Investigation of Pyrolyzed Polyimide Thin Film as MEMS Material |
Naka, Keisuke
(The Graduate School of Science and Engineering, Ritsumeikan University)
Nagae, Hideki (The Graduate School of Science and Engineering, Ritsumeikan University) Ichiyanagi, Masao (The Graduate School of Science and Engineering, Ritsumeikan University) Jeong, Ok-Chan (Center of Promotion of the COE program, Ritsumeikan University) Konishi, Satoshi (Department of Micro System Tech., Faculty of Science and Engineering, Ritsumeikan University) |
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