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http://dx.doi.org/10.14775/ksmpe.2021.20.09.084

Measurement of Step Difference using Digital Holography of ITO Thin Film Fabricated by Sputtering Method  

Jung, Hyun Il (Dept. of Mechanical System & Automotive Engineering, Graduate School, Chosun UNIV.)
Shin, Ju Yeop (Habaek Co.,Ltd.)
Park, Jong Hyun (Dept. of Mechanical System & Automotive Engineering, Graduate School, Chosun UNIV.)
Jung, Hyunchul (Center for Scientfic Instruments, Industry Academic Cooperation foundation, Chosun UNIV.)
Kim, Kyeong-suk (Dept. of Mechanical Engineering, Chosun UNIV.)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.20, no.9, 2021 , pp. 84-89 More about this Journal
Abstract
Indium tin oxide (ITO) transparent electrodes, which are used to manufacture organic light-emitting diodes, are used in light-emitting surface electrodes of display EL panels such as cell phones and TVs, liquid crystal panels, transparent switches, and plane heating elements. ITO is a major component that consists of indium and tin and is advantageous in terms of obtaining sheet resistance and light transmittance in a thin film. However, the optical performance of devices decreases with an increase in its thickness. A digital holography system was constructed and measured for the step measurement of the ITO thin film, and the reliability of the technique was verified by comparing the FE-SEM measurement results. The error rate of the step difference measurement was within ±5%. This result demonstrated that this technique is useful for applications in advanced MEMS and NEMS industrial fields.
Keywords
ITO; Sputtering Method; Digital Holography; Measurement of Step Difference; Transmission;
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