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A Fabrication of IR $CO_2$ Sensor based on the MEMS and Characteristic Evaluation  

Kim Shin-Keun (연세대 보건과학대 의공학과)
Han Yong-Hee (고려대 공대 재료공학과)
Moon Sung-Wook (KIST 마이크로시스템 연구센터)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.54, no.5, 2005 , pp. 232-237 More about this Journal
Abstract
In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.
Keywords
MEMS Infrared Sensor; Microbolometer; Surdace Micromachining; Bulk Micromachining;
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