMS. And it's resolution is 1 ${\mu}m$ using capacitive method and MEMS technology.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.467-472
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• 2007

A modern MEMS resonator is a micro-scale structure operated over a high frequency range. In order to predict its resonant behavior in a design process, High-frequency response analysis (Hi-FRA) is demanded. Algebraic substructuring (AS) is known as a fast numerical technique to construct an eigenspace for FR and frequency sweep (FS) algorithm efficiently solves the frequency response system projected on the eigenspace. However, the existing FS algorithm using AS is developed for low-FRA, say over the range 1Hz-2KHz. In this work, we extend the FS algorithm using AS for FRA over an arbitrary frequency range. Therefore, it can be efficiently applied to systems operated at a high frequency, say over the range 230MHz-250MHz. The success of the proposed method is demonstrated by Hi-FRA of a checkerboard resonator.

• 전기학회논문지
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• 제63권8호
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• pp.1075-1079
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• 2014

In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2011년도 추계학술대회
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• pp.191-192
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• 2011

MEMS 기반 관성 센서를 이용한 항법장치를 개발하는 경우, 칼만 필터(Kalman Filter, KF) 구축 여부에 따라 그 성능이 결정된다. 특히 해상에서 이러한 MEMS 기반 관성항법 장치를 사용하는 경우에는, 육상과 달리 다양한 제약조건이 따르게 된다. KF는 선형과 비선형으로 구분되고, 비선형은 다시 확장 KF와 Unscented KF, Particle KF 등 다양한 것이 연구 개발되어 있는데, 해상에 적용하기 위해서는 이러한 다양한 필터들의 특징과 추가 요청사항 등을 사전 조사할 필요가 있다. 본 연구에서는 기존 개발된 KF를 조사하여 해상용 MEMS 기반 관성 항법장치를 개발하는 경우 필요한 필터 구성 방법을 조사하여 문제점을 살펴보고, 이 문제 해결을 위한 방안을 검토하였다.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2003년도 하계학술대회
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• pp.269-271
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• 2003

초고주파/밀리미터파 대역에서 전력증폭기의 효율을 향상시키기 위해 MEMS 튜닝회로를 설계하였다. MEMS 튜닝회로의 효과를 확인하기 위해 2차 및 3차 고조파를 억제할 수 있도록 3-stub Class-E 증폭기를 설계하였으며 또한 설계된 증폭기에 대해 시뮬레이션을 실시하였다. 시뮬레이션의 결과로서 8GHz에서 14dBm입력에 대해 MEMS가 적용된 증폭기의 성능은 PAE=66 9%, drain efficiency=75.89%, 그리고 출력 P=23.37 dBm을 얻었다. 또한 FET의 기생리액턴스의 변화에 대해서 MEMS 튜닝회로의 효율증대효과를 확인하였다. 결론적으로 이 연구에서 제안된 새로운 방법을 통해 증폭기의 효율향상을 위한 효과적인 방법이 될 수 있음 보여 주었다.

• Journal of information and communication convergence engineering
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• 제15권4호
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• pp.232-236
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• 2017

A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권5호
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• pp.232-237
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• 2005

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.