• Title/Summary/Keyword: MEMS(Micro-Electro-Mechanical Systems)

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Inertial Sensor Error Rate Reduction Scheme for INS/GPS Integration (INS/GPS 통합에 따른 관성 센서 에러율 감소 방법)

  • Khan, Iftikhar;Baek, Seung-Hyun;Park, Gyung-Leen;Kang, Sung-Min;Lee, Yeon-Seok;Jeong, Tai-Kyeong
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.46 no.3
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    • pp.22-30
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    • 2009
  • GPS and INS integrated systems are expected to become commonly available as a result of low cost Micro-Electro-Mechanical Sensor (MEMS) technology. However, the current performance achieved by low cost sensors is still relatively poor due to the large inertial sensor errors. This is particularly prevalent in the urban environment where there are significant periods of restricted sky view. To reduce the inertial sensor error, GPS and low cost INS are integrated using a Loosely Coupled Kalman Filter architecture which is appropriate in most applications where there is good satellite availability. In this paper, we present the GPS/INS sensor Integration using Loosely Coupled Kalman Filter approach. We also compare the simulation results of Wander Azimuth Strapdown Mechanization Scheme with the reference values generated by the ZH35C trajectory simulator that is describe mathematically either by the geometry of the path, or as the position of the object over time.

Comparison of Micro Trench Machining Characteristics with Nonferrous Metal and Polymer using Single Diamond Cutting Tool (단결정 다이아몬드 공구에 의한 비철금속과 폴리머 소재의 마이크로 트렌치 가공특성 비교)

  • Choi, Hwan-Jin;Jeon, Eun-Chae;Choi, Doo-Sun;Je, Tae-Jin;Kang, Myung-Chang
    • Journal of Powder Materials
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    • v.20 no.5
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    • pp.355-358
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    • 2013
  • Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork (튜닝포크형 미소 캔틸레버 센서의 주파수 특성)

  • Kim Choong Hyun;Ahn Hyo-Sok
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.14 no.5
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    • pp.35-40
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    • 2005
  • An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.

A study on thermo-mechanical behavior of MCD through bulge test analysis

  • Altabey, Wael A.
    • Advances in Computational Design
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    • v.2 no.2
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    • pp.107-119
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    • 2017
  • The Micro circular diaphragm (MCD) is the mechanical actuator part used in the micro electro-mechanical sensors (MEMS) that combine electrical and mechanical components. These actuators are working under harsh mechanical and thermal conditions, so it is very important to study the mechanical and thermal behaviors of these actuators, in order to do with its function successfully. The objective of this paper is to determine the thermo-mechanical behavior of MCD by developing the traditional bulge test technique to achieve the aims of this work. The specimen is first pre-stressed to ensure that is no initial deflection before applied the loads on diaphragm and then clamped between two plates, a differential pressure (P) and temperature ($T_b$) is leading to a deformation of the MCD. Analytical formulation of developed bulge test technique for MCD thermo-mechanical characterization was established with taking in-to account effect of the residual strength from pre-stressed loading. These makes the plane-strain bulge test ideal for studying the mechanical and thermal behavior of diaphragm in both the elastic and plastic regimes. The differential specimen thickness due to bulge effect to describe the mechanical behavior, and the temperature effect on the MCD material properties to study the thermal behavior under deformation were discussed. A finite element model (FEM) can be extended to apply for investigating the reliability of the proposed bulge test of MCD and compare between the FEM results and another one from analytical calculus. The results show that, the good convergence between the finite element model and analytical model.

MEMS Technology for Biophotonic Applications (바이오포토닉스응용을 위한 MEMS 미세광학소자의 개발)

  • Jeong, Gi-Hun
    • Proceedings of the Optical Society of Korea Conference
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    • 2009.02a
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    • pp.387-388
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    • 2009
  • Biophotonics is an emerging area in a fusion of biology and photonics, especially in advanced bioimaging, optical biosensors, photomodulation, and biochip optical read-out, and optical manipulation. This emerging area also creates many opportunities for interdisciplinary study of biology and photonics. Micro-Electro-Mechanical-System(MEMS) is an attractive technology in miniaturizing sensors and actuactors. For last decade, it has contributed to the development for active and passive small and integrated optical components in optical communication. Recently, this technology is also merging into biology for high sensitive biosensing and high resolution and fast bioimaging in small form factor. In this talk, some key advantages of small optical components and recent biophotonic MEMS achievement will be discussed for miniaturized advanced biophotonic systems.

