Measurement of Step Difference using Digital Holography of ITO Thin Film Fabricated by Sputtering Method |
Jung, Hyun Il
(Dept. of Mechanical System & Automotive Engineering, Graduate School, Chosun UNIV.)
Shin, Ju Yeop (Habaek Co.,Ltd.) Park, Jong Hyun (Dept. of Mechanical System & Automotive Engineering, Graduate School, Chosun UNIV.) Jung, Hyunchul (Center for Scientfic Instruments, Industry Academic Cooperation foundation, Chosun UNIV.) Kim, Kyeong-suk (Dept. of Mechanical Engineering, Chosun UNIV.) |
1 | Jung, H. C., Shin, J. Y., and Kim K. S., "Deposition Step-height Measurement for ITO Thin Film Pattern Fabricated with Photo-lithography," Journal of the Korean Society for Nondestructive Testing, Vol 40. No 1, pp. 9-15, 2020. DOI |
2 | Mentley, D. E., "State of flat-panel display technology and future trends," Proceeding of the IEEE, Vol. 90, No. 4, pp. 453-459, 2002. DOI |
3 | Castellano, J. A. and et al., "Handbook of display technology," Elsevier, Amsterdam, Netherlands, pp. 4-5, 2012. |
4 | Kim, G. H., Lee, S. H., Yoon, J. H., and Kim, D. H., "ITO transparent electrode material technology trends," Information Display, Vol. 11, No, 5, pp. 17-22, 2010. DOI |
5 | Kim, K. S., Jung, H. I., Shin, J. Y., Yi, S. H., Kwon, I. H., and Jung, H. C., "Measurement of Line Width for Honeycomb Structured Circuit Using Reflective Digital Holography," Journal of the Korean Society for Nondestructive Testing, Vol. 37, No 3, pp. 158-159, 2017. DOI |
6 | Cuche, E., Marquet, P., and Depeursinge, C., "Spatial filtering for zero-order and twin-image elimination in digital off-axis holography," Applied Optics, Vol. 39, No. 23, pp. 4070-4075, 2000. DOI |
7 | Kim, K. S., "Principle of Digital Holography," in Technical Lecture, Journal of the Korean Society for Nondestructive Testing, Vol 33. No 5, pp. 472-478, 2013. |
8 | Schnars, U. and Jueptner, W., "Digital Holography," Springer, Berlin, Germany, pp. 21-98, 1965. |