Browse > Article

Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork  

Kim Choong Hyun (한국과학기술연구원 트라이볼로지연구센터)
Ahn Hyo-Sok (한국과학기술연구원 트라이볼로지연구센터)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.14, no.5, 2005 , pp. 35-40 More about this Journal
Abstract
An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.
Keywords
Sensor; Tuning Fork; Micro-cantilever; MEMS(Micro Electro Mechanical Systems;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Nakata, S., Akakabe, S., Nakasuji, M., and Yoshikawa, K., 1996, 'Gas sensing based on a nonlinear response: Discrimination between hydocarbons and quantification of individual components in a gas mixture,' Anal. Chem., Vol. 68, pp. 2067-2072   DOI   ScienceOn
2 Karrai, K., and Grober, R. D., 1995, 'Piezoelectric tip-sample distance control for near-field optical microscope,' Appl. Phys. Lett. Vol. 66, pp. 1842-1844   DOI   ScienceOn
3 Benes, E., Groschl, M., Burger,W., and Schmid, M., 1995, 'Sensors based on piezoelectric resonators,' Sensors and Actuator A, Vol. 48, pp. 1-21   DOI   ScienceOn
4 Kee, J. Y., 2005, 'A study on curvature radius measurement using laser interferometer,' Trans. KSMTE., Vol. 13, No. 6, pp. 34-40
5 Beeby, S. P., Ensell, G., and White, M., Dec. 2000, 'Microengineered silicon double-ended tuning-fork resonators,' Microengineering and Education Journal, pp. 265-271
6 Buchaillot, L., Farnault, E., Hoummady, M., and Fujita, H., 1997, 'Silicon nitride thin film Young's modulus determination by an optical non destructive method,' Japan J. Appl. Phys. Part 2, 36(6B), L794-L797   DOI   ScienceOn
7 Zeisel, D., Menzi, H., and Ullrich, L., 2000, 'A precise and robust quartz sensor based on tuning fork technolgy for (SF6)-gas density control,' Sensors and Actuator A, Vol. 80, pp. 233-236   DOI   ScienceOn
8 Dring, A. L., and Jones, B. E., 2000, 'Integrated on-line multisensing of fluid flow using a mechanical resonator,' Sensors and Actuator A, Vol. 85, pp. 275-279   DOI   ScienceOn
9 ea, S. J., and Welland, M .E., 1998, 'Atomic force microscopy at solid-liquid interface,' Langmuir, Vol. 14, pp. 4186-4197   DOI   ScienceOn
10 Lee, J.-H., Yoo, J.-H., Yim, S.-Y., and Park, S.-H., 2004, 'Symmetric and Asymmetric Resonance Characteristics of a Tuning Fork for Shear-Force Detection,' J. of the Korean Physical Society, Vol. 45, No. 2, pp. 455-459
11 Greenspon, J. E., 'Vibrations of cross-stiffened and sandwich plates with application to underwater sound radiators,' J. Acoust. Soc. Am., Vol. 33, pp. 1485-1491   DOI
12 Soloman, S., 1998, Viscous Fluid Flow Sensors Handbook, McGraw-Hill, New York, pp. 51.1-51.10