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An Integrated Navigation System Combining INS and Ultrasonic-Speedometer to Overcome GPS-denied Area (GPS 음영 지역 극복을 위한 INS/초음파 속도계 결합 항법 시스템 설계)

  • Choi, Bu-Sung;Yoo, Won-Jae;Kim, La-Woo;Lee, Yu-Dam;Lee, Hyung-Keun
    • Journal of Advanced Navigation Technology
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    • v.23 no.3
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    • pp.228-236
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    • 2019
  • Recently, multi-sensor integration techniques have been actively studied to obtain reliable and accurate navigation solution in GPS (Global Positioning System)-denied harsh environments such as urban canyons, tunnels, and underground roads. In this paper, we propose a low-cost ultrasonic-speedometer utilizing the characteristics of the ultrasonic propagation. An efficient integrated INS (inertial navigation system)/ultrasonic-speedometer navigation system is also proposed to improve the accuracy of positioning in GPS-denied environments. To evaluate the proposed system, car experiments with field-collected measurements were performed. By the experiment results, it was confirmed that the proposed INS/ultrasonic-speedometer system bounds the positioning error growth effectively even though GPS signal is blocked more than 10 seconds and a low-cost MEMS IMU (micro electro mechanical systems inertial measurement unit) is utilized.

Development Status of Crowdsourced Ground Vibration Data Collection System Based on Micro-Electro-Mechanical Systems (MEMS) Sensor (MEMS 센서 기반 지반진동 정보 크라우드소싱 수집시스템 개발 현황)

  • Lee, Sangho;Kwon, Jihoe;Ryu, Dong-Woo
    • Tunnel and Underground Space
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    • v.28 no.6
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    • pp.547-554
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    • 2018
  • Using crowdsourced sensor data collection technique, it is possible to collect high-density ground vibration data which is difficult to obtain by conventional methods. In this study, we have developed a crowdsourced ground vibration data collection system using MEMS sensors mounted on small electronic devices including smartphones, and implemented client and server based on the proposed infrastructure system design. The system is designed to gather vibration data quickly through Android-based smartphones or fixed devices based on Android Things, minimizing the usage of resource like power usage and data transmission traffic of the hardware.

Miniaturization Development of Transmit/Receive Module using a 10W MEMS switch (10W급 MEMS 스위치를 이용한 송수신모듈 소형화 개발)

  • Yi, Hui-min;Jun, Byoung-chul;Lee, Bok-hyung
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.12
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    • pp.2417-2424
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    • 2016
  • Small size and light weight is very important for components used in radar mounted platform such as airborne radar. Recently, the active phased array radar is developed as an array of antennas for thousands of transmit/receive modules to be used as a multi-function radar that can detect and track targets. In this case, the size and weight of the transmit/receive modules are critical factor for developing the radar. In this paper, we developed a compact transmit/receive module using the 10W RF MEMS switch domestically localizing and reduced the circuit area to about 86.5% compared to using a circulator. The developed module satisfies not only electrical requirements but also MIL-STD's environmental specifications. So it can be used in a military device. It can be used at adaptive tunable receivers, reconfigurable smart active antennas and wide band beam electrical steering antennas.

The Extraction Method for the G-Sensitivity Scale-Factor Error of a MEMS Vibratory Gyroscope Using the Inertial Sensor Model (관성센서 오차 모델을 이용한 진동형 MEMS 자이로스코프 G-민감도 환산계수 오차 추출 기법)

  • Park, ByungSu;Han, KyungJun;Lee, SangWoo;Yu, MyeongJong
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.47 no.6
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    • pp.438-445
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    • 2019
  • In this paper, we present a new approach to extract the g-sensitivity scale-factor error for a MEMS gyroscope. MEMS gyroscopes, based on the use of both angular momentum and the Coriolis effect, have a g-sensitivity error due to mass unbalance. Generally, the g-sensitivity error is not considered in general use of gyroscopes, but it deserves our attention if we are to develop for tactical class performance and reliability. The g-sensitivity error during vehicle flight increases navigation error; so it must be analyzed and compensated for the use of MEMS IMU for high dynamics vehicle systems. Therefore, we analyzed how to extract the g-sensitivity scale-factor error from the inertial sensor error model. Furthermore we propose a new method to extract the g-sensitivity error using flight motion simulator. We verified our proposed method with experimental results.

Rapid Manufacturing of 3D-Shaped Microstructures by UV Laser Ablation (UV 레이저 어블레이션에 의한 3차원 형상 미세 구조물의 쾌속제작)

  • 신보성;양성빈;장원석;김재구;김정민
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.7
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    • pp.30-36
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    • 2004
  • Recently, the lead-time of a product is to be shortened in order to satisfy consumer's demand. It is thus important to reduce the manufacturing time and the cost of 3D-shaped microstructures. Micro-Electro-Mechanical Systems (MEMS) and devices are usually fabricated by lithography-based methods. Above method is not flexible for the rapid manufacture of 3D-shaped microstructures because it depends on work's experiences and requires excessive cost and time for making many masks. In this paper, the effective laser micrornachining is developed to fabricate UV sensitive polymer microstructures using laser ablation. The proposed process, named by laser microRP, is a very useful method on rapid manufacturing for 3D-shaped microstructures.