• Smart Structures and Systems
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• v.18 no.4
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• pp.787-800
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• 2016

The aim of the paper is to analyze nonlinear transverse vibration of an embedded piezoelectric plate reinforced with single walled carbon nanotubes (SWCNTs). The system in rested in a Pasternak foundation. The micro-electro-mechanical model is employed to calculate mechanical and electrical properties of nanocomposite. Using nonlinear strain-displacement relations and considering charge equation for coupling between electrical and mechanical fields, the motion equations are derived based on energy method and Hamilton's principle. These equations can't be solved analytically due to their nonlinear terms. Hence, differential quadrature method (DQM) is employed to solve the governing differential equations for the case when all four ends are clamped supported and free electrical boundary condition. The influences of the elastic medium, volume fraction and orientation angle of the SWCNTs reinforcement and aspect ratio are shown on frequency of structure. The results indicate that with increasing volume fraction of SWCNTs, the frequency increases. This study might be useful for the design and smart control of nano/micro devices such as MEMS and NEMS.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.252-257
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• 2004

Nanometer-sized structures are being applied to many devices including micro/nano electronics, optoelectronics, quantum devices, MEMS/NEMS, biosensors, etc. Especially, the thin film with submicron thickness is a basic structure for fabricating these devices, but its mechanical behaviors are not well understood. The mechanical properties of the thin film are different from those of the bulk structure and are difficult to measure because of its handling inconvenience. Several techniques have been applied to mechanical characterization of the thin film, such as nanoindentation test, micro/nano tensile test, strip bending test, etc. In this study, we focus on the strip bending test because of its high accuracy and moderate specimen preparation efforts, and measure Au thin film, which is a very popular material in micro/nano electronic devices. Au film is deposited on Si substrate by evaporation process, of which thickness is 100nm. Using the strip bending test, we obtain elastic modulus, yield and ultimate tensile strength, and residual stress of Au thin film.

• Proceedings of the KSR Conference
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• 2003.05a
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• pp.712-717
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• 2003

지능 재료를 이용한 디바이스는 자연계에 존재하는 생명체와 같이 내.외부 환경 변화에 대응하여 스스로 변하는 능동적 기능을 갖고 있기 때문에 시스템 성능의 극대화 및 유지비용의 최소화를 가져오게 된다. 이러한 지능재료 기술은 지난 10여년 전부터 연구되었는데 대표적인 웅용을 보면, 산업, 항공, 교통, 운송 분야의 능동 소음 및 반능동 진동제어; 복합 재료 손상위치 탐지시스템, 손상구조 건전성 평가시스템, 교량, 저장탱크, 건물, 유조선, 대형 구조물의 건전성 평가 시스템; 초정밀 직진 안내기구, 나노 스테이지, 절삭오차 보정용 엑츄에이터, 초음파 회전모터, 지능유압 서보밸브, 변형 거울 등의 모터/엑츄에이터; 자동차 엔진 성능제어, 흡배기구 압력측정, 가속도 센서, 자이로센서, 에어백 센서, 타이어 센서 등의 지능 MEMS/NEMS 센서; electronic article 정찰, 도서태그, 비접촉 항공 운송물 분류 및 보안시스템, 전자 운전자 식별시스템, 광섬유 건물 보안 시스템, 지능 신경망 형상 인식 시스템 등의 보안 시스템; 지능항공기 구조물, 인공위성안테나, 헬리콥터 회전익 등의 형상제어가 있다. 본 논문에서는 지능재료 기술을 정리하고 차세대 철도차량 기술에 지금까지 적용한 예를 소개하며 향후 적용할 수 있는 분야들을 가능성 및 실용성 면에서 소개하고자 한다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.84-89
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• 2021

Indium tin oxide (ITO) transparent electrodes, which are used to manufacture organic light-emitting diodes, are used in light-emitting surface electrodes of display EL panels such as cell phones and TVs, liquid crystal panels, transparent switches, and plane heating elements. ITO is a major component that consists of indium and tin and is advantageous in terms of obtaining sheet resistance and light transmittance in a thin film. However, the optical performance of devices decreases with an increase in its thickness. A digital holography system was constructed and measured for the step measurement of the ITO thin film, and the reliability of the technique was verified by comparing the FE-SEM measurement results. The error rate of the step difference measurement was within ±5%. This result demonstrated that this technique is useful for applications in advanced MEMS and NEMS industrial fields.

• Steel and Composite Structures
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• v.32 no.6
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• pp.753-767
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• 2019

Vibration control in mechanical equipments is an important problem where unwanted vibrations are vanish or at least diminished. In this paper, free vibration active control of the porous sandwich piezoelectric polymeric nanocomposite microbeam with microsensor and microactuater layers are investigated. The aim of this research is to reduce amplitude of vibration in micro beam based on linear quadratic regulator (LQR). Modified couple stress theory (MCST) according to sinusoidal shear deformation theory is presented. The porous sandwich microbeam is rested on elastic foundation. The core and face sheet are made of porous and three-phase carbon nanotubes/resin/fiber nanocomposite materials. The equations of motion are extracted by Hamilton's principle and then Navier's type solution are employed for solving them. The governing equations of motion are written in space state form and linear quadratic regulator (LQR) is used for active control approach. The various parameters are conducted to investigate on the frequency response function (FRF) of the sandwich microbeam for vibration active control. The results indicate that the higher length scale to the thickness, the face sheet thickness to total thickness and the considering microsensor and microactutor significantly affect LQR and uncontrolled FRF. Also, the porosity coefficient increasing, Skempton coefficient and Winkler spring constant shift the frequency response to higher frequencies. The obtained results can be useful for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• Steel and Composite Structures
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• v.38 no.5
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• pp.583-597
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• 2021

This article develops a nonclassical model to analyze bending response of squared perforated microbeams considering the coupled effect of microstructure and surface stress under different loading and boundary conditions, those are not be studied before. The corresponding material and geometrical characteristics of regularly squared perforated beams relative to fully filled beam are obtained analytically. The modified couple stress and the modified Gurtin-Murdoch surface elasticity models are adopted to incorporate the microstructure as well as the surface energy effects. The differential equations of equilibrium including the Poisson's effect are derived based on minimum potential energy. Exact closed form solution is obtained for bending behavior of the proposed model considering the classical and nonclassical boundary conditions for both uniformly distributed and concentrated loads. The proposed model is verified with results available in the literature. Influences of the microstructure length scale parameter, surface energy, beam thickness, boundary and loading conditions on the bending behavior of perforated microbeams are investigated. It is observed that microstructure and surface parameters are vital in investigation of the bending behavior of perforated microbeams. The obtained results are supportive for the design, analysis and manufacturing of perforated nanobeams that commonly used in nanoactuators, nanoswitches, MEMS and NEMS systems.

• Steel and Composite Structures
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• v.44 no.2
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• pp.255-270
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• 2022

This manuscript illustrates the dynamic response of nanoscale carbon nanotubes (CNTs) embedded in an elastic media under moving load using doublet mechanics theory, which not considered before. CNTs are modelled by Timoshenko beam theory (TBT) and a bottom to up modelling nano-mechanics is simulated by doublet mechanics theory to capture the size effect of CNTs. To explore the influence of the CNTs configurations on the dynamic behaviour, both armchair and zigzag configurations are considered. The governing equations of motion and the associated boundary conditions are obtained using the Hamiltonian principle. The Navier solution methodology is applied to obtain the solutions for both orientations. Free vibration and forced response under moving loads are considered. The accuracy of the developed procedure is verified by comparing the obtained results with available previous algorithms and good agreement is observed. Parametric studies are conducted to demonstrate effects of doublet length scale, CNTs configurations, moving load velocities as well as the elastic media parameters on the dynamic behaviours of CNTs. The developed procedure is supportive in the design and manufacturing of MEMS/NEMS made from CNTs.

• Advances in nano research
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• v.12 no.6
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• pp.567-581
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• 2022

The free and forced vibration in addition to electric energy harvesting of a piezoelectric disk resting on two-parameter foundation modeled by modified couple stress as well as Kirchhoff plate theory is probed. The governing equations and boundary conditions are obtained using Hamilton's principle. Then, the free and forced vibration are solved using numerical solutions, generalized differential quadrature method (GDQM) and Newmark-beta method. The forced vibration is resulted from a base excitation load. Also, the possible voltage which can be harvested from this system is obtained using generalized integral quadrature method. The validity of the formulation and solution procedure is confirmed using a compassion study. The impact of parameters such as length effect, inner to outer radius ratio, and foundations parameters on the free and forced vibration as well as energy harvesting is investigated in detail. This paper can be a basis for future studies in the area of piezoelectric harvesters in small scales.

• Steel and Composite Structures
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• v.41 no.6
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• pp.805-820
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• 2021

In this research, the buckling and free vibration of three-phase carbon nanotubes/ fiber/ polymer piezoelectric nanocomposite face sheet sandwich microbeam with microsensor and micro-actuator surrounded in elastic foundation based on modified couple stress theory (MCST) is investigated. Three types of porous materials are considered for sandwich core. Higher order (Reddy) and sinusoidal shear deformation beam theories are employed for the displacement fields. Sinusoidal surface stress effects are extracted for sinusoidal shear deformation beam theory. The equations of motion are derived by Hamilton's principle and then the natural frequency and critical buckling load are obtained by Navier's type solution. The determined results are in good agreement with other literatures. The detailed numerical investigation for various parameters is performed for this microsensor-microactuator. The results reveal that the microsensor-microactuator enhanced by increasing of Skempton coefficient, carbon nanotubes diameter length to thickness ratio, small scale factor, elastic foundation, surface stress constants and reduction in porous coefficient, micro-actuator voltage and CNT weight fraction. The valuable results can be expedient for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• Advances in aircraft and spacecraft science
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• v.10 no.3
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• pp.257-279
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• 2023

This manuscript is dedicated to deriving the closed form solutions of free vibration of viscoelastic nanobeam embedded in an elastic medium using nonlocal differential Eringen elasticity theory that not considered before. The kinematic displacements of Euler-Bernoulli and Timoshenko theories are developed to consider the thin nanobeam structure (i.e., zero shear strain/stress) and moderated thick nanobeam (with constant shear strain/stress). To consider the internal damping viscoelastic effect of the structure, Kelvin/Voigt constitutive relation is proposed. The perforation geometry is intended by uniform symmetric squared holes arranged array with equal space. The partial differential equations of motion and boundary conditions of viscoelastic perforated nonlocal nanobeam with elastic foundation are derived by Hamilton principle. Closed form solutions of damped and natural frequencies are evaluated explicitly and verified with prestigious studies. Parametric studies are performed to signify the impact of elastic foundation parameters, viscoelastic coefficients, nanoscale, supporting boundary conditions, and perforation geometry on the dynamic behavior. The closed form solutions can be implemented in the analysis of viscoelastic NEMS/MEMS with perforations and embedded in elastic medium